首页 | 本学科首页   官方微博 | 高级检索  
相似文献
 共查询到20条相似文献,搜索用时 609 毫秒
1.
使用射频磁控溅射系统在Pt/SiO_2/Si基片上沉积了Ba_(0.6)Sr_(0.4)TiO_3(BST)薄膜,研究了溅射过程中氧氩比与溅射总气压对BST薄膜生长过程及介电性能的影响。通过XRD衍射仪、原子力显微镜等对在不同条件下制备出的薄膜样品进行了性能测试和分析。结果表明:增加氧氩比能够增加薄膜表面晶粒尺寸,提升薄膜的结晶度,增加薄膜的介电常数并降低介电损耗,但同时也会降低薄膜的沉积速率;增加溅射气压会导致薄膜表面晶粒尺寸减小、结晶度降低,薄膜的沉积速率随着溅射气压的增加呈现先增加后降低(溅射气压大于2Pa时)的趋势。  相似文献   

2.
用PEM监控制备TiO_2薄膜及其光学性能的研究   总被引:1,自引:0,他引:1  
使用金属钛作靶材,利用中频反应磁控溅射方法在玻璃基底上制备了TiO2薄膜.为使反应溅射的工作点能够稳定在"过渡区",使薄膜获得理想的化学配比和较高的沉积速率,使用了等离子体发射光谱监控法(PEM)对溅射过程进行控制.利用台阶仪测膜厚,用X射线衍射仪、原子力显微镜、分光光度计以及光学薄膜测试分析仪等手段对TiO2薄膜的结构以及光学性能进行表征,研究了不同工艺条件对薄膜结构和光学性能的影响.结果表明,较高的PEM工作点下制备的TiO2薄膜具有较高的折射率,使用PEM控制的中频反应磁控溅射方法可以制备出性能良好的TiO2光学薄膜.  相似文献   

3.
为了探究沉积气压对ZrO2薄膜光学特性的影响规律,以玻璃和硅片为基底,利用射频磁控溅射的方法在不同沉积气压下制备ZrO2薄膜样品.通过分光光度计测定薄膜在可见光波段的透射光谱,利用椭圆偏振谱仪表征薄膜的折射率、消光系数、厚度等光学参量,利用原子力显微镜观测薄膜表面的微观结构等.结果表明:(1)薄膜的沉积速率随沉积气压的增大而减小,沉积气压为0.4 Pa时沉积速率最大,为0.033 nm/s,沉积气压为1.0 Pa时沉积速率最小,为0.011 nm/s;(2)当沉积气压为1.0 Pa时,200~1 000 nm波段薄膜的平均透射率和折射率均最高,分别为82.71%和2.35,表现出良好的透光性;(3)沉积气压对薄膜消光系数的影响较小;(4)不同沉积气压下制备薄膜的表面粗糙度也不同,沉积气压为1.0 Pa时薄膜的粗糙度最低,为5.5 nm,沉积气压为0.6 Pa时薄膜的粗糙度最高,为25.2 nm.  相似文献   

4.
为探究不同氩气流量对TiOx薄膜结构和光学性能的影响,采用常温反应磁控溅射法,在K9双面抛光玻璃基底上制备TiOx薄膜样品,利用X线衍射分析样品的晶体结构,通过原子力显微镜观察样品表面结构,使用光栅光谱仪测试样品透射率,并计算得到薄膜沉积速率和消光系数等光学参数.实验结果表明:氩气流量对TiOx薄膜的光学性能具有较为明显的影响,随着氩气流量的增加,薄膜的光学厚度和沉积速率随之增加,而折射率有微小增加,消光系数受氩气流量的影响不大.  相似文献   

5.
利用电子枪蒸镀法制备了HfO2薄膜,控制沉积速率分别为3.3/s、5.5/s和9.6/s.利用ZGYO干涉仪、UV3101-PC分光光度计、D/Max-ⅢA型X射线衍射仪和JSM-6700F冷场发射扫描电镜对样品进行了测试.结果表明:在本实验条件下制备的HfO2薄膜都是非晶态结构.样品的残余应力与本征应力变化趋势相同,都随沉积速率的加快先增后减,沉积速率为3.3/s时应力最小.不同沉积速率下制备样品的折射率都是正常色散,3.3/s沉积的样品色散较小并且有较好的表面平整度.这些结果为制备高性能HfO2薄膜提供参考.  相似文献   

6.
磁控溅射与电弧离子镀制备TiN薄膜的比较   总被引:3,自引:0,他引:3  
分别采用磁控溅射和电弧离子镀在抛光后的W18Cr4V高速钢基体表面沉积TiN膜层,利用纳米力学系统、扫描电子显饭镜(SEM)和X射线衍射仪(XRD)对薄膜进行测试,比较了两种方法所制备的薄膜的异同.结果表明:磁控溅射所制备的薄膜表面平整,但沉积速率和硬度均低于电弧离子镀制备的薄膜.  相似文献   

7.
常温下,利用射频(RF)反应磁控溅射方法在K9双面抛光玻璃基底上沉积氧化钛薄膜.采用光栅光谱仪对薄膜样品的透射谱进行测试,通过椭圆偏振光谱仪测试并拟合得到薄膜的厚度、折射率和消光系数等光学参数,借助掠入射角X-射线衍射对薄膜的结晶状态进行了测试.实验结果表明:不同溅射功率下沉积的样品呈非晶态,在40~100W范围内,溅射功率越大,薄膜的沉积速率越大,但溅射功率对折射率和消光系数影响不大.  相似文献   

8.
为优化Zn O∶Ti复合薄膜制备工艺,采用射频磁控溅射法在不同氧氩比条件下沉积Zn O∶Ti复合薄膜,得到的样品经由EDS能谱仪检测Ti掺杂质量分数为3%.分别利用台阶仪、扫描电子显微镜、X线衍射仪、分光光度计和霍尔效应仪对样品的沉积速率、微观结构和光电性能进行表征.结果表明:随着氧氩比逐渐增大,薄膜的沉积速率呈现先增加后减小的变化.所有Zn O∶Ti薄膜均为六角纤锌矿结构,具有(002)晶面择优取向;当氧氩比为1∶1时,薄膜样品的表面形貌和结构优于其他样品.经过在空气中500℃的退火处理,薄膜样品的结晶质量明显提高.所有Zn O∶Ti薄膜在可见光区透过率均大于90%.随着氧氩比的增加,薄膜样品的电阻率先减小后增加,当氧氩比为1∶1时,电阻率最小,为6.5×10-4Ω·cm,薄膜的综合性能达到最优.  相似文献   

9.
用电子束蒸发的方法在钛盘上沉积氧化钛薄膜以检验其在心血管支架方面的应用.用接触角仪测定水滴在所制备氧化钛薄膜表面的接触角,随着沉积过程中氧气流量的增加,薄膜的接触角不断降低,经过热处理后薄膜的亲水性得到了增强.通过观察猪主动脉平滑肌细胞(PASMC)在样品表面的生长行为,研究薄膜的结构与细胞活性的关系.结果表明,覆有薄膜的钛盘具有更好的生物相容性,而沉积后的热处理能够进一步改善氧化钛薄膜的生物相容性.通过观察血小板的吸附行为研究薄膜的血液相容性,发现在所制备的氧化钛薄膜上吸附了极少的血小板.研究结果表明,用电子束蒸发制备的氧化钛薄膜能够用于心血管支架的表面改性.  相似文献   

10.
为了深入研究Ti掺杂ZnO薄膜的光电性能,采用射频磁控溅射技术在硅和玻璃基底上沉积Ti掺杂ZnO(TZO)薄膜.分别利用表面轮廓仪、X线衍射(XRD)、扫描电子显微镜(SEM)、UV-3600分光光度计和HMS-2000霍尔效应测试系统等表征手段分析溅射功率对TZO薄膜微观结构及光电性能的影响.结果表明:溅射功率对薄膜样品沉积速率的影响呈现先升后降的趋势,对电阻率的影响正好相反.当溅射功率为100W时,薄膜的沉积速率最大,为7.96nm/min,此时电阻率为最小的1.02×10-3Ω·cm;所有TZO薄膜在可见光波段的平均透过率均高于80%,为透明导电薄膜.Ti掺杂后的ZnO薄膜仍为六角纤锌矿结构,具有良好的c轴择优取向,溅射功率为100W时其微观结构均匀、平整、致密,表面形貌最好.  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

15.
The discovery of the prolific Ordovician Red River reservoirs in 1995 in southeastern Saskatchewan was the catalyst for extensive exploration activity which resulted in the discovery of more than 15 new Red River pools. The best yields of Red River production to date have been from dolomite reservoirs. Understanding the processes of dolomitization is, therefore, crucial for the prediction of the connectivity, spatial distribution and heterogeneity of dolomite reservoirs.The Red River reservoirs in the Midale area consist of 3~4 thin dolomitized zones, with a total thickness of about 20 m, which occur at the top of the Yeoman Formation. Two types of replacement dolomite were recognized in the Red River reservoir: dolomitized burrow infills and dolomitized host matrix. The spatial distribution of dolomite suggests that burrowing organisms played an important role in facilitating the fluid flow in the backfilled sediments. This resulted in penecontemporaneous dolomitization of burrow infills by normal seawater. The dolomite in the host matrix is interpreted as having occurred at shallow burial by evaporitic seawater during precipitation of Lake Almar anhydrite that immediately overlies the Yeoman Formation. However, the low δ18O values of dolomited burrow infills (-5.9‰~ -7.8‰, PDB) and matrix dolomites (-6.6‰~ -8.1‰, avg. -7.4‰ PDB) compared to the estimated values for the late Ordovician marine dolomite could be attributed to modification and alteration of dolomite at higher temperatures during deeper burial, which could also be responsible for its 87Sr/86Sr ratios (0.7084~0.7088) that are higher than suggested for the late Ordovician seawaters (0.7078~0.7080). The trace amounts of saddle dolomite cement in the Red River carbonates are probably related to "cannibalization" of earlier replacement dolomite during the chemical compaction.  相似文献   

16.
Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.  相似文献   

17.
以AC-13级配为基础,将橡胶颗粒代替部分集料掺入混合料中,以低温弯曲试验为评价方法对不同橡胶颗粒掺量下沥青混合料的低温抗裂性进行研究,并引入应变能密度值对混合料的低温抗裂性进行综合评价.试验结果表明:橡胶颗粒沥青混合料试件的破坏微应变均超过2 300,满足冬寒区的技术指标;无论是否掺加橡胶颗粒,随着温度的下降,沥青混合料破坏时的最大弯拉强度增大,弯拉应变降低,劲度模量增大;弯曲应变能密度在胶粒掺量为1%左右时具有较大的弯曲应变能密度值,此时橡胶颗粒沥青混合料具有较好的低温抗裂性.  相似文献   

18.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

19.
Quality traits in wheat (Triticum aestirum L.) were studied by quantitative trait locus (QTL) analysis in a recombinant inbred line (RIL) population, a set of 131 lines derived from Chuan 35050 × Shannong 483 cross (ChSh). Grains from RILs were assayed for 21 quality traits related to protein and starch. A total of 35 putative QTLs for 19 traits with a single QTL explaining 7.99-40.52% of phenotypic variations were detected on 10 chromosomes, 1D, 2A, 2D, 3B, 3D, 5A, 6A, 6B, 6D, and 7B. The additive effects of 30 QTLs were positive, contributed by Chuan 35050, the remaining 5 QTLs were negative with the additive effect contributed by Shannong 483. For protein traits, 15 QTLs were obtained and most of them were located on chromosomes 1 D, 3B and 6D, while 20 QTLs for starch traits were detected and most of them were located on chromosomes 3D, 6B and 7B. Only 7 QTLs for protein and starch traits were co-located in three regions on chromosomes 1D, 2A and 2D. These protein and starch trait QTLs showed a distinct distribution pattern in certain regions and chromosomes. Twenty-two QTLs were clustered in 6 regions of 5 chromosomes. Two QTL clusters for protein traits were located on chromosomes 1D and 3B, respectively, three clusters for starch traits on chromosomes 3D, 6B and 7B, and one cluster including protein and starch traits on chromosome 1D.  相似文献   

20.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号