离子束刻蚀光栅掩模图形转移分析

依据特征曲线法推导出非晶体表面的离子束刻蚀模拟方程;结合全息光栅的刻蚀特点开发出离子束刻蚀模拟程序。模拟程序获得的模拟刻蚀参数可以用于类矩形光栅的刻蚀工艺参数设计,准确地描述不同工艺过程、工艺参数对最终刻蚀结果的影响,进而实现离子束刻蚀过程的可控性和可预知性。     

氩离子束刻蚀制作大面阵微透镜阵列

对制作大面阵微透镜阵列的氩离子束刻蚀技术进行了讨论和分析．实验结果表明,衬底材料不同时,制作表面形貌良好并具有预定参数指标要求的微透镜阵列的工艺条件有明显的差异,给出了在几种衬底材料上刻蚀制作面阵微透镜阵列的离子束刻蚀速率与离子束能量之间相互关系的实测结果．     

几种常用光学材料的离子束刻蚀特性研究

利用基于射频离子源的离子束刻蚀装置，分别以氩气、三氟甲烷为工作气体，初步研究了离子能量、束流和加速电压等条件对K9、石英、氧化硅薄膜、氧化铪薄膜这4种常用光学材料和光刻胶的离子束刻蚀特性和反应离子束刻蚀特性的影响．实验结果表明：以三氟甲烷为工作气体的反应离子束刻蚀，在较低离子能量、束流和加速电压的条件下，就可对氧化硅薄膜和氧化铪薄膜实现较高的刻蚀选择比（分别为2．5：1和1：1）．并在此基础上，研制出亚微米周期的氧化硅光栅和氧化铪光栅，其中氧化硅光栅线条的侧壁倾角大于85°；氧化铪光栅在1064nm自准直入射角下的负一级衍射效率高于95％．     

聚焦离子束刻蚀多晶TiNi薄膜的表面形貌

报道了TiNi薄膜的聚焦离子束刻蚀特征及刻蚀后的表面形貌．测量结果表明薄膜的表面粗糙度随刻蚀深度呈非线性变化,当刻蚀深度等于0．1μm时,表面粗糙度为最小（5．26nm,刻蚀前为14．88nm）;刻蚀深度小于0．1μm时,表面粗糙度随刻蚀深度的增大而减小;当刻蚀深度大于0．1μm时表面粗糙度随刻蚀深度增大而增大,其原因是刻蚀深度大于0．1μm后表面出现了清晰的周期性条纹结构．此外,表面粗糙度随聚焦离子束流的增大而减小,当离子束流为2．5nA时,表面粗糙度从刻蚀前的14．88nm减小到4．67nm．     

用于红外焦平面的微透镜阵列单片制备技术

提出了离子束刻蚀制备微透镜阵列的工艺原理；研究了球面型光致抗蚀剂掩膜的形成过程以及硅微透镜离子束刻蚀的实验条件．表面探针测量及扫描电子显微镜（ＳＥＭ）实验证明了该技术可在较低的衬底温度下（低于２００℃）有效地制备出球面型微透镜，并用表面探针测量确定了硅微透镜的尺寸．     

条形射频源大口径离子束刻蚀机性能

针对大尺寸基底往复扫描条形离子束来实现大面积刻蚀的特点，实验测试了基于射频感应耦合等离子体离子源大型离子束刻蚀机的性能．利用法拉第筒扫描探测系统在线测量束流密度，通过控制气体流量、调节加速电压等，得到了纵向束流密度±5．3%均匀性的较好结果．刻蚀实验表明40cm长度范围刻蚀深度均匀性为±5．4%，同时具有较好的束流稳定性．添加束阑，并结合掩模修正束流，会得到更好的束流密度与刻蚀深度均匀性．     

微光学阵列元件离子束刻蚀制作的分析与讨论

阐述了利用离子束刻蚀技术制作微光学阵列元件的工艺条件．研究和实验结果表明,通过光刻热熔法制作的光致抗蚀剂掩模图形经具有不同能量的离子束刻蚀后可以有效地实现向衬底材料上所作的选择性转移,所作的理论分析结果为非球面微光学阵列元件的制作提供了一条可行的技术途径．     

SD—3离子束刻蚀试验机

从1977年开始对离子束刻蚀作了一些初步地探索。先后做过束径为φ20mm,φ84mm和φ135mm的离子束刻蚀装置,并作了一些刻蚀试验,取得了初步的成效。本文介绍束径为φ135mm,立式、风冷、两维旋转水冷工作台的离子束刻蚀试验机的设计、调试、性能和刻蚀试验的初步结果。     

氩离子束刻蚀制作大面阵微透镜阵列

对制作大面阵微透镜阵列的氩离子束刻蚀技术进行了讨论和分析。实验结果表明,衬底材料不同时,制作 表面形貌良好并具有预定参数指标要求的微透镜阵列的工艺条件有明显的差异,给出了在几种衬底材料上刻蚀制作 面阵微透镜列的离子束刻蚀速率束能量之间相互关系的实测结果。     

干湿法腐蚀工艺条件下CdTe薄膜光谱研究

采用等离子束溅射轰击刻蚀和溴甲醇腐蚀对CdTe薄膜表面进行后处理.对比研究了2种腐蚀条件下CdTe薄膜的光谱特性.结果表明:等离子束溅射轰击刻蚀可以彻底清除CdTe薄膜表面的氧化层,刻蚀后的CdTe薄膜颗粒更为均匀致密,等离子体刻蚀与溴甲醇腐蚀相比,可以改善CdTe薄膜表面的粗糙度,增强薄膜的附着力,改善薄膜的性能.     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

An Analysis of Catherine＇s Character——Wuthering Heights

Wuthering Heights, Emily Bronte＇s only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.     

Lower Paleozoic oil relationships within Williston Basin, Canada

The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.     

Achieving Unusual States of Matter Under High Pressure

正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-     

Exchange-Correlation and Electronic Excitation Energies from Pairing Matrix Fluctuations

We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-     

Density Functional Theory for the Response of Periodic Systems to Electric Fields Based on the Vector Potential Approach

正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that     

On the Thermodynamic Limit for Responses to Static Electromagnetic Fields

For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the