立式冷壁反应器中化学气相淀积TiN涂层 Ⅰ.淀积参数对反应速率和涂层质量的影响

在立式冷壁CVD反应器中,用TiCl_4-H_2N_2和TiCl_4-H_2N_2-Ar为反应物源,在YT15硬质合金刀片上淀积TiN涂层。研究了淀积参数对淀积薄膜质量和淀积速率的影响。得到的TiN_x涂层外观光洁,呈金黄色,x为0.8～1.6,淀积速率15～60m~(-6)/h,显微硬度1800～2200HV,淀积反应为扩散过程控制;表观活化能为46.5kJ/mol。实验表明,TiN在冷壁反应器中的淀积速率远大于在热壁反应器中的淀积速率。     

阴极电淀积CdTe多晶薄膜组织结构的观察与分析

用电淀积方法制作CdTe薄膜,可降低半导体材料的消耗和生产费用,对降低太阳电池成本具有很大吸引力。但由于发展较晚,工艺尚不成熟,重覆性也差。其原因是对成膜机理和各种影响因素未能有足够了解。为此,我们在不同电淀积条件下制备了CdTe薄膜,并对它作了X射线结构分析和电镜观察,初步得出一些结果: 1.有些CdTe薄膜中,出现Cd晶粒、针孔、裂缝等缺陷,对薄膜质量是有害的。它们的出现与许多因素有关,如电淀积过程中搅拌情况,衬底的表面状态,电介液的组成,阴极电位,电流密度,以及样品中的残余内应力等。 2.电淀积CdTe多晶薄膜都有不同程度的织构现象,这对改善太阳电池性能有利。提出了一个柱状晶体生长模型加以解释。     

LPCVD氮化硅薄膜的制备工艺

氮化硅(Si3N4)薄膜具有许多优良特性,在半导体、微电子和MEMS领域应用广泛.简要介绍了Si3N4膜的制备方法及CVD法制备的Si3N4薄膜的特性,详细介绍了低压化学气相淀积(LPCVD)氮化硅的工艺.通过调整炉温使批量生产的淀积膜的均匀性达到技术要求.     

AlCl_3-NH_3-N_2体系化学气相淀积AIN超细粒子 Ⅰ.AIN合成过程的机理

利用化学气相淀积(CVD)技术,在700～1000℃下合成了AlN超细粒子,研究了操作参数对粒子特性和AlN薄膜生长规律的影响。AlN超细粒子表面形态和反应温度、AlCl_3浓度等有关,其粒度及分布宽度随反应温度的升高、AlCl_3浓度减小和总流量增加而减小,AlN薄膜生长速率随反应温度的减小和总流量的增加而增大。在AlCl_3和NH_3的CVD反应中出现中间产物Al(NH_2)_3和Al_2(NH)_3,它们促使了粒子的形成和薄膜的生长。     

薄膜厚度对ＺｎＯ：Ａｌ透明导电膜的结构和光电性能的影响

采用射频磁控溅射法在有机薄膜衬底和 70 5 9玻璃衬底上在室温下制备出了因淀积时间变化而厚度不同的ZnO :Al透明导电膜 ,并对不同厚度薄膜的结构特性、表面形貌和光电特性进行了比较研究 .铝掺杂的氧化锌薄膜是多晶膜具有六角纤锌矿结构 ,最佳取向为 (0 0 2 )方向 .淀积时间为 3 0分钟的薄膜具有最低的电阻率 ,分别为 2 .5 5× 1 0 3Ω·cm和 1 .89× 1 0 3Ω·cm ,在可见光区的平均透过率分别达到了 80 %和 85 %以上 .     

金属有机化合物化学气相淀积含钛硬质涂层的过程研究

在垂直冷壁CVD反应器中进行了文题的探索性研究。以二乙胺基钛(Ti(NEt_2)_4)为源,在不锈钢或硬质合金基体上完成了氮化钛(TiN)和碳氮化钛(Ti(C,N))硬质薄膜低温下的淀积。发现(TiN)和(Ti(C,N))分别在773K和973K下形成;在操作范围内整个反应器流场由自由对流控制;反应过程由表面过程控制;反应活化能为235 kJ/mol;二乙胺基钛反应级数为1级。进行了热力学计算,提出了反应历程假设。结果表明:用二乙胺基钛进行MOCVD淀积含钛硬质薄膜可以降低温度,以扩大基体的选用范围,为获得硬质薄膜提供了一条新的途径。     

NH_3等离子体增强热处理形成硅化钛导电薄膜

本文介绍制备均匀硅化钛导电薄膜的一种新方法,高频NH_3等离子体和感应加热的共同作用,使淀积在硅片表面的Ti膜产生氮化和硅化反应,实验表明,在低气压下NH_3等离子体增强的Ti膜表面氮化,可以有效地克服通常很难避免的氧沾污的有害影响,有利于通过固相反应形成自对准TiSi_2导电薄膜。     

SnO_2薄膜的化学气相淀积 Ⅰ.SnO_2薄膜的制备过程动力学

利用化学气相淀积方法,在载玻片上淀积二氧化锡薄膜,研究了过程的动力学特征,考察了不同操作参数对淀积速率的影响。建立了淀积速率与反应气体分压的关系式,并初步提出了淀积过程的反应原理。     

汽相淀积多晶硅薄膜结构和性质的研究

多晶硅薄膜的制备采用硅烷(SiH_4)热分解化学汽相淀积法。利用透射电子显微镜、扫描电子显微镜和红外光谱仪等手段对膜的微结构进行了研究。我们发观膜的结构特性强烈地依赖于淀积条件,实验结果指出:假如在整个淀积过程的最初阶段采用“低温成核”,就不难获得适合于硅栅MOS集成电路的优质多晶硅膜。当低温成核温度为650℃～700℃,并控制一定的淀积条件,所制得的膜是光亮和均匀的,其晶粒大小约为300～500埃。文中对“低温成核”的机理及多晶薄膜的生长模型也进行了讨论。此外,对多晶膜的光学、电学和介电等性质进行了测量,对多晶硅由于晶粒间界的存在而引起的一系利与单晶硅不同的性质进行了计算和分析,从而为器件设计提供某些有用的理论数据。     

衬底负偏压溅射对ZrN薄膜性能的影响研究

本文采用S-抢磁控溅射系统淀积ZrN薄膜,用扫描电镜、X射线衍射、反射电子衍射、俄歇电子能谱和电学测量等方法研究了衬底负偏压溅射和溅射两种工艺方法淀积的ZrN薄膜的结构、组分和薄膜电阻率。结果表明,适当增大溅射功率,采用衬底负偏压溅射方法,有效地减少了氧的沾污,使得所淀积的ZrN薄膜的电学性能有明显改善。     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.     

Achieving Unusual States of Matter Under High Pressure

正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-     

Exchange-Correlation and Electronic Excitation Energies from Pairing Matrix Fluctuations

We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-     

Density Functional Theory for the Response of Periodic Systems to Electric Fields Based on the Vector Potential Approach

正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that     

On the Thermodynamic Limit for Responses to Static Electromagnetic Fields

For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the     

An affordable accurate evaluation of the binding conformations predicted by molecular docking studies in bio-system

Franck-Condon factors bridge the gap between theoretical modeling and experimental observations for molecular electronic spectroscopy and electron transfer.Under the displaced harmonic oscillator approximation,multidimensional Franck-Condon factors are decomposed into a product of many one-dimensional(1D)Franck-Condon(FC)factors,and each 1D-FC factor is associated with one Huang-Rhys factor that determines the leading contribution of     

Call for Papers

<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with