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1.
为降低硅中阶梯光栅制作工艺中顶角平台对光栅衍射效率的影响,提出了“紫外曝光‐倒置热熔”结合法用于制备具有小占宽比的光刻胶掩模,对中阶梯光栅设计、硅基片准备以及光刻胶掩模制备等环节进行了研究。A FM 测试结果表明,可以制备占宽比为1∶5的光刻胶掩模,远远超出光栅理论设计中对顶角平台尺寸的要求。  相似文献   

2.
基于微透镜阵列的防伪膜技术便于观察和易于识别的特点,采用高感光度的AZ 1500和较高解像度的AZ MIR-703正性光刻胶以及SU-8负性光刻胶对微透镜阵列防伪膜进行制备,光刻胶热熔法被用来制作微透镜阵列,PDMS被用来制作微透镜阵列的倒模,将SU-8和PDMS倒模配合使用制作最终的微透镜阵列,利用AZ 1500光刻胶制备微缩文字阵列,从而得到具有体视效果的微透镜阵列防伪膜。实验表征和分析表明,这种方法制备的微透镜阵列防伪膜效果明显,均匀性好。该方法与其他方法相比,工艺简单,对材料和设备的要求不高,工艺参数稳定易于控制,是一种微透镜阵列防伪膜制备的简便新方法。  相似文献   

3.
以聚酰亚胺和聚二甲基硅氧烷两类材料为例,研究了聚合物微透镜阵列的制备工艺以及与CCD图像传感器芯片的单片集成工艺,阐述了光学聚合物用于单片集成应具有的材料性能,对热熔产生的光刻胶微透镜阵列进行反应离子刻蚀得到了这两种聚合物材料微透镜阵列。  相似文献   

4.
基于参数优化设计了一种电场分布合理的叉指微电极结构,利用光刻技术在ITO表面成功制备了最小指间距约为4μm的叉指微电极,为微电极制备提供了一种可靠、低成本的制备方法。将这种微电极用于碳纳米管气敏传感器中,并利用氨气对其气敏特性进行测试,结果表明,纳米材料修饰的微电极气敏传感性能得到了明显提高。  相似文献   

5.
 制备了NiOOH的涂膏式电极和粉末微电极,并对两种电极进行了循环伏安测试.测试结果表明,粉末微电极出现了还原峰和氧化峰,而涂膏式电极只出现了还原峰,表明粉末微电极的电极可逆性优于涂膏式电极;对于粉末微电极,其氧化峰及还原峰的峰电位、峰电流最终均趋于稳定,说明所制备NiOOH较为稳定;而其ΔE值最小仅为0.131 V,小于涂膏式电极所测值,说明粉末微电极用于循环伏安测试效果更好,所制备NiOOH样品晶格结构较为稳定,具有较好的电极可逆性.对造成涂膏式电极和粉末微电极测试结果差异的原因进行了分析探讨.  相似文献   

6.
对一种聚酰亚胺基柔性神经微电极进行了结构及制作工艺等方面的优化.针对动物视网膜的刺激,设计制作了具有固定通孔结构的柔性神经微电极.在制作工艺方面,使用空气等离子体表面处理以增强金属层的黏附性,降低了微电极的界面阻抗,增强了微电极稳定性,使之适于长期植入.优化后微电极的电极金属层牢固且具有较低的界面阻抗(43 kΩ),比处理前降低了25.4%,误差减小了约4/5,具有良好的实用性.  相似文献   

7.
摘要:
提出一种新型载药微针结构设计方案,采用硅的各向异性刻蚀工艺与SU 8胶光刻工艺相结合的方法制备硅与光刻胶复合载药微针模具,将硅的各向异性刻蚀所得棱锥结构用于复制微针的尖端部分,SU 8胶曝光套刻出的带凸起结构的柱体用于复制微针的柱体部分,以此微结构为模具,通过2次聚二甲基硅氧烷(PDMS)浇铸复制而得PDMS凹三维结构.在此结构上,溅射金属种子层后采用小电流电铸技术电镀金属Ni,脱模得到载药金属微针.经力学性能测试,其断裂强度为366 MPa,远大于刺穿皮肤所需断裂强度3.183 MPa. 关键词:
微针; 光刻胶; 各向异性刻蚀; 断裂强度 中图分类号: TN 302
文献标志码: A  相似文献   

8.
一种以SU-8为流道材料的集成微流体   总被引:1,自引:0,他引:1  
根据微流量传感器测热式原理,利用Comsol多物理场模拟仿真软件,对微流量传感器进行模拟仿真,分析了流量传感器的关键参数对其灵敏性的影响.在此基础上,设计了一种集成在微流体管道内的微流量传感器.以离子束刻蚀方法制作微电极,SU 8负光刻胶直接制作流道,将该负光刻胶与聚二甲基硅氧烷(PDMS)进行键合封装.最后,对该微流量传感器进行了流速测试.  相似文献   

9.
光刻胶是微纳米加工领域关键的材料之一,主要用于图形转移和蚀刻过程中对基材的保护. 基于水性溶液的光刻工艺可以减少污染,是未来材料发展和工艺改进的方向之一. 本论文针对同一种光刻胶(KMPR),对比有机溶剂和碱性显影液的显影效果,得到最佳水溶液显影液 KOH显影液,探索并得到其显影的较佳浓度范围,通过实验验证和解释温度和浓度的影响.  相似文献   

10.
采用倾斜旋转光刻的方法开展圆锥形异平面微针制备技术研究.通过改进实验室现有设备,以SU8光刻胶结构为模具,通过聚合物材料间的图形转移制备了PDMS异平面圆锥形实心微针的倾角为67°、高度为353μm的微针阵列.该方法具有低成本多材料适用的制备优势.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

18.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

19.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

20.
<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with  相似文献   

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