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1.
退火温度对钽基RuO2·nH2O电沉积薄膜电容性能的影响   总被引:7,自引:0,他引:7  
以RuCl3·xH2O的水溶液为电沉积溶液, 通过恒流电沉积法在钽箔上电沉积一层RuO2·nH2O薄膜, 研究退火温度对RuO2·nH2O薄膜的电容性能的影响;采用CHI660B电化学测试仪和循环伏安法对薄膜的电容性能进行测试;分别采用扫描电子显微电镜、能谱仪及X射线衍射仪对薄膜的形貌和微孔形态、薄膜元素及薄膜的物相进行分析. 结果表明, 未经退火处理的RuO2·nH2O薄膜的电容性能不稳定, 在循环伏安法测试中电容量随循环次数的增加而降低;将RuO2·nH2O薄膜分别在不同温度(100, 150, 200, 250和300 ℃)下进行的2 h的退火处理, 经退火处理后的RuO2·nH2O薄膜的电容性能经过60次的循环后趋于稳定, 其中, 经过100 ℃退火处理的RuO2·nH2O薄膜的比电容最大, 其比电容为0.083 8 F/cm2.  相似文献   

2.
利用磁控溅射方法在单晶硅基片上制备出不同Al含量AlCN非晶薄膜,随后分别在700℃和1000℃进行真空退火热处理.使用X射线衍射仪和高分辨透射电镜研究了沉积态和退火态薄膜的组织和微观结构,用纳米压痕仪测试硬度和弹性模量.结果表明,退火态薄膜组织和微观结构强烈依赖于薄膜的Al含量.经1000℃退火后,低Al含量AlCN薄膜没有出现结晶现象,但形成了分层;高Al含量AlCN薄膜中,退火促使AlN纳米晶的生成,使薄膜形成了非晶包裹纳米晶的复合结构,随着距表面深度的增加,形成的纳米晶密度和尺寸均有减小的趋势.随着退火温度的升高,AlCN薄膜的硬度和弹性模量均降低;而对于高Al含量AlCN薄膜,由于形成了纳米复合结构,硬度和弹性模量下降幅度减少.  相似文献   

3.
采用甚高频等离子增强化学气相沉积技术,以SiH_4,CH_4和O_2作为反应气源,在150℃下制备非晶碳氧化硅薄膜,并对薄膜进行不同条件下快速热退火处理,研究快速热退火处理对其结构和发光特性的影响.实验表明,原始沉积薄膜在可见光全波段展现较强的光致发光特性,经过快速热退火处理后,其发光强度显著增强.薄膜在700℃经过快速热退火10s后,相比于原始沉积薄膜,其发光强度增强6倍,肉眼可见强的蓝绿光光发射.光荧光谱(PL)分析表明,薄膜的发光峰位不随激发波长的改变而发生明显变化.通过结合拉曼(Raman)光谱及傅里叶红外吸收(FTIR)光谱对薄膜的微结构及键合结构分析,分析了不同退火温度和退火时间对其蓝绿光发射增强机制的影响.  相似文献   

4.
光电薄膜材料FeS_2(黄铁矿)的研制   总被引:1,自引:0,他引:1  
研究了用电沉积法制作太阳能电池薄膜材料。分别用三种含铁元素和硫元素的水溶液淀积 Fe S2 薄膜 ,将所得的样品在 N2 氛围中退火 ,退火温度分别为 40 0℃和 50 0℃。结果表明 ,从 Fe SO4 · 7H2 O+Na2 S2 O3· 5H2 O水溶液得到的薄膜中含 Fe S2 的衍射峰比从其它两种水溶液得到的薄膜中含 Fe S2 的衍射峰多而明 ;退火温度为 40 0℃比 50 0℃更合适 ;另外 ,为防止薄膜氧化 ,在真空中干燥效果最佳。  相似文献   

5.
利用多靶磁控共溅射技术,在不同基底偏压下制备了多组NbN-NbB_2纳米复合膜,用以探究偏压对复合膜显微结构和力学性能的影响.分别利用X线衍射仪(XRD)、原子力显微镜(AFM)、透射电子显微镜(TEM)和纳米压痕仪对复合膜的结构、断面形貌、表面粗糙度及其硬度和弹性模量进行测试.实验结果表明:偏压为-160 V时,NbN-NbB_2复合薄膜中出现了立方相δ-NbN与六方相δ′-NbN的混合相,并以δ-NbN(111)晶面取向为主相;此时,复合膜结晶性最强,且具有非晶NbB_2穿插在结晶态NbN中和结晶态NbN紧密包覆非晶NbB_2的相互嵌入式复合结构,这种结构的形成使复合膜的硬度最高达到26.542GPa,弹性模量为291.154GPa;增加偏压至-200V时,复合膜中δ-NbN(111)逐渐向δ′-NbN(110)取向发生转变.退火处理后复合膜硬度值无明显变化,且趋于稳定,说明复合膜具有良好的热稳定性.  相似文献   

6.
利用等离子体增强化学气相沉积技术,在不同脉冲偏压条件下,在304不锈钢表面沉积了含氢类金刚石薄膜。利用Raman光谱对薄膜中氢、sp~2及sp~3含量进行了表征;利用纳米压痕仪对薄膜杨氏模量及硬度进行了检测;利用台阶仪对薄膜的厚度进行了测量;利用原子力显微镜对薄膜的形貌进行了表征,并探讨了沉积偏压对薄膜机械性能的影响规律及相应影响机制。结果表明:随着脉冲偏压的升高,薄膜中氢含量减少,C-C及C-H sp~3含量减少。I (D)/I (G)从1.45增加至1.71,薄膜硬度从12.40 GPa增加至16.10 GPa,薄膜厚度逐渐增加,厚度最厚达到1.94μm。当沉积偏压为2 400 V时,C-Csp~3含量最高且杨氏模量最大可达151.7 GPa,粗糙度最低为0.432 nm。当沉积偏压为2 600 V时,薄膜硬度值最大,氢含量最低。等离子体增强化学气相沉积制备含氢类金刚石薄膜的硬度不能完全由薄膜中C-C sp~3的含量决定,薄膜硬度随C-C sp~3含量变化存在滞后效应。  相似文献   

7.
N2分压对磁控溅射NbN薄膜微结构与力学性能的影响   总被引:8,自引:1,他引:8  
采用反应磁控溅射法在不同的氮分压下制备了一系列NbN薄膜.用XRD和TEM表征了薄膜的相组成和微观结构,力学探针测量了薄膜的硬度和弹性模量,AFM观察了薄膜的表面形貌并测量了压痕尺寸以校验硬度值的准确性.研究了氮分压对薄膜相组成、微结构和力学性能的影响.结果表明,氮分压对薄膜的沉积速率、相组成、硬度和弹性模量均有明显的影响:低氮分压下,薄膜的沉积速率较高,制备的薄膜样品为六方β-Nb2N和立方δ-NbN两相结构;随氮分压的升高,薄膜形成δ-NbN单相组织,相应地,薄膜获得最高的硬度(36.6GPa)和弹性模量(457GPa);进一步升高氮分压,获得的薄膜为δ-NbN和六方ε-NbN的两相组织,其硬度和模量亦有所降低.  相似文献   

8.
采用大型中频磁控溅射系统制备了全固态薄膜电池用LiCoO_2阴极薄膜材料,研究了退火前后其结构及形貌的变化。结果表明,沉积的LiCoO_2薄膜具有晶态结构;沉积状态薄膜的晶体取向决定着退火后薄膜的晶体择优取向,退火只是使晶粒更加完整,并使择优取向发展得更好;沉积过程的O_2/Ar(氧分压)对薄膜的晶体取向影响很大,适当控制沉积条件,采用工业规模的中频磁控溅射设备可以制备出取向良好的LiCoO_2薄膜阴极材料。  相似文献   

9.
采用脉冲激光沉积镀膜技术在Si(100)衬底上生长了La_2Ti_2O_7栅介质薄膜.通过X射线衍射、原子力显微及同步辐射红外透射光谱技术探索了不同温度下的后退火处理对薄膜结构及介电性能产生的影响.结果表明,未经退火处理的La_2Ti_2O_7薄膜为非晶态,退火后薄膜结晶形成单斜结构.红外谱表明退火处理能够显著增加薄膜介电常数.沉积的非晶态薄膜具有较低的介电常数是因为损失了一些声子振动模式,尤其在低波数段损失的更加明显.实验结果说明后退火处理对La_2Ti_2O_7薄膜的介电性能有非常重要的影响.  相似文献   

10.
采用等离子体增强化学气相沉积 (PECVD),在单晶硅衬底上生长氮化硅(SiN)薄膜,再对薄膜进行快速热退火处理,研究了在不同温度下SiN薄膜的退火特性.通过椭圆偏振光仪测量了薄膜厚度和薄膜的折射率,发现退火后薄膜的厚度下降,折射率升高;采用准稳态光电导衰减QSSPCD测少数载流子寿命,发现少子寿命有很大程度的下降.还研究了SiN薄膜对多晶硅电池性能的影响,发现它能较大幅度地提高电池效率.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.  相似文献   

18.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

19.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

20.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

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