Si基3C-SiC薄膜的LPCVD反向外延研究

采用低压化学气相淀积(LPCVD)技术,以CH_4和H_2的混合气体作为反应源气体,在n型Si(111)衬底上反向外延生长出高迁移率的自掺杂的n型3C-SiC薄膜.在此反应过程中,H_2作为稀释与运载气体,CH_4提供C源,而Si源由Si衬底提供.通过X射线衍射分析仪(XRD)与场发射扫描电镜(FESEM)分别研究生长出的3C-SiC薄膜的晶格结构和表面形貌.其在室温下的霍尔迁移率的值为1.22×10~3cm~2/(V·s),高于其它相关文献报道的霍尔迁移率.实验结果表明,此生长方法可以生长出表面较为平整,并具备高迁移率的3C-SiC薄膜.     

MEMS开关中氮化硅薄膜工艺研究

分析了沉积薄膜厚度、PECVD的薄膜沉积温度、反应气体形成的杂质以及多层薄膜之间热应力匹配等因素对薄膜残余应力的影响.应用光刻分割聚酰亚胺(PI)牺牲层、分层生长氮化硅薄膜及快速热退火等工艺减小薄膜残余应力,成功生长出了合格的氮化硅薄膜.     

应力对La_(0.8)Ca_(0.2)MnO_3薄膜电输运性能的调控研究

采用脉冲激光沉积技术,在LaAlO3和0.67Pb(Mg1/3Nb2/3)O3-0.33PbTiO3两种单晶基片上外延生长了La0.8Ca0.2MnO3薄膜.X射线衍射分析表明两种薄膜皆为单取向生长,且面内分别受到压应力和张应力作用.晶格失配造成的应力对薄膜的电阻和金属-绝缘相转变温度Tp影响很大.对LCMO/PMN-PT施加外电场,从而调节薄膜所受应力也可以调制其电阻和Tp.     

钙钛矿La2/3Pb1/3MnO3外延膜的制备及磁性

利用磁控溅射法在单晶LaAlO3(100)衬底上成功地外延生长了La2/3Pb1/3MnO3薄膜.用X射线衍射仪、原子力显微镜和超导量子干涉仪、直流四探针法对其进行了表征.结果表明,薄膜为赝立方钙钛矿结构,晶格常数为3.861 nm,晶格失配度为2.1%,具有良好的单晶外延结构和较光滑的表面,且薄膜中晶粒的生长模式是"柱状"模式.居里温度为325 K,在居里温度附近,发生铁磁-顺磁转变.此材料呈现出一种典型的自旋玻璃特性.是由于应力造成的.在1.OT磁场下,其磁电阻为23.4%.     

钙钛矿La0.75 Na0.25 MnO3外延膜的制备及磁电特性研究

目的 研究单价碱金属Na替代对钙钛矿LaMnO3结构及磁电特性的影响.方法 通过射频磁控溅射在单晶LaAlO3(100)衬底上生长了膜厚为120 nm的La0.75Na0.25MnO3外延膜,用X射线衍射仪、原子力和超导量子干涉仪、直流四探针法对其进行了表征.结果 结果表明,薄膜为赝立方钙钛矿结构,具有良好的单晶外延结构和岛状生长模式.居里温度Tc=270 K,在居里温度附近,发生铁磁-顺磁转变.此材料呈现出一种典型的自旋玻璃特性,是由于应力造成的.在1 T磁场下,磁电阻极大值为40.3%.结论 La0.75Na0.25MnO3外延膜的制备为CMR薄膜的低场和室温条件下的广泛应用提供了潜在的价值.     

沉积温度对氮化硅薄膜力学性能的影响

采用了等离子体增强化学气相沉积法(Plasma-enhanced Chemical Vapor Deposition,PECVD),硅烷SiH4(用氮气N2稀释到12%)和纯氨气NH3作为反应气体在(100)硅片上生长氮化硅薄膜;采用表面轮廓仪(Dektak3 6M)测量氮化硅薄膜的残余应力;由XPS测得氮化硅薄膜的氮硅比。讨论沉积温度对氮化硅薄膜残余应力的影响,并分析其原因。     

基于MEMS技术的薄膜残余应力检测技术

薄膜材料在制备中都会产生一定的残余应力,而薄膜中残余应力的大小对整个微机电系统的性能和可靠性具有很大的影响.讨论了几种典型的残余应力检测方法,并分析了各自的特点.在此基础上,提出了一种整合微指针结构驱动器和测量探针的新型残余应力测试方法.其核心是设计出一种基于扫描探针的薄膜残余应力在线检测系统.     

微旋转结构法测量Al薄膜的残余应力

薄膜的残余应力是影响MEMS器件工作可靠性和稳定性的重要因素,微旋转结构法能够简单有效地测量薄膜的残余应力.文中采用MEMS工艺制作Al薄膜微旋转结构,根据微旋转结构法对m薄膜的残余应力进行了测量和计算.实验结果表明,溅射Al膜的残余应力为张应力,大小在80～110 GPa之间.对Al薄膜悬梁进行静电驱动,其驱动电压为31 ～34 V,与根据Al膜残余应力的测量值所计算出的驱动电压基本吻合.     

PECVD法在聚酰亚胺上沉积氮化硅薄膜的工艺研究

采用了等离子体增强化学气相沉积法(Plasma-Enhanced Chemical Vapor Deposition，PECVD)在聚酰亚胺(Polyimide，PI)牺牲层上生长氮化硅薄膜；利用微旋转结构测量氮化硅薄膜的残余应力；讨论沉积温度、射频功率、反应气体流量比等工艺参数对氮化硅薄膜的残余应力的影响，并把薄膜的残余应力分为热应力和本征应力加以分析，得出适合制作射频MEMS开关器件中的桥式梁的氮化硅薄膜的最佳工艺条件。     

基板温度对电子束沉积LaF3薄膜残余应力的影响

采用电子束沉积的方法,分别在K9玻璃基片上制备了LaF3单层膜.研究了基板温度对LaF3薄膜残余应力的影响;基板温度从200 ℃上升到350℃,间隔为50℃.利用ZYGO干涉仪测量了基板镀膜前后的面型变化,利用Stoney公式计算出残余应力;分析结果表明:在本实验条件下,残余应力为张应力,随基板温度的增加,有增大的趋势.     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.     

Jane Eyre——A Feminist In The 19th Century

In the 19th century the society was controlled by men, and women were just appendants of them, they had not any rights and freedom. But Jane was an exception, she showed some characteristics of early feminist. Jane showed her characteristics of feminism in three aspects: rebellion, equality, and independence. These characteristics were helpful to her success, and feminism is the only way out for women of that time.     

Achieving Unusual States of Matter Under High Pressure

正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-     

Exchange-Correlation and Electronic Excitation Energies from Pairing Matrix Fluctuations

We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-     

Density Functional Theory for the Response of Periodic Systems to Electric Fields Based on the Vector Potential Approach

正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that     

On the Thermodynamic Limit for Responses to Static Electromagnetic Fields

For molecular systems,the quantum-mechanical treatment of their responses to static electromagnetic fields usually employs a scalar-potential treatment of the electric field and a vector-potential treatment of the magnetic field.Although the potential for each field separately is associated with the choice of an(unphysical)origin,the precise choice of the origin for the electrostatic field has little consequences for the results.This is different for the     

An affordable accurate evaluation of the binding conformations predicted by molecular docking studies in bio-system

Franck-Condon factors bridge the gap between theoretical modeling and experimental observations for molecular electronic spectroscopy and electron transfer.Under the displaced harmonic oscillator approximation,multidimensional Franck-Condon factors are decomposed into a product of many one-dimensional(1D)Franck-Condon(FC)factors,and each 1D-FC factor is associated with one Huang-Rhys factor that determines the leading contribution of