Photoresponse and carrier transport of protocrystalline silicon multilayer films

Alternating multilayer films of hydrogen diluted hydrogenated protocrystalline silicon (pc-Si:H) were prepared using a plasma-enhanced chemical vapor deposition technique.The microstructure of the deposited films and photoresponse characteristics of their Schottky diode structures were investigated by Raman scattering spectroscopy,Fourier transform infrared spectroscopy and photocurrent spectra.Microstructure and optical absorption analyses suggest that the prepared films were pc-Si:H multilayer films with a two-phase structure of silicon nanocrystals (NCs) and its amorphous counterpart and the band gap of the films showed a decreasing trend with increasing crystalline fraction.Photocurrent measurement revealed that silicon NCs facilitate the spatial separation of photo-generated carriers,effectively reduce the non-radiative recombination rate,and induce a photoresponse peak value shift towards the short-wavelength side with increasing crystallinity.However,the carrier traps near the surface defects of silicon NCs and their spatial carrier confinement result in a significant reduction of the diode photoresponse in the longwavelength region.An enhancement of the photoresponse from 350 to 1000 nm was observed when applying an increased bias voltage in the diode,showing a favorable carrier transport and an effective collection of photo-generated carriers was achieved.Both the spatial separation of the restricted electron-hole pairs in silicon NCs and the de-trapping of the carriers at their interface defects are responsible for the red-shift in photoresponse spectra and enhancement of external quantum efficiency.The results provide fundamental data for the carrier transport control of high-efficiency pc-Si:H solar cells.     

退火对非晶态碲镉汞薄膜稳定态光电导的影响

利用射频磁控溅射方法,在宝石衬底上制备了非晶态碲镉汞(a-HgCdTe)薄膜。对原生a-HgCdTe薄膜进行了不同退火时间和不同退火温度的热退火,在80～300K温度范围内,分别测量了原生和退火处理后的a-HgCdTe薄膜样品的稳定态光电导,研究了退火时间和退火温度对非晶态HgCdTe薄膜的稳定态光电导和激活能的影响。结果表明,原生和退火a-HgCdTe薄膜的稳定态光电导具有热激活特性;随着退火时间增加或退火温度升高,a-HgCdTe薄膜的晶化程度提高,导致光电导增大,光电导激活能降低。利用非晶-多晶转变机制讨论了实验结果。     

三环喹唑啉及其衍生物的电荷传输性质研究

使用电荷传输的半经典模型Marcus和密度泛函理论(DFT)方法,在B3LYP/631G**水平上对三环喹唑啉及其衍生物分子的电荷传输性质进行理论研究.结果显示,硫甲基取代分子的空穴传输和电子传输速率常数相当,速率常数为1.77×1012 s-1,预示可设计成空穴传输和电子传输材料.羟基取代、烷氧基取代、巯基取代分子的空穴传输载流子迁移率μ+与速率常数k+,比苯并菲(TOH)和六氮杂苯并菲(HATOH)液晶分子约大1个数量级,比其电子传输大近2个数量级,显示选择三环喹唑啉为刚性中心核合成盘状液晶半导体材料     

衬底温度对Cr掺杂ZnO薄膜结构和透过率的影响

采用磁控溅射法在载玻片上制备了具有c轴高择优取向的Cr掺杂ZnO薄膜,利用X射线衍射仪（XRD）、扫描电子显微镜（SEM）和紫外-可见分光光度计（UV—Vis）研究了衬底温度对Cr掺杂ZnO薄膜结构及光学透射特性的影响．结果表明,在衬底温度为400℃时制备的Zn0.98Cr0.02薄膜具有最好的结晶质量;衬底温度对薄膜的吸收边基本没有影响,但衬底温度为400℃时薄膜具有较高的透过率,其原因是在该奈件下薄膜具有较好的结晶质量．     

4H-SiC肖特基二极管载流子输运的温度效应

以Cree公司生产的碳化硅肖特基二极管为研究对象,对其进行I-V测试.通过对实验数据的理论模拟,研究了碳化硅肖特基二极管的载流子输运机理及温度效应.研究结果表明:温度升高,碳化硅肖特基二极管的肖特基势垒高度降低,漏电流急剧增加.正向导通时符合热电子发射机理,镜像力和隧穿效应共同作用使得反向偏压下的漏电流增加并能较好地和实验值相一致.     

硫化时间对FeS2薄膜结构和性能的影响

在硫化温度为653 K和硫化时间分别在3、6和12 h的条件下,用硫化铁膜法制备FeS2薄膜.通过对不同条件下制备的薄膜成分、结构和光电性能研究表明:当硫化时间大于6 h时,薄膜的成分接近理想化学配比,直接光学能带间隙大约为1.15~1.17 eV,电阻率约为1.3Ω.cm.     

退火温度对ZrW2O8薄膜结构和结合力的影响

采用纯ZrW2O8陶瓷靶材,以射频磁控溅射法在石英基片上沉积制备了ZrW2O8薄膜.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、划痕仪和表面粗糙轮廓仪研究了薄膜的相组成、表面形貌、薄膜与基片之间的结合力和薄膜厚度.试验结果表明:磁控溅射制备的薄膜为非晶态,在740℃热处理3 min后得到三方相ZrW2O8薄膜,在1 200℃封闭试样的条件下热处理8 min淬火得到立方相ZrW2O8薄膜;随着热处理温度的提高,薄膜的晶粒逐渐长大,平滑致密的表面出现了一些孔洞和缺陷,同时薄膜与基片之间的结合力也逐渐降低.     

Photoluminescence from Ge-SiO2 thin films and its mechanism

Ge-SiO₂ thin films were deposited on p-type Si substrates using the radio frequency (rf) magnetron sputtering technique with a Ge-SiO₂ composite target. Films were annealed in N₂ ambience for 30 min at 300℃—1000℃ with an interval of 100℃. Through the X-ray diffraction, the average size of Ge nanocrystals (nc-Ge) was determined. They increased from 3.9 to 6.1 nm with increasing annealing temperature in the range of 600℃—1000℃. Under ultraviolet excitation, all samples emit a strong violet band centered at 396 nm. With the formation of nc-Ge, the samples exhibit another emission of orange band with the peak at 580 nm and its intensity increases with the increasing size of nc-Ge. The peak positions of two bands do not shift obviously. Experimental data indicate that the violet band comes from GeO defect and the orange band originates mainly from the luminescence centers at the interface between the nc-Ge and SiO₂ matrix.     

液化汽船、油船、集装箱船运输效率的量化分析

通过对船舶运输效率及其基本理论的分析,结合液化汽船、油船、集装箱船的发展历程,量化分析海上运输效率的发展进程,试图找出船舶运输的发展趋势.     

Effect of La and Co-doping on microstructure and electrical properties of Bi FeO_3 thin films

Adding both La3＋and Co3＋was used to tune the microstructure and electrical properties of Bi Fe O3（BFO） thin films, and Bi1-xLaxFe0.90Co0.10O3 thin films were grown on the Sr Ru O3-buffered Pt-coated silicon substrates by a radio frequency sputtering. A polycrystalline structure with（110） orientation was shown in thin films, and their resistivity dramatically increases as the La3＋content increases. Their dielectric constant increases,and dielectric loss decreases with increasing La3＋content.In addition, their ferroelectric and fatigue properties were enhanced with rising La3＋content. The thin films with x = 0.03 have optimum electrical properties（e.g., remanent polarization 2Pr＊ 175.6 l C/cm2, coercive field2Ec＊ 699.5 k V/mm, dielectric constant er＊ 257 and tan d ＊ 0.038）, together with a good fatigue behavior. The impendence analysis of the films was conducted to identify the defects type during conductivity, and both hopping electrons and single-charged oxygen vacancies are mainly responsible for the conduction of grain and grain boundaries regardless of La3＋content. As a result, the doping with both La3＋and Co3＋benefits the improvement in the electrical properties of BFO thin films.     

升温过程和气压在近空间升华沉积CdTe多晶薄膜中的作用

近空间升华技术制备CdTe多晶薄膜具有薄膜质量好、沉积速率高、设备简单、生产成本低等优点.采用近空间升华法(CSS)制备的CdTe多晶薄膜,薄膜的结构、性质与整个沉积过程密切相关,其过程受到较多因素的影响.要实现对沉积过程的控制,必须对沉积过程中的热交换、物质输运进行深入的研究.分析近空间沉积的物理机制,通过对装置内的温度进行测量,对升温曲线进行实验研究,优选了温度分布与升温曲线,研究了气压对CdTe薄膜结构、性质的影响.讨论了升温过程、气压与薄膜的初期成核的关系.结果表明:不同气压下沉积的样品均为立方相CdTe,且还出现CdS和SnO2:F的衍射峰,随着气压增加,CdTe晶粒减小,薄膜的透过率下降,相应的吸收边向短波方向移动.采用衬底温度500℃,源温度620℃,沉积时间4min的沉积条件获得了性能优良的CdTe多晶薄膜.     

靶材制备工艺与配比对ZrW2O8薄膜制备的影响

分别采用钨酸锆靶（ZrW2O8）和氧化锆（ZrO2）与氧化钨（WO3）的复合靶,在磁控溅射条件下制备钨酸锆（ZrW2O8）薄膜,研究了靶材制备工艺、复合靶成分配比以及热处理温度对薄膜成分的影响,并对薄膜生长方式进行了初步探讨．结果表明：ZrW2O8靶材制备的薄膜在700℃处理后薄膜中ZrW2O8纯度较高,相同配比下,复合靶制备的薄膜经750℃处理后薄膜中ZrW2O8含量最高;以凡（ZrO2）：n（WO3）为1：2．8的复合靶材制备的薄膜经热处理后,结晶度优于凡（ZrO2）：n（WO3）为1：2获得的薄膜,并且ZrW2O8最佳含量的热处理温度较低;热处理时薄膜的生长机制为岛状生长方式;ZrW2O8薄膜在（211）和（220）晶面上的热膨胀系数均为负值．     

热处理温度及冷却速度对ZnO:Al薄膜性能的影响

采用溶胶一凝胶法在普通玻璃衬底上制备出了Al3+离子掺杂的ZnO(ZnO:Al)透明导电薄膜.利用X射线衍射仪(XRD)、扫描电子显微镜(SEM)、四探针法及紫外-可见分光光度计(UV-VIS)等分析方法对制备的薄膜进行了表征,研究了热处理温度及冷却速度对ZnO:Al薄膜结晶状况、电阻率、可见光透过率的影响.研究发现:制备的薄膜为具有沿(002)晶面择优取向的ZnO六角纤锌矿结构,适当的热处理温度和冷却速度有利于改善ZnO:Al薄膜的导电性,并且当采用快速冷却时薄膜的导电性明显增强,而透光率略微减小.500℃热处理1 h后,-15℃环境中快速冷却相对于随炉冷却和空气中冷却制备的薄膜电阻率有大幅度的降低,达到0.22Ω·cm,透光率大于80%.     

衬底温度对ZnO薄膜的结构和发光性能的影响

目的 研究衬底温度对znO薄膜结构和发光性能的影响及薄膜结构与发光性能两者之间的关系.方法 在玻璃衬底上采用射频磁控溅射法,固定其他工艺参数、改变衬底温度制备znO薄膜.对薄膜进行XRD谱和室温光致发光(PL)谱研究.结果 衬底温度在25℃到250℃之间,随着温度的升高,结晶质量变好,且紫外发光相对明显增强.在衬底温度为250℃时,结晶质量和发光性能均达到最优化.继续升高衬底温度,结晶质量和发光性能都下降.结论 衬底温度对ZnO薄膜的制备有着重要的影响;薄膜发光性能与结晶质量密切相关,结晶质量越好,紫外发先相对强度越大.     

氧分压对TiO2薄膜微观结构与光吸收性能的影响

采用直流磁控溅射法在不同氧分压下制备TiO2薄膜;研究氧分压对TiO2薄膜的表面形貌、晶体结构、化学组分及光吸收性能的影响.研究结果表明Ti在所有样品中均以 4价态存在;随着氧分压的增大,TiO2薄膜颗粒逐渐变大,薄膜的结晶质量随着氧分压的增大逐渐提高;在吸收光谱中,300 nm 附近的紫外吸收峰随着氧分压的增大而减弱,在330～465 nm 范围内出现1 个吸收谷,且该吸收谷随着氧分压的增大而减小,当氧分压达到0.8 Pa时,吸收谷基本消失.     

厚度对ZnS薄膜结构和应力的影响

用射频磁控溅射法在单晶Si基片上制备了4种不同厚度的ZnS膜,采用XRD和光学干涉相移法对薄膜的微结构和应力进行研究。结构分析表明,不同厚度的ZnS膜均呈多晶状态,并有明显的(220)晶面择优取向,晶体结构为立方晶型(闪锌矿)结构;随着薄膜厚度的增加,平均晶粒尺寸随之增大;薄膜的晶格常数在不同厚度下均比标准值稍大。应力分析表明,随着膜厚的增加,ZnS膜的应力差减小,在厚度为768 nm时的选区范围内应力差最小,应力分布较均匀。     

基底温度对氮化硼薄膜场发射特性的影响

利用射频磁控溅射方法, 真空室中充入高纯N_{2(99.99%)和高纯Ar（99.99%）的混合气体, 在n型（100）Si基底上沉积了六角氮化硼（h-BN）薄膜. 在超高真空（<10^-7 Pa）系统中测量了BN薄膜的场发射特性, 发现 沉积时基底温度对BN薄膜的场发射特性有很大影响. 基底温度为500 ℃时沉积的BN薄膜样品场发射特性要好于其他薄膜, 阈值电场为12 V/μm, 电场升到34 V/μm, 场发射电流为280 μA/cm². 所有样品的Fowler-Nordheim(F-N)曲线均近似为直线, 表明电子是通过 隧道效应穿透BN薄膜发射到真空的.}     

退火温度对TiO2薄膜光学性能的影响

为确定合适的TiO2薄膜退火工艺,研究了退火温度对采用中频交流反应磁控溅射技术制备的TiO2薄膜光学性能的影响.利用分光光度计测得石英玻璃基体TiO2薄膜试样的透射谱和反射谱,用包络线法和经验公式法计算出薄膜的光学常数.结果表明 TiO2薄膜的折射率随退火温度的上升而增加,低温退火时薄膜消光系数略有减小, 500 ℃退火时TiO2薄膜具有最优的光学性能.     

BiFeO3薄膜的sol-gel制备及其铁电性能研究

采用sol-gel方法在Pt(111)/Ti/SiO2/Si(100)衬底上制备出了(100)择优取向的BiFeO3薄膜.XRD研究表明,600～650℃退火的薄膜结晶较好.AFM形貌显示,650℃退火的薄膜中等轴状晶粒大小均匀(直径100～150nm),薄膜较为致密.电学性能测量结果表明,650℃退火、厚度为840nm的薄膜的2Pr值为2.8mC/cm2;在50kV/cm外加电场下,漏电流为2.7×10-5 A/cm2.电流-电压特性显示,在欧姆区之上,薄膜的主要导电机制为波尔-弗兰克尔发射导电.     

Effect of annealing temperature on the microstructure and optoelectrical properties of ZnO thin films and their application in self-powered accelerometers

This paper reports a piezoelectric nanogenerator (NG) with a thickness of approximately 80 μm for miniaturized self-powered acceleration sensors. To deposit the piezoelectric zinc oxide (ZnO) thin film, a magnetron sputtering machine was used. Polymethyl methacrylate (PMMA) and aluminum-doped zinc oxide (AZO) were used as the insulating layer and the top electrode of the NG, respectively. The experimental results show that the ZnO thin films annealed at 150℃ exhibited the highest crystallinity among the prepared films and an optical band gap of 3.24 eV. The NG fabricated with an AZO/PMMA/ZnO/stainless steel configuration exhibited a higher output voltage than the device with an AZO/ZnO/PMMA/stainless steel configuration. In addition, the annealing temperature affected the open-circuit voltage of the NGs; the output voltage reached 3.81 V when the annealing temperature was 150℃. The open-circuit voltage of the prepared self-powered accelerometer increased linearly with acceleration. In addition, the small NG-based accelerometer, which exhibited excellent fatigue resistance, can be used for acceleration measurements of small and lightweight devices.