射频磁控溅射制备c轴取向LiNbO3薄膜研究

采用射频磁控溅射技术,用富Li的LiNbO3靶材在Si(100)和Si(111)基底上制备了LiNbO3薄膜.通过X射线衍射仪(XRD)、扫描电子显微镜(SEM)和X射线光电子能谱(XPS)对LiNbO3薄膜的结晶程度、晶体取向和表面形貌及薄膜与基底结合处的界面结构进行了研究.结果表明:样品在空气中经1 000℃退火1 h处理后,薄膜与Si基底界面处有SiO2生成,得到的LiNbO3薄膜结晶性好,具有高c轴取向,晶粒排列致密且粒径尺寸均匀.     

Texture of the nano-crystalline AlN thin films and the growth conditions in DC magnetron sputtering

DC reactive magnetron sputtering technique has been used for the preparation of Al N thin fi lms. The deposition temperature and the fl ow ratio of N2/Ar were varied and subsequent dependency of the fi lms crystallites orientation/texture has been addressed. In general, deposited fi lms were found hexagonal polycrystalline with a(002) preferred orientation. The X-ray diffraction(XRD) data revealed that the fi lm crystallinity improves,with the increase of substrate temperature from 300 ℃to 500℃. The dropped in full width half maximum(FWHM) of the XRD rocking curve value further con fi rmed it. However, increasing substrate temperature above 500 ℃or reducing the nitrogen condition(from 60 to 30% in the environment) induced the growth of crystallites with(102) and(103) orientations. The rise of rocking curve FWHM for the corresponding conditions depicted that the fi lms texture quality deteriorated. A further con fi rmation of the variation in fi lm texture/orentation with the growth conditions has been obtained from the variation in FWHM values of a dominant E1(TO) mode in the Fourier transform infrared(FTIR) spectra and the E2(high) mode in Raman spectra. We have correlated the columnar structure in AFM surface analyses with the(002) or c-axis orientation as well. Spectroscopic ellipsometry of the samples have shown a higher refractive index at 500 ℃growth temperature.     

电子束蒸发制备的ZnS薄膜的物相结构和光学性能

用电子束蒸发法在不同衬底温度下制备了厚度为100nm左右的ZnS薄膜,利用X射线衍射(XRD)、紫外—可见光分光光度计(UV-vis Spectrophotometer)研究了ZnS薄膜的晶体结构、光学性能,分析了衬底温度对ZnS薄膜结构与光学特性的影响.结果表明:不同衬底温度下制备的ZnS薄膜均具有闪锌矿结构(111)面择优取向生长的特征;衬底温度为200℃时制备的ZnS薄膜的(111)晶面衍射峰最强,半高宽最小,晶粒最大;制备的ZnS薄膜对可见光有良好的透过性,由于量子尺寸效应,电子束蒸发制备的ZnS薄膜光学带隙大于ZnS粉末的带隙.     

Polycrystalline ZnSx Se1—x thin films deposited on ITO glass by MBE

MBE growth of ZnSx Se1-x thin films on ITO coated glass substrates were carried out using ZnS and Se Sources with the substrate temperature ranging from 270℃ to 330℃.The XRD θ/2θ spectra resulted from these films indicated that the as-grown polycrystalline ZnSx Se1-x thin films had a preferred orientation along the (111) planes.The evaluated crystal sizes as deduced from the FWHM of the XRD layer peaks showed strong growth temperature dependence,with the optimized temperature being about 290℃.Both AFM and TEM measurements of these thin films also indicated a similar growth temperature dependence.Hing qual-ity ZnSx Se1-x thin film growm at the optimized temperature had the smoothest surface with lowest RMS valus of 1.2 nm and TEM cross-sectional micrograph showing a well defined columnar structure.     

半导体热电材料Bi2Te3膜的电化学制备

研究了不同沉积电位对电化学生长半导体热电材料Bi2Te3膜沉积过程、膜形貌、结晶性及相结构的影响。利用I-V循环扫描曲线分别研究了纯Bi3 、纯Te4 及其两种离子的混合溶液电化学特性;应用扫描电子显微镜(SEM)、X射线衍射(XRD)、电子能谱(EDS)对膜的微观表面形貌、相结构及成分进行了表征。研究表明:生长的样品为斜方六面体(rhombohedral)晶体结构的Bi2Te3,薄膜表面平整致密,为明显的柱状晶结构,具有(110)择优取向;沉积电位越接近还原峰最大电流处,膜的生长电荷效率越高,薄膜结晶性也越好。     

镍基体上银和铜膜的择优取向及其价电子分析

目的研究在Ni（100）基体上沉积Ag和Cu膜的择优取向的形成机理。方法采用X-射线衍射进行分析,根据固体与分子经验电子理论（EET）的键距差（BLD）方法,计算Ni（100）晶面、Ag和Cu的33个晶面的平均电子密度及相对电子密度差。结果X-射线衍射分析结果表明,在Ni（100）基体上沉积Ag和Cu膜的主要择优取向为（111）,其次依次为（100）和（110）。计算结果表明,2个晶面的电子密度差越小,相应的择优取向越强。结论从界面处电子密度的连续原理成功地分析了在基体上沉积薄膜的择优取向的产生机理。     

铝掺杂氧化锌薄膜的光学性能及其微结构研究

以氧化铝(Al2O3)掺杂的氧化锌(Zn O)陶瓷靶作为溅射靶材,采用射频磁控溅射工艺在玻璃基片上制备了具有c轴择优取向的铝掺杂氧化锌(Zn O:Al)薄膜样品.通过可见-紫外光分光光度计和X射线衍射仪的测试表征,研究了生长温度对薄膜光学性能及其微结构的影响.实验结果表明:薄膜性能和微观结构与生长温度密切相关.随着生长温度的升高,样品的可见光平均透过率、(002)择优取向程度和晶粒尺寸均呈非单调变化,生长温度为640 K的样品具有最好的透光性能和晶体质量.同时薄膜样品的折射率均表现为正常色散特性,其光学能隙随生长温度升高而单调增大.与未掺杂Zn O块材的能隙相比,所有Zn O:Al薄膜样品的直接光学能隙均变宽.     

真空蒸发法制备CdS薄膜及其性能研究

用真空蒸发法制备了CdS薄膜,用扫描电镜、X射线衍射仪、紫外-可见光分光光度计、四探针对薄膜的形貌、结构、光电性能进行分析测试.研究结果表明,不同基片温度下所制备的CdS薄膜主要为六方相,CdS薄膜在(002)晶面有高度的择优取向;不同基片温度下的薄膜对可见光的透光率都超过70%;薄膜的电阻率随基片温度的升高而增大;基片温度为50℃时薄膜的Eg为2.41 eV;在200℃退火处理改善了CdS薄膜的质量,结晶度提高,电阻率降低,晶粒尺寸增大;基片温度为50℃时薄膜在200℃退火后的电阻率为255Ω.cm.     

Nd掺杂对ZnO薄膜结构及室温光致发光特性的影响

通过射频磁控溅射技术在Si（111）衬底上制备了不同含量的Nd掺杂ZnO薄膜.XRD和AFM分析表明,Nd掺杂没有改变ZnO薄膜的结构,薄膜为纳米多晶结构,未掺杂ZnO沿c择优生长.Nd掺杂使ZnO薄膜表面粗糙,起伏较大,薄膜中随Nd掺杂量的增加颗粒减小.室温光致发光谱显示,薄膜出现了395nm的强紫光峰和495nm的弱绿光峰,同时,Nd掺杂不改变PL谱的峰位置,Nd含量对PL谱的峰强度产生了一定影响.     

沉积温度对NbN膜层微观结构的影响

利用有磁过滤器的等离子体沉积装置,在不同温度的Si基底上沉积氮化铌（NbN）薄膜,通过XRD,XPS,SEM等分析,研究了NbN薄的表面表貌与微观结构跟温度的关系,发现沉积温度对掺优取向有较强的影响：从室温到约300℃得到的薄膜在（220）峰表现出很强的择优取向,500℃（220）峰变得很弱,（200）峰表现出择优取向,但不明显,同时,膜层中N和Nb的原子比先随温度的升高而升高,后稍有降低,温度升高,δ-NbN的晶粒变大,室温到300℃很难得到完整的NbN膜,而在500℃得以的薄膜完整且光滑,膜层中得到单一的δ-NbN相。     

脉冲偏压占空比对MgO薄膜成分及结构的影响

采用阴极真空电弧离子沉积技术在玻璃衬底上制备出了具有择优取向的透明MgO薄膜.利用卢瑟福背散射谱、X射线衍射仪、扫描电子显微镜及紫外-可见吸收光谱仪分别对MgO薄膜的成分、结构、表面形貌及可见光透过率进行了分析.结果表明:MgO薄膜具有(100)和(110)两种取向,且择优取向趋势不随占空比的变化而变化.随着占空比的增大,脉冲偏压为-150V时制备的MgO薄膜中Mg和O的原子含量之比逐渐增大,占空比为30%时,n(Mg)∶n(O)接近1∶1;SEM图表明,晶粒尺寸随着占空比的增大几乎没有发生明显的改变;在350～900nm范围内,MgO薄膜的可见光透过率可以达到90%以上.     

基体温度对磁控溅射TiN薄膜结构与力学性能的影响

采用直流反应磁控溅射方法在304不锈钢表面沉积TiN薄膜.利用场发射扫描电镜、X射线衍射仪和纳米压痕仪研究基体温度对TiN薄膜结构与性能的影响.结果表明:TiN薄膜为柱状结构,表面平整、致密.薄膜为面心立方结构(fcc)TiN并存在择优取向,室温和150℃时薄膜为(111)晶面择优取向,300和450℃时薄膜为(200)晶面择优取向;室温时薄膜厚度仅为0.63μm,加温到150℃后膜厚增加到1μm左右,但继续加温对膜厚影响不明显;平均晶粒尺寸随着基体温度的升高略有上升;薄膜的硬度、弹性模量和韧性(H3/E*2)随基体温度的升高而增加,最值分别达到25.4,289.4和0.1744GPa.     

衬底对溶胶-凝胶法制备ZnO薄膜晶体结构和发光特性的影响

采用溶胶-凝胶(Sol-Gel)旋涂法在Si(100)和熔石英衬底上制备ZnO薄膜,利用X射线衍射(XRD)、光致发光谱(PL)等手段分析得到ZnO薄膜的晶体结构和发光特性.结果表明,在Si(100)衬底上制备的ZnO薄膜呈现沿各个晶面自由生长的特性,而熔石英衬底上制备的样品呈现沿c轴择优取向生长的特性.     

沉积厚度对L10-FePt薄膜(001)织构和磁性的影响

采用直流磁控溅射方法在表面氧化的Si(001)基片上制备不同厚度的FePt薄膜, 并利用原子力显微镜(AFM)、 X射线衍射(XRD)和振动样品磁强计(VSM)表征样品的形貌、结构和磁性. 结果表明: 将薄膜样品在H₂气氛中经600 ℃退火1 h, 得到了L1₀-FePt薄膜; 薄膜具有(001)织构或明显的(001)取向生长, 随着沉积厚度
的增加, FePt的晶粒尺寸变大, 样品的有序化程度增大, (001)取向生长呈减弱的趋势; 样品均具有明显的垂直磁各向异性, 随着薄膜厚度的增加, 平行膜面矫顽力增大, 垂直膜面矫顽力先增大后减小, 当沉积厚度为10 nm时, 样品的垂直磁各向异性最佳.     

Anisotropic spinodal dewetting as a route to self-assembly of patterned surfaces

The ability to pattern surfaces on a microscopic length scale is of importance for technological applications such as the fabrication of microelectronic circuits and digital storage media. Devices fabricated entirely from polymers are now available, opening up the possibility of adapting polymer processing technologies to fabricate cheap, large-area devices using non-lithographic techniques--for example, by exploiting dewetting and phase separation in thin films. But the final pattern adopted by the polymer film using such approaches requires a template printed onto the substrate by optical lithography, microcontact printing or vapour deposition. Here we describe a simple process for patterning surfaces that does not require a template. Our method involves the spinodal dewetting of a polymer surface by a thin polymer film, in which a liquid film breaks up owing to the amplification of thermal fluctuations in film thickness induced by dispersion forces. A preferred orientation is imposed on the dewetting process simply by rubbing the substrate, and this gives rise to patterns of remarkably well-aligned polymer lines. The width of these lines is well-defined, and is controlled by the magnitude of the dispersion forces at the interface, which in turn can be varied by varying the thickness of the polymer substrate. We expect that further work will make it possible to optimize the degree of order in the final morphology.     

温度补偿对氮化铝(AlN)薄膜择优取向的影响

氮化铝(AlN)薄膜不同的择优取向直接影响其压电性和声波传递速度.本文通过改变衬底补偿温度对AlN薄膜的择优取向进行了研究.在正常实验溅射完成后继续通入氮气对衬底进行温度补偿.应用XRD和AFM对氮化铝薄膜的取向性和表面形貌进行表征分析,结果表明本实验制备出了较好的(002)面和(100)面取向的AlN薄膜,而且薄膜沉积均匀,比较致密.     

Tunability of physical properties of (Cd:Zn)S thin film by Close Space Sublimation Process (CSSP)

The present paper reports on a systematic study of the influence of Zn alloying on the structural and optical properties of Cd1 xZnxS thin films. X-ray diffraction study for structural analysis reveals that the two binary compounds have been completely transformed into ternary compound with hexagonal (wurtzite) structure with preferred orientation along c-direction with (002) planes. The optical properties such as optical constants and band gap energy of the films were examined by using spectroscopic ellipsometer and Photospectrometery. It was found that the optical constants (n and k) decrease with the addition of Zn content in the alloy. It was also confirmed that the band gap increases with increasing Zn amount in the alloy and is attributed to quantum size effect in the grain size. Raman spectroscopy analysis shows one dominant phonon band at 326 cm 1, the so-called longitudinal optical (LO) mode for all the alloy composition (x). The appearance of a single phonon band in the Raman spectra established the formation of single phase hexagonal structured Cd1 xZnxS thin film. The LO band is asymmetrically broaden and high frequency shifted due to potential fluctuation caused by the dopant material. The AFM results showed that the surface roughness was decreased with increasing Zn content.     

负偏压对六方氮化硼薄膜沉积特性的影响

利用射频磁控溅射法在n型Si(100)衬底上沉积六方氮化硼薄膜(h-BN),采用AFM、Raman、XPS、FTIR等技术研究负偏压对所沉积薄膜生长模式、结构、表面粗糙度、薄膜取向、相变等特性的影响。结果表明,当负偏压为0V时,沉积所得h-BN薄膜表面粗糙度较低、结晶性良好、c轴垂直于衬底且以层状模式生长;随着负偏压的增加,薄膜由层状模式生长转变为岛状模式生长,表面粗糙度增加,且h-BN经亚稳相E-BN和wBN向c-BN转变,使得BN薄膜相系统更加混乱,不利于高质量层状h-BN薄膜的获取。     

The effects of interface scattering on thermoelectric properties of film thermoelectric materials

A theoretical model taking into consideration the interface effects is established to predict the Seebeck coefficient and the electrical conductivity for a polycrystalline thermoelectric （TE） thin film. The interface scattering mechanisms （including the film-surface scattering and grain-boundary scattering） of the transport electrons in the film materials are revealed. The relations between the Seebeck coefficient, the electrical conductivity and the interface parameters （the film-surface reflection coefficient and the grain-boundary transmission coefficient） are then discussed with respect to the proposed model. The differences in the TE properties between the films and bulk materials caused by size restriction are investigated. The results indicate that the higher grain number leads to stronger grain-boundary scattering and more distinct size effects of the TE properties. In contrast to the surface effect, the grain-boundary effect plays a main role in the TE properties of TE films with polycrystalline structures.     

溶胶-凝胶法制备ZnO及Fe掺杂ZnO薄膜及其表征

采用溶胶-凝胶法在玻璃基体上制备了ZnO和Fe掺杂ZnO薄膜,并通过扫描电子显微镜、原子力显微镜、X射线衍射仪和紫外-可见分光光度计对所制备薄膜的表面形貌、结构和光学性能进行分析。结果表明,2种薄膜均表面光滑,为沿(101)晶面取向的纤锌矿结构;与ZnO薄膜相比,Fe掺杂ZnO薄膜表面更光滑,且晶粒尺寸从58.512nm减小到36.460nm;另外,Fe掺杂后,沿(101)晶面的取向程度减弱,且禁带宽度由3.1eV增大到3.4eV。