首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 78 毫秒
1.
本文研究了硅中离子注入层的卤钨灯辐照快速退火,对注B 和注P 样品分别测量了经1100℃、15秒和1050℃、12秒退火后注入层的载流子浓度分布,并与950℃、30分钟常规热退火样品作了比较;结果表明,卤钨灯辐照快速退火具有电激活率高、注入杂质再分布小及易于推广使用等优点.对于100keV、1×10~(15)cm~(-2)P 注入样品,经1050、10秒卤钨灯辐照退火后,表面薄层电阻为74.8Ω/□;对通过920(?)SiO_2膜,25keV、1×10~(15)cm~(-2)B 注入样品,经1100℃、15秒卤钨灯辐照快速退火后表面薄层电阻为238.0Ω/□;而经过950℃、30分钟常规热退火后,以上两种样品的表面薄层电阻分别为72.0Ω/□和245.8Ω/□.采用这种退火方法制作出了结深为0.10μm 的近突变P~ N 结,并测量了结深与退火时间的关系.  相似文献   

2.
离子注入硅的碘钨灯快速热退火温度计算   总被引:2,自引:0,他引:2  
离子注入并通过快速热退火引发固相外延生长,退火温度及温度分布对固相外延生长的结晶速率及退火材料的性质有很大影响.利用等温模型,根据入射能流密度与辐射损失能流密度之间的平衡,得出了离子注入硅的碘钨灯快速热退火的退火温度与衬底温度以及碘钨灯功率的关系.研究结果表明:在300~1 070 K的衬底温度范围内,退火温度主要由碘钨灯功率决定,而衬底温度对其影响不大;发生固相外延生长的最大碘钨灯功率或液相熔融再结晶的理论临界碘钨灯功率为2.6 kW,与实测值基本相符.  相似文献   

3.
通过求解Laplace方程得到六角排列的碳纳米管(CNTs)阵列的管尖端电场强度和场增强因子,具体研究CNTs的自身线度、阵列密度及阵列形状对CNTs的场增强因子的影响.研究结果表明,场增强因子随CNTs长径比的增加而增加,对于长径比一定的CNTs阵列,对应着一个最佳阵列密度,如管长为 6 μm、管径分别为5 nm、13 nm、20 nm的CNTs阵列对应的最佳阵列密度为3.05×1011 cm-2、4.83×1010 cm-2、2.12×1010 cm-2.在相同的阵列密度下,六角排列CNTs阵列的场发射性能要优于四方排列的CNTs阵列.计算得到六角排列CNTs阵列上端面的电势分布曲线.  相似文献   

4.
利用射频磁控溅射结合离子注入的方法在石英玻璃衬底上成功地实现了ZnO薄膜的N-In共掺杂,借助于XRD、霍耳测试、透射谱测试等手段分析了不同退火条件下对ZnO薄膜的结构及光电性质的影响.实验结果表明,在氮气环境下,退火温度介于550~600℃,退火时间控制在5~10 min内,可以获得较稳定的P型ZnO薄膜。其中,经过580℃退火20 min的ZnO薄膜具有最佳的电学特性,即空穴浓度达到1.22×1018cm-3,迁移率为2.19cm2>V -1s-1,电阻率是2.33 Ωcm.另外,制备的ZnO薄膜在可见光范围内都有很好的透射率,其常温下的禁带宽度为3.25 eV,相对块材本征ZnO的禁带宽度略有减小.  相似文献   

5.
采用射频磁控共溅射的方法制备出ZnO:Al薄膜,以NO和O2为源气体(V(O2)/V(O2+NO)=75%),采用等离子体浸没离子注入(PⅢ)方法对薄膜进行注入得到ZnO:Al:N薄膜,注入剂量为2.23×1015 cm-2,并在N2氛围下对样品进行了不同温度的退火处理.通过XRD图谱、霍尔效应(Hall)测试结果、紫外-可见光透射光谱等对样品的结构和性能进行了分析,着重研究了退火温度对ZnO:Al:N薄膜性质的影响.结果表明,退火可以使注人产生的ZnO(N2)3团簇分解,并且使N以替位O的方式存在.当退火温度达到850℃时,ZnO薄膜实现了p型反转,实现p型反转的ZnO:AliN薄膜载流子浓度可达3.68×1012cm-3,电阻率为11.2 Ω·cm,霍耳迁移率为31.4 cm2·V-1·s-1.  相似文献   

6.
Si^+和S^+注入SI—GaAs白光快速退火特性   总被引:1,自引:0,他引:1  
研究了 Si~+和 S~+注入 SI-GaAs 经白光瞬态退火后的电特性,得出最佳的退火条件为930~960℃,5s.在适当的注入和退火条件下,得到了陡峭的载流子剖面分布没有拖长的尾巴.发现Si~+注入白光快速退火样品比常规热退火样品有较好的电特性.使用 Si~+注入白光快速退火制作出了性能良好的全离子注入平面型 MESFET.  相似文献   

7.
应用SILVACO仿真软件,对N、P区杂质浓度分别为1×1016和1×1017cm-3的非晶硅薄膜太阳能电池进行了后退火工艺仿真研究.结果表明:非晶硅薄膜太阳能电池的光谱响应特性随着后退火温度的升高和退火时间的增加而提高.与未后退火电池相比,保持后退火时间1 min,退火温度分别为900,950和1 000℃时,电池的短路电流(Isc)增加约5.39%;保持后退火温度为950℃,退火时间从1 min增加到5 min,电池的短路电流(Isc)提高约6.37%.但是,电池的光谱响应特性的提高与后退火工艺参数不成正比关系.为了减小后退火对电池杂质再分布的影响,确定最佳后退火工艺参数为950℃和4 min.研究表明在薄膜电池的生产中增加后退火工艺可以有效地提高薄膜太阳能电池的光谱响应性能.  相似文献   

8.
微透镜阵列经常被用于改善激光辐照度分布均匀性,相对于单种公差对辐照度分布均匀性影响的研究,多种装配公差对辐照度分布均匀性影响的研究很少.通过构建自动化的误差分析平台,可以将多种装配公差同时输入,并将分析结果以可视化的方式进行同步呈现.利用这一平台分析了透镜阵列在三个空间轴上的距离误差、偏移误差、旋转误差以及多种公差的叠...  相似文献   

9.
在考虑B,P,As离子注入单晶硅中的浓度分布模型的基础上,讨论了快速热退火对3种注入离子浓度分布的影响,提出了3种离子在快速热退火后浓度分布的修正模型,由修正后的模型得到的多次离子注入模拟结果与实验结果符合很好。  相似文献   

10.
对已分别接受0、1×1012cm-2Cu+2、1×1011cm-2Cu+2、4×1011cm-2P+2、9×1011cm-2P+2离子注入的山东烟台"栖选1号"花生(Arachis hypogaeaL.)种子进行了栽培,研究比较各组花生M2代营养生长、生殖生长及产量的情况.综合各项指标表明:与对照组相比,9×1011cm-2P+2离子注入组在M1和M2代中保持了稳定的优势,1×1011cm-2Cu+2离子注入组的M2代的生物学效应作用最佳.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

18.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

19.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

20.
<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号