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1.
ITO薄膜是目前应用最为广泛的透明导电薄膜,通过在ITO中掺杂其他金属可以进一步改善ITO薄膜的光学和电学性能。本文采用射频(RF)磁控溅射法制备了掺钨氧化铟锡(ITO∶W)透明导电薄膜,研究了薄膜厚度、表面形貌、晶体结构以及光学和电学性能与各溅射参数之间的关系。当溅射功率大于40 W时,制备的ITO∶W薄膜为方铁锰矿结构的多晶薄膜,此时薄膜表面光滑平整而且具有良好的结晶性。在基板温度320℃、溅射功率80 W、溅射时间15 min、工作气压0.6 Pa条件下得到了光学和电学性能优良的ITO∶W薄膜,其方块电阻为10.5Ω/、电阻率为4.41×10-4Ω·cm,对应的载流子浓度为2.23×1020 cm-3、迁移率为27.3 cm2·V-1·s-1、可见光(400~700 nm)范围内平均透射率为90.97%。此外,本研究还发现通过调节基板温度影响氧元素的状态可以改变ITO∶W薄膜的电学性能。  相似文献   

2.
利用自由基辅助磁控溅射法在载玻片衬底上制备了透明导电ZnO:Al薄膜(简称AZO薄膜).研究了氢气气氛中后续退火处理对Al掺杂效率以及AZO薄膜性能的影响.研究结果表明,退火处理提高Al的掺杂效率、降低中性杂质浓度,从而提高了AZO薄膜的导电性能.AZO薄膜550℃下在H2气氛中退火处理后,其电阻率为6.5×10-4Ω·cm,550nm波长的透射率为85.7%,载流子浓度为3.3×1020cm-3,迁移率为29.7cm2·V-1·s-1.  相似文献   

3.
室温下采用直流磁控溅射法在PI衬底上制备出具有优异光学性能的ZnO∶Ga透明导电薄膜.研究结果表明,制备了具有C轴择优取向的六角纤锌矿结构的多晶GZO透明导电薄膜.讨论了薄膜厚度对PI衬底上制备ZnO∶Ga薄膜的结构、表面形貌和电学性质的影响.实验数据表明,一定同质缓冲层可有效降低薄膜应力,改善薄膜性能,所得GZO薄膜厚度为129nm时,电阻率具有最小值3.2×10-4Ω.cm.  相似文献   

4.
采用溶胶-凝胶法在ITO导电玻璃衬底上制备氧化锌(ZnO)薄膜,研究其结构、光学透过率和电学性能.AFM测试结果表明,ZnO薄膜晶粒尺寸随退火温度的提高而增大.薄膜的光学透过率曲线显示,在大于400nm的波段,ZnO的透过率比较高,而其禁带宽度约为3.25eV.在相同的电压下,ZnO薄膜产生的电流大小随着退火温度的提高,先增强后减弱,在550℃时达到最大.  相似文献   

5.
用三源共蒸法以高纯的Cu,In,Se粉为原材料制备了CuInSe2薄膜,研究了基片温度、退火处理对薄膜形貌、结构、光学及电学性能的影响.用扫描电镜、X射线衍射仪、紫外-可见分光光度计、霍尔效应仪对薄膜的形貌、结构、光学及电学性能进行检测.研究结果表明:不同基片温度下的薄膜对可见光都具有较高的吸收指数;薄膜在(112)晶面有高度的择优取向;基片温度为200℃时薄膜的Eg为0.99 eV;基片温度为200℃和300℃时薄膜都获得了单一黄铜矿结构的CuInSe2,退火处理后电阻为1.53Ω/cm2和1.55Ω/cm2.  相似文献   

6.
文章采用射频磁控溅射法在氧化铟锡(indium-tin oxide,ITO)玻璃衬底上制备了钛酸镧锂(lithium lanthanum titanate,LLTO)薄膜,并在氩气中经100、200、300℃退火2h。对薄膜的形貌、结构、离子电导率和光电性能进行测试。结果表明,室温下制备的LLTO薄膜为非晶态,随着退火温度的升高,薄膜的离子电导率和可见光透过率均随之升高,经300℃氩气气氛退火后,薄膜的离子电导率为5.0×10-6 S/cm,可见光平均透过率为89%。  相似文献   

7.
热处理对直流磁控溅射ITO薄膜光电学性质的影响   总被引:2,自引:4,他引:2  
利用直流磁控溅射在石英衬底上沉积透明导电的掺锡氧化铟(ITO)薄膜,在相同条件下制备了两种不同溅射时间(30、10min)的样品,样品在400℃的大气中进行1h退火处理.利用分光光度计测量薄膜的正入射透射光谱,并拟合透射光谱得到薄膜的折射率、消光系数及厚度;用Van der Pauw方法测量薄膜电学性质,包括载流子浓度、载流子迁移率和电阻率.实验结果显示退火处理对ITO薄膜的光学、电学性质有重要影响,退火样品在可见光区域的透过率明显提高,且光学吸收边向长波方向移动;然而,退火前薄膜的电学性能更好.  相似文献   

8.
掺银ITO薄膜退火前后的性能比较   总被引:1,自引:0,他引:1  
采用直流磁控溅射方法在室温下制备厚度为130nm的ITO和Ag-ITO薄膜,并在大气环境中不同温度下退火1h,测试其XRD谱和近紫外-可见光透射谱.利用(211)和(222)衍射峰求得两种薄膜的晶格常数,并分析了掺Ag和退火对ITO薄膜晶格常数、结晶度和透射率的影响.结果表明:晶格常数随退火温度的升高而减小,且掺Ag后晶格进一步收缩;两种薄膜经高温退火后在可见光段具有相近的透射率,未退火和低温退火的Ag-ITO薄膜透射率明显低于相同条件处理的ITO薄膜.  相似文献   

9.
采用直流反应磁控溅射法在玻璃衬底上制备了Sn掺杂ZnO透明导电薄膜,用Hall效应测试仪表征了薄膜的电学性能,研究了不同生长条件对薄膜电学性能的影响。研究结果表明,随着Ar/O2比的增加,电阻率先减小后增大,在Ar/O2为6时,取得最低的电阻率为2.02×10-2Ω·cm;随着溅射功率的增大,薄膜电阻率急剧减小,在140 W时获得最低电阻率为2.89×10-2Ω·cm;在溅射时间11min时得到了最低的薄膜电阻率,为1.45×10-2Ω·cm。随着压强的增大,电阻率先急剧减小,后缓慢增大,当溅射压强为0.8Pa时,薄膜电阻率具有最小值,为2.17×10-2Ω·cm。当衬底温度在400~500℃范围内变化时,在475℃时取得最佳电学性能,电阻率为2.26×10-2Ω·cm。在整个实验条件下,当Ar/O2为8、溅射功率为180W、衬底温度为450℃、溅射压强为0.5Pa、溅射时间为11min时,薄膜具有最佳的导电性能,电阻率为1.45×10-2Ω·cm。  相似文献   

10.
离子辅助反应蒸发技术室温制备ITO薄膜   总被引:2,自引:0,他引:2  
室温下利用离子辅助反应蒸发法在玻璃衬底上制备高透射比、低电阻率的ITO透明导电薄膜. 实验结果表明离子辅助蒸发可以有效地降低制备温度,提高薄膜的光电特性,薄膜具有明显的(222)择优取向,晶体粒子尺寸约为21 nm;离子源屏压、通氧量及沉积速率是影响薄膜光电特性的主要因素. 室温制备的ITO薄膜电阻率为2.4×10-3 Ω·cm,可见光平均透射比大于82%.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.  相似文献   

18.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

19.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

20.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

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