300伏全兼容CMOS集成电路器件设计与工艺

本文介绍一种与Ⅳ阱硅栅CMOS集成电路技术完全兼容的高压MOS器件的设计方法和制备工艺。这种高压MOS器件可以和CMOS逻辑电路、模拟电路集成在同一芯片上而不需任何附加工艺步骤。此种器件的闽电压为|1±0.2|V,漏击穿电压大于300V,泄漏电流小于50nA,当宽长此为115,栅偏压V_(GS)=10V时,其饱和电流大于35mA,跨导大于4000μ,而导通电阻小于600Ω。该器件在等离子显示、静电复印、场致发光、高低压开关等方面有广泛的应用。     

埋氧层对SOI/玻璃键合的影响及其键合工艺的改进

运用阳极键合技术,对绝缘体上硅(SOI)/玻璃进行阳极键合实验,发现当埋氧层厚度超过500nm时,键合很难成功.分析了SOI埋氧层厚度对耗尽层电压降及键合静电力的影响,得出由于埋氧层的分压作用,耗尽层的压降减小,键合静电力减弱,导致键合失败.通过设计高压直流和高压脉冲两种输出方式的电源系统,提高氧负离子的迁移速率从而提高键合速度.从平板式阳极引一根探针电极到SOI器件层表面,使键合电压直接加在耗尽层上,避免埋氧层厚度对键合的影响,提高键合静电力.实验表明,通过改进的键合设备能实现不同氧化层厚度的SOI片与玻璃间的键合,该设备还适用于其他异质材料间的阳极键合.     

PDP选址驱动芯片高压管设计

PDP选址驱动芯片实现低压控制高压输出，其中高压管的设计是关键，文中提出了能与低压CMOS工艺相兼容的高压管HV—CMOS结构及其中的高低压转换电路，采用TSUPREM-4与MEDICI软件对其击穿特性进行了相应的模拟分析；通过对已流水的芯片中的高压管进行分析验证看出该结构击穿电压大于80V，工作电流大于40mA。     

氧化钽基RRAM的循环耐受特性优化研究

阻变存储器(RRAM)因其性能优异、可高密度集成以及与CMOS工艺兼容成本较低等众多优点而被广泛研究.用于制备阻变型存储器的关键材料有很多种,其中氧化钽材料由于与标准CMOS工艺兼容而被各大研究机构广泛关注,但TaOx基RRAM存储阵列的可靠性仍存在很大问题,尤其是循环耐受特性.本文制备了4种具有优秀阻变性能的双层Ta2O5/TaOxRRAM器件,Ta2O5层厚度分别为5nm和3nm,TaOx层的x值分别为1.0和0.7.比较了这4种拥有不同器件参数的氧化钽基RRAM器件的循环耐受性能,给出了TaOx基RRAM的循环耐受性能优化方法,发现双层TaOxRRAM的富氧Ta2O5层的厚度越薄且缺氧TaOx层的缺氧程度越大,其循环耐受性能越好.     

基于LDMOS电容的振荡器设计

基于0.5μm CMOS工艺,考虑面积、功耗和工作状态中电容容值等因素,采用LDMOS电容来实现高精度频率的振荡器.一般的CMOS电容特性是非单调变化的,而LDMOS电容只工作在积累区和耗尽区,电容特性可近似理想电容.仿真和测试结果表明,在电源电压1.5～5 V大范围变动的情况下,振荡频率稳定性高,达到设计预期效果.在给电容充电用的静态电流只有40 nA的低电流条件下,振荡器模块中电容的版图面积只有65 μm×65 μm,而且LDMOS工艺和CMOS工艺兼容,可以在不增加工艺复杂度的前提下,用较小的版图面积产生高精度时钟信号.     

标准数字CMOS工艺正交压控振荡器设计

<正>交压控振荡器是高速链路中的一个关键部件.片上集成高质量品质的电感电容等无源器件是影响压控振荡器性能的关键因素.为了兼容传统的数字工艺,采用超深亚微米的数字CMOS工艺进行片上电感电容的集成,并基于此无源器件实现了基于电容耦合的正交压控振荡器,实现中心频率16.12GHz,频率调节范围为10%,1M频偏处的相位噪声为-112dBc,相位误差小于0.39°.     

薄层SOI场pLDMOS击穿机理研究

为了解决薄层SOI(silicon-on-insulator)场LDMOS(laterally diffused metal oxide semiconductor)击穿电压偏低,容易发生背栅穿通的问题,提出一种基于场注入技术的薄层SOI场pLDMOS(p-channel lateral double-diffused MOSFET).通过建立该场pLDMOS的穿通机制数学模型,分析了其4种击穿机理:背栅穿通、沟道横向穿通、横向雪崩击穿和纵向雪崩击穿.仿真结果表明,场注入技术穿过厚场氧层向下注入硼杂质,通过控制注入能量和体区浓度获得浅结深,从而提高器件对背栅穿通的抵抗力;优化的沟道长度和埋氧层厚度分别消除了沟道的横向穿通和纵向雪崩击穿;双层场板结构调制器件表面电场分布,避免了器件过早地横向雪崩击穿.在优化器件相关结构参数和工艺参数基础上,成功基于1.5 μm厚顶层硅SOI材料研制出耐压300 V的场pLDMOS.相比较于常规厚层场pLDMOS器件,顶层硅厚度由大于5μm减小到1.5 μm.     

与ONO反熔丝FPGA匹配的高压器件设计

描述了一种与ONO反熔丝现场可编程门阵列(FPGA)匹配的高压nMOSFET的设计.该器件采用中国电子科技集团公司第五十八研究所晶圆的1.0μm 2P2M ONO反熔丝工艺生产实现.该工艺中,通过一次离子注入和高温推进实现了深结HVNwell;通过将高压注入与栅极多晶保持0.2μm的间距解决了增加结深、提高速度与降低穿通击穿电压的矛盾;通过一次离子注入实现了高压nMOSFET阈值电压的调整.测试结果表明:高压nMOSFET的击穿电压达到21～23 V,远大于ONO反熔丝13.5 V的编程电压;饱和电流为4.32 mA,与工艺改进前相比饱和电流明显增大,工作速度得到提升,满足反熔丝FPGA工作频率的要求;阈值电压为0.78 V,与常压器件兼容.     

一种单平面电极阵列结构的介质上电润湿数字微流控器件

一种高介电常数(K=7.6～11.6)的有机铁电聚合物材料——偏氟乙烯与三氟乙烯共聚物首次作为介质层用于介质上电润湿效应的数字微流控器件.在30 V的外加电压下,液滴与器件间的固-液接触角可以从118°下降到75°,并且呈现明显的电压极性相关性.基于此现象,设计并制作了新型的单平面电极阵列结构的数字微流控器件,简化了器件结构和工艺流程,整个工艺步骤可以与集成电路工艺兼容.新型器件成功实现了3μL的液滴的往返运输,工作电压只需20 V.     

LDMOS器件的几种新技术及其发展趋势

LDMOS(Lateral Double-Diffused MOSFET)是一种横向功率器件,易于与低压信号以及其他器件单片集成。且有高耐压、高增益、低失真等优点,被广泛应用于功率集成电路中。LDMOS器件本身性能的优劣及其工作的可靠性决定了整个功率集成电路的性能的优劣,因此LDMOS的设计在整个工艺开发中显的尤为重要。     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

An Analysis of Catherine＇s Character——Wuthering Heights

Wuthering Heights, Emily Bronte＇s only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.     

Lower Paleozoic oil relationships within Williston Basin, Canada

The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.     

Design and analysis of generic LBS application developing platform

Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.     

Achieving Unusual States of Matter Under High Pressure

正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-     

Exchange-Correlation and Electronic Excitation Energies from Pairing Matrix Fluctuations

We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-     

Density Functional Theory for the Response of Periodic Systems to Electric Fields Based on the Vector Potential Approach

正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that