掺铝氧化锌ZAO(ZnO:Al)薄膜研究

描述ZAO(ZnO:Al)薄膜的晶体结构,论述ZAO薄膜的光学、电学性质与其结构的关系,介绍了掺铝氧化锌ZAO薄膜的各种制备方法,并总结了ZAO薄膜在各种领域中的应用.提出了薄膜材料研究的关键问题以及今后的发展方向.     

一种三明治结构透明导电薄膜的制备及光电性能

采用直流磁控溅射法制备了ZAO/Cu/ZAO多层透明导电薄膜,研究了参铝氧化锌(ZAO)薄膜厚度对多层膜晶体结构和光电特性的影响.用X射线衍射仪、原子力显微镜、紫外可见光分光光度计及四探针对样品的晶体结构与光电性能等进行了表征.结果表明,多层膜的平均透过率最高达86%,方块电阻达9/sq;ZAO膜层厚度对多层膜的导电性能影响很小,但严重影响可见光透过率;多层膜中的ZAO层仍呈ZnO晶态结构,且具有明显的c轴取向特征.这种三明治结构是一种性能优良的太阳能透明导电层候选材料.     

ZAO透明导电纳米薄膜中Al元素分布对其性能的影响

主要对直流反应磁控溅射法制备ZAO纳米薄膜中Al元素的相对含量进行了分析,对其作了EDS,XRD测试,并研究了Al质量分数与ZAO薄膜的光、电性能的关系·得出ZAO薄膜中成分是均匀的,具有ZnO晶体结构;Al元素的掺杂没有形成新的化合物(Al2O3),Al对Zn的掺杂替换是提高ZAO薄膜导电性能的关键因素,对薄膜在可见光区的透射性影响不大·制备的薄膜最低电阻率为4 5×10-4Ω·cm,可见光透射率达到80%以上·     

透明导电薄膜ZnO∶Al的组织结构分析

Zno∶Al(ZAO)透明导电薄膜具有高的载离子浓度和大的光学禁带宽度,因而具有优异的电学和光学性能,极具应用价值.本文研究了ZAO薄膜的微观组织结构、化学成分、及其应用前景.     

Fabrication and properties of ZAO powder,sputtering target materials and the related films

Aluminum-doped zinc oxide (ZnO:Al), abbreviated as ZAO, is a novel and widely used transparent conductive material. The ZAO powder was synthesized by chemical coprecipitation. The ZAO ceramic sputtering target materials were fabricated by sintering in air, and ZAO transparent conductive films were prepared by RF magnetron sputtering on glass substrates. XRD proved that such films had an orientation of (002) crystal panel paralleled to the surface of the glass substrate. The average transmittance of the films in the visible region exceeded 80%.     

磁控溅射制备参数对 ZnO:Al电学性能的影响

ZnO:Al(ZAO)透明导电薄膜是一种n型半导体,有高的载离子浓度和大的光学禁带宽度,具有优异的电学和光学性能,有极广的应用前景.本文介绍了ZAO薄膜的广泛用途和今后研究的趋势,并着重分析了磁控溅射制备参数对电学性能的影响.     

CNTs-ZAO复合粉体的制备及表征

以HCl溶液和H2SO4-HNO3的混合酸溶液作为纯化强酸溶液,采用强酸氧化法纯化碳纳米管(CNTs)。将纯化后的CNTs加入到ZnO-Al2O3(ZAO)前驱体溶液中,通过均匀沉淀法,制得CNTs-ZAO复合粉体。采用差示扫描量热仪(TG-DSC)、傅里叶红外光谱仪(FT-IR)、X线衍射仪(XRD)和扫描电子显微镜(SEM)表征纯化前后CNTs和CNTs-ZAO复合粉体。结果表明:在80℃、V(H2SO4)∶V(HNO3)=1∶1的条件下,水浴纯化反应2 h,得到纯化效果较好的CNTs。在n(CNTs)∶n(ZAO)=4∶1、ZAO前驱体反应30 min之前加入纯化CNTs,CNTs的表面负载上一层均匀、致密的纳米ZAO颗粒。     

直流磁控溅射制备透明导电ZAO薄膜退火处理时间的研究

为改进太阳能薄膜材料制备工艺,利用直流磁控溅射方法,在较高氩气压强——12.7 Pa下制备出透明导电掺铝ZnO(ZAO)薄膜,并对其进行退火处理时间的研究。与其他研究者不同,利用较高压强也制备出高性能ZAO薄膜,并且可以利用退火处理改善薄膜的晶体结构、内应力、表面形貌以及光电性能。薄膜的电阻率随着退火时间的增加而降低,从原位沉积时的3.5×10-3Ω.cm,下降到1.9×10-3Ω.cm;薄膜的平均透光率增加到80%以上,光谱吸收边发生蓝移。结果表明,退火2 h,ZAO性能改善最优。     

溶胶-凝胶法制备掺铝氧化锌透明导电膜的正交实验研究

采用溶胶-凝胶法制备了掺铝氧化锌(ZnO：Al,ZAO)透明导电膜。对薄膜用X射线衍射(XRD)、扫描电镜(SEM)、四探针仪及紫外 可见分光光度计等分析测试手段进行了表征;通过正交实验探讨了溶胶浓度、铝离子的摩尔掺杂量以及退火温度等因素对其电阻率的影响。结果表明,薄膜电阻率随溶胶浓度、铝离子掺杂量的增加,呈现先减小后增大的趋势,并随退火温度的升高而减小,从而确定了制备ZAO透明导电膜的优化工艺条件为：溶胶浓度0.8mol/L,铝离子的掺杂量1.0%(摩尔分数),退火温度550℃。在优化工艺条件下制得的ZAO透明导电薄膜具有标准的ZnO纤锌矿结构,其电阻率为1.275×10^-3Ω·cm,平均透光率达84%。     

衬底温度对射频溅射沉积ZAO透明导电薄膜性能的影响

利用射频磁控溅射法制备了ZAO透明导电薄膜,通过XRD、SEM等手段对薄膜特性进行测试分析,研究了衬底温度对薄膜结构、表面形貌及其光电性能的影响.结果表明:衬底温度从300 ℃增加到400 ℃时,薄膜晶粒增大,晶粒结构分布规则,电阻率快速下降,可见光平均透过率明显提高.当衬底温度为400 ℃时ZAO薄膜的电阻率为2×10-3 Ω*cm、透过率为84 %,但是当衬底温度进一步升高时,薄膜性质将呈现下降趋势.     

Nd掺杂对ZnO薄膜结构及室温光致发光特性的影响

通过射频磁控溅射技术在Si（111）衬底上制备了不同含量的Nd掺杂ZnO薄膜.XRD和AFM分析表明,Nd掺杂没有改变ZnO薄膜的结构,薄膜为纳米多晶结构,未掺杂ZnO沿c择优生长.Nd掺杂使ZnO薄膜表面粗糙,起伏较大,薄膜中随Nd掺杂量的增加颗粒减小.室温光致发光谱显示,薄膜出现了395nm的强紫光峰和495nm的弱绿光峰,同时,Nd掺杂不改变PL谱的峰位置,Nd含量对PL谱的峰强度产生了一定影响.     

具有优良绝缘性能的Ta2O5介质膜

介绍了一种具有优良绝缘性能的Ｔａ２Ｏ５介质膜,它由溅射／阳极氧化二步法工艺制备而成。用原子力显微镜对Ｔａ２Ｏ５膜进行了表面形貌分析,对它的电特性进行了测试,并与溅射Ｔａ２Ｏ５膜和阳极氧化Ｔａ２Ｏ５膜进行了比较。结果表明,溅射／阳极氧化Ｔａ２Ｏ５膜的漏电流比溅ＴＭＤＦＡ２Ｏ５膜和阳极氧化Ｔａ２Ｏ５膜分别减少了３－４和１－２个数量级,击穿场强也远高于后２种膜。     

在二甲亚砜中脉冲电沉积La-Co-Fe合金膜的研究

应用脉冲电解技术制备La-Co-Fe合金膜,加入络合剂乙二胺后,可制备出表面光滑、致密、粘附性好和有金属光泽的La-Co-Fe合金膜.室温下所得合金膜是非晶态的,并对非晶态La-Co-Fe合金膜进行了磁性测试.经热处理后,La-Co-Fe合金膜在物相中有La和LaFeO3.     

近晶A相液晶在聚酰亚胺LB膜上的排列

合成了聚酰胺酸,研究了它在气液界面上的成膜条件;制备了聚酰胺酸盐的LB膜,通过亚胺化制得了Y型聚酰亚胺LB膜;用红外光谱证实了亚胺化较为完全。用聚酰亚胺LB膜作为排列S_A相液晶的定向膜,制成了液晶盒。通过偏光显微镜证实了未经摩擦的聚酰亚胺LB膜可以排列成近晶相液晶分子。讨论了影响成膜及液晶分子在聚酰亚胺LB膜上排列的因素。     

AZO薄膜的光学性质研究

采用直流反应磁控溅射法,用Zn(99.99%)掺 Al(1.5%)靶制备出高质量的Al掺杂的ZnO(AZO)薄膜,用紫外可见、红外分光光度计等测试手段对沉积的薄膜进行了表征和分析,并对AZO薄膜的折射率和厚度进行了理论分析.薄膜的光谱分析结果表明:薄膜样品的可见光透射率平均值均在80%以上.AZO薄膜在紫外有很强的吸收峰,在红外区域,其反射率可达70%.通过理论计算得出了AZO薄膜样品的厚度为101 nm,与台阶仪测量的结果基本相符.     

Al－Ti合金阳极氧化膜的化学组成及微观结构

着重研究了Ａｌ含量顺次递增的３种组分，Ａｌ－Ｔｉ合金阳极氧化膜的化学组成及微观结构。用ＸＰＳ俗分析表明：氧化膜是由Ａｌ２Ｏ３和ＴｉＯ２组成，经ＡＥＳ深度剖面分析得到了两者之间的比例，并推理出膜的微观结构模型，用ＳＥＭ观测了３种膜的表面形貌，清楚地看到：合金组分不同，膜的致密度不同。ＸＲＤ实验证明：氧化膜的晶型较复杂，且有取向。     

Fe3N纳米晶薄膜退火过程的结构演变及其磁性

采用直流磁控溅射方法, 在氮气分压为10%的条件下获得了单相纳米晶ε-Fe₃N磁性薄膜, 先将薄膜样品在真空中分别于500,600,700,800 ℃退火, 再利用X射线衍射(XRD)和振动样品磁强计(VSM)表征不同退火温度样品的结构和磁学性能. 结果表明: ε-Fe₃N样品在小于600 ℃可保持结构稳定; 在退火过程中, ε-Fe₃N薄膜的比饱和磁化强度变化较小; 矫顽力先减小后增加; 经过500 ℃退火的ε-Fe₃N样品软磁性能最佳.     

Fabrication and characterization of anodic oxide films on a Ti-10V-2Fe-3Al titanium alloy

Anodic oxide films of the titanium alloy Ti-10V-2Fe-3Al in ammonium tartrate electrolyte without hydrofluoric acid or fluoride were fabricated. The morphology, components, and microstructure of the films were characterized by scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), and Raman spectroscopy. The results showed that the films were thick, uniform, and nontransparent. Such films exhibited sedimentary morphology, with a thickness of about 3 μm, and the pore diameters of the deposits ranged from several hundred nanometers to 1.5 μm. The films were mainly titanium dioxide. Some coke-like deposits, which may contain or be changed by OH, NH, C-C, C-O, and C=O groups, were doped in the films. The films were mainly amorphous with a small amount of anatase and rutile phase.     

Silk Fibroin-modified Poly（butadiene） urethane Films and Their Effects on Fibroblast Viability

Surface-modified poly（butadiene）urethane （PBTU） films with silk fibroin （SF） were prepared by simple chemical method under the normal temperature. The physical properties and biological behaviour of the SF-modified PBTU film were evaluated. The results showed that the SF-modified PBTU films kept the tenacity and pliability very well, and could overcome rigid and brittle weaks of silk fibroin films. The morphology of SF in the PBTU film was dendritic aggregations, and the water-contact angle measurement indicated that the surface hydrophilicity of modified films was apparently enhanced. The biocompatibility of PBTU films was improved due to the change of surface components. The degree of platelet adhesion and the cell viability of rat embryo dermal fibroblasts seeded on PBTU films, SF films, and SF-modified PBTU films were measured by counting platelets before and after they contacted the films and MTT assay, respectively. The results indicated that platelet adhesion resistance and cell viability on the modified film were greatly superior to those on the PBTU film and the compound interface had good stability in the air.     

Microstructures and optical properties of sol-gel derived TiO2 anatase thin films

TiO₂ anatase thin films on quartz substrates were prepared with sol-gel method. The dry gel films, made by spin coating 10 times, were calcined at various temperatures. From X-ray diffraction analyses, it is found that the anatase to rutile phase transformation temperature of the films is higher than 850°C, the films are preferentially oriented on (0 0 1) plane, i. e.c-axis oriented. The thickness, refractive indexes, absorption coefficients and extinction coefficients of the films were determined from UV-Vis transmission spectra of the films using a UV-Vis spectrophotometer. The thickness of the films is about 570 nm. The refractive indexes, absorption coefficients and the extinction coefficients of the present films are larger than the values of anatase films prepared by sputtering. This indicates that the films made with sol-gel method are very dense. Biography: LIU Zhong-chi(1967-), male, Master candidate. Research direction: non-linear optical materials.