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1.
利用射频反应溅射方法制备了Al2O3非晶薄膜,用椭圆偏振仪获得了薄膜的厚度,用高频C-V和变频C-V及J-V测量了薄膜的电学特性,用X射线以衍射(XRD)检测了薄膜的结构,用原子力显微镜(AFM)观察了薄膜的表面形貌.实验得到了电学特性优异的薄膜样品,对薄膜的退火研究发现,氮气低温退火使Al2O3薄膜的介电常数得到了提高并使漏电流特性得到了改善.可以认为,氮气退火消除了薄膜中原有的缺陷,并使得薄膜更加致密是主要的原因,而过高温度的退火会导致氧化铝中少量的氧的损失,从而导致了氧化铝层中固定电荷密度的增大,进而出现了大的平带电压.XRD显示样品的非晶特性非常稳定,AFM显示薄膜表面非常平整,能够满足大规模集成电路短期的发展需要.  相似文献   

2.
退火工艺对BST薄膜电学性能的影响   总被引:1,自引:0,他引:1  
应用RF平面磁控溅射技术在Pt/SiO2/Si(100)衬底上沉积BST薄膜,研究了退火气氛与退火工艺对BST薄膜电学性能的影响。实验发现,退火有利于提高薄膜的结晶度,且薄膜的折射率、介电常数和漏电流特性等性能与薄膜的退火工艺密切相关,和N2气氛中退火的BST薄膜相比,O2气氛退火的BST薄膜具有较大的介电常数和较小的漏电流,可满足DRAMs器件应用的要求。  相似文献   

3.
在不同的退火气氛下,采用金属有机物分解法在(111)Pt/Ti/SiO2/Si衬底上制备了SrTiO3薄膜材料,并对其结构和电学性能进行了研究。X射线衍射结果显示SrTiO3薄膜都呈现多晶立方钙钛矿结构。对比不同气氛下制备出的SrTiO3样品电学测量结果,发现在氧气氛中退火后,样品具有较低的漏电流和较好的介电性能,这可能是由于氧气氛中退火减少了SrTiO3薄膜内氧空位的浓度引起的。  相似文献   

4.
以LaNiO3做缓冲层,用射频磁控溅射法在SiO2/Si(100)衬底上制备出[0.9Pb(Sc0.5Ta0.5)O3-0.1PbTiO3/0.55Pb(Sc0.5Ta0.5)O3-0.45PbTiO3]4铁电多层薄膜.采用两步法在峰值温度800 ℃对薄膜进行退火.通过x射线衍射分析了薄膜的物相结构,通过电滞回线和漏电流曲线对薄膜的铁电性能进行了测量.研究发现,薄膜展现出高度(100)取向的钙钛矿结构和增强的铁电性,其剩余极化2Pr=26.2 μc/cm2,矫顽场2Ec=53.9 kV/cm,100 kV/cm下漏电流密度为1.87×10-4A/cm2.分析了铁电性增强和漏电流增大的可能原因.  相似文献   

5.
采用溶胶-凝胶技术在La Ni O3/Si衬底上制备不同退火温度(450、500、550℃)、不同La掺量的Pb1-xLaxTi O3(x=0、5%、7.5%、10%)铁电薄膜,利用X射线衍射法对产物进行表征,研究退火温度和La掺量对薄膜性能的影响。结果表明,掺加La有助于Pb Ti O3薄膜的(100)晶面衍射峰增长,随温度升高,薄膜的晶化程度变好,剩余极化强度稍有减小,矫顽电场强度减小,漏电电流密度减小,且介电常数增大;退火温度为550℃时,Pb0.925La0.075Ti O3薄膜的剩余极化强度为35μC/cm2,矫顽电场强度为147 k V/cm,漏电电流密度为10-8A/cm2,介电常数值为487(100 k Hz)。  相似文献   

6.
以LaNiO3做缓冲层,用射频磁控溅射法在SiO2/Si(100)衬底上制备出0.9Pb(Sc1/2Ta1/2)O3 -0.1PbTiO3/0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3铁电多层薄膜.采用两步法在峰值温度650℃和700℃对薄膜进行退火.通过电滞回线和漏电流曲线对薄膜的铁电性能进行了测量.研究发现,650 ℃退火的薄膜有较好的铁电性,其剩余极化2Pr=9.5 μc/cm2,矫顽场2Ec=42.2 kV/cm,100 kV/cm场强下漏电流密度为31μA/cm2.700 ℃退火的薄膜铁电性有所下降,2Pr=3.1 μc/cm2,但薄膜却具有很低的矫顽场,2Ec=22.6 kV/cm.分析认为,铁电性的退化与高温下薄膜中异质结间的相互作用及挥发性元素Pb和Mg的损失密切相关.  相似文献   

7.
采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上制备了掺钕(Nd)的Bi4Ti3O12薄膜(Bi4-xNdx)Ti3O12(x=0.85),将薄膜于空气中710℃退火0.5h,形成BNT多晶薄膜。系统研究了薄膜的结构、电学性质、表面形貌、漏电流、疲劳特性等。结果表明薄膜呈(117)和(00l)的混合取向,显示良好的铁电性(2Pr=60.8μC/cm^2),并呈现良好的抗疲劳特性。  相似文献   

8.
采用Sol-gel法,以Pt/Ti/SiO_2/Si为衬底在700℃下退火20 min制备了Sb~(3+)摩尔含量分别为0.1、0.2、0.3、0.4、0.5和0.6的Bi_(2-x)Sb_xTi_2O_7薄膜.通过对薄膜进行XRD、SEM和C-V、J-V曲线测试,详细讨论了不同Sb~(3+)含量对Bi2Ti2O7薄膜在结构、表面形貌、电容和漏电流等方面的影响.研究结果表明:Sb~(3+)的掺杂在没有改变Bi_2Ti_2O_7薄膜焦绿石结构的基础上提高了薄膜的稳定性;Sb~(3+)的掺杂提高了薄膜的电容值,尤其是当Sb~(3+)摩尔含量为0.3时,电容峰值达到3.8×10~(-9)F;同时,Sb~(3+)的掺杂显著改善了薄膜的漏电流性能,使薄膜的漏电流密度可以低至1.1×10~(-10)A/cm~2.  相似文献   

9.
采用化学溶液沉积法在ITO基片上制备不同退火温度的掺镧钛酸铋Bi1.6La0.4Ti2O7(BLT)薄膜。研究了其结构、介电性能、漏电流密度与外加电压I-V关系曲线和光学带隙。XRD射线衍射测试结果表明,经500、550、600℃1 h退火后的薄膜的主晶相为烧绿石结构,无杂相生成,600℃时BLT薄膜衍射峰比其他两种温度的强。在1 kHz频率下测得的介电常数、损耗因子分别为114,3%;129,3%;194,6%。BLT薄膜的漏电流密度与外加电压关系曲线表明,BLT薄膜600℃的漏电流比550和500℃稍微减小。通过透射谱分析得到BLT薄膜的光学带隙几乎不受温度影响,均为3.7 eV。这些结果表明制备BLT固溶体薄膜较佳为退火温度600℃,具有较好的性能,在光电器件有良好的应用前景。  相似文献   

10.
采用sol-gel方法在Pt(111)/Ti/SiO2/Si(100)衬底上制备出了(100)择优取向的BiFeO3薄膜.XRD研究表明,600~650℃退火的薄膜结晶较好.AFM形貌显示,650℃退火的薄膜中等轴状晶粒大小均匀(直径100~150nm),薄膜较为致密.电学性能测量结果表明,650℃退火、厚度为840nm的薄膜的2Pr值为2.8mC/cm2;在50kV/cm外加电场下,漏电流为2.7×10-5 A/cm2.电流-电压特性显示,在欧姆区之上,薄膜的主要导电机制为波尔-弗兰克尔发射导电.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

18.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

19.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

20.
For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the  相似文献   

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