锑化物超晶格长波红外焦平面探测器研究进展

锑化物的研究开始于20世纪50年代,70年代随着超晶格概念及后来能带工程的出现,锑化物在红外探测领域的潜力逐渐显露.基于现实的需求,锑化物材料的生长外延及工艺处理技术取得了快速进步,这也得益于之前对Ⅲ-Ⅴ族材料的大量研究.Ⅱ类超晶格(T2SL)的发展主要源于两个主要原因:首先相对于HgCdTe材料,Ⅱ类超晶格具有低成本、可重复性、可操作性、高均匀性等优势,尤其在长波红外及以上波段,Ⅱ类超晶格相对于HgCdTe的优势更明显.其次与HgCdTe材料相比,Ⅱ类超晶格具有很低的俄歇复合概率,这意味着Ⅱ类超晶格红外探测器具有比HgCdTe探测器更低的暗电流或更高的工作温度,提高长波焦平面的工作温度对于降低成像系统的功耗、尺寸及重量至关重要.另外,大气窗口在8–14μm有最高的透射率,同时温度为室温(300 K)的物体所发射的红外辐射波长大约为10μm.因此,长波红外探测对于InAs/GaSbⅡ类超晶格极具价值.理论上Ⅱ类超晶格红外探测器在等效截止波长下能提供同等或超越HgCdTe探测器的性能.但由于Ⅱ类超晶格材料在少子寿命上与HgCdTe存在很大差距,导致Ⅱ类超晶格探测器在耗尽区有很高的产生复合电流.为了抑制产生复合电流及其他机制暗电流,提出了各种结构并应用于Ⅱ类超晶红外探测器上,如PπMN结构、CBIRD以及单极势垒型等,极大地降低了长波器件的暗电流,同时增加了器件阻抗及探测率.此外,InAs/InAsSb超晶格的提出,避免了由Ga在禁带引入复合中心,有效地提高了少子寿命.随着Ⅱ类超晶格技术及理论的不断完善,锑化物超晶格长波焦平面在可操作性、均匀性、稳定性、可扩展性上的优势将更为明显.     

256×1甚长波多量子阱红外焦平面线列研制

通过材料设计与制备,甚长波GaAs/AlGaAs多量子阱红外探测器的峰值响应波长14.6μm,响应带宽大于2.2μm.256×1焦平面线列采用垂直入射二维光栅耦合工作模式,45K温度下,单元响应率4.28×10-2A/W、单元黑体探测率Db*=5.14×109cm·Hz1/2/W、单元黑体单色探测率Dλ*=4.24×1010cm·Hz1/2/W.通过铟柱与互补式金属-氧化物-半导体读出电路互连得到的甚长波量子阱红外探测器FPA(focal plane array)在积分时间100μs时,有效像元率Nef=99.22%、平均响应率R=3.485×106V/W、响应率的不均匀性UR=5.83%、平均黑体探测率典型值Db*=2.181×108cm·Hz1/2/W、平均单色探测率Dλ*=8.288×109cm·Hz1/2/W.器件已适合进行室温目标的热像图.     

256×1甚长波多量子阱红外焦平面线列研制

通过材料设计与制备,甚长波GaAs／AlGaAs多量子阱红外探测器的峰值响应波长14．6μm,响应带宽大于2．2μm．256×1焦平面线列采用垂直入射二维光栅耦合工作模式,45K温度下,单元响应率4．28×10^-2A／W、单元黑体探测率Db＊=5．14×10^9cm．Hz^1.2/W、单元黑体单色探测率Dλ＊=4．24×10^10cm．Hz^1/2/W．通过铟柱与互补式金属一氧化物一半导体读出电路互连得到的甚长波量子阱红外探测器FPA（focal planearray）在积分时间100μs时,有效像元率Nef=99．22％、平均响应率R=3．485×10^6V/W、响应率的不均匀性UR=5．83％、平均黑体探测率典型值Db^＊=2．181×10^8cm．Hz^1/2/w、平均单色探测率Dλ^＊=8．288×10^9cm．Hz^1/2/W．器件已适合进行室温目标的热像图．     

PIN、NBP及NBN型InAsSb中波红外探测器光电性能研究

系统探索了GaSb(001)衬底上InAsSb体材料的分子束外延生长和PIN型、NBP型及NBN型InAsSb单元单色红外探测器的制备工艺,并对其光学、电学等相关物理特性进行了研究对比.PIN型InAsSb单元探测器的R0A为224Ω·cm2(100K),77K下峰值探测率为3.6×1010cmHz1/2/W.NBN型和NBP型InAsSb单元探测器的R0A都达到了105Ω·cm2(100K)的量级,但NBN型比NBP型的R0A值更大,暗电流密度更低,77K下峰值探测率分别为8.5×101 2cmHz1/2/W和2.4×108cmHz1/2/W.最后制备完成了50%截止波长为3.8μm(PIN型)、3.4μm(NBP型)、2.6μm(NBN型)的InAsSb单元探测器.     

红外-近红外波长变换器件p-QWIP-LED研究

报道了一种基于p型量子阱红外探测器(QWIP)和发光二极管(LED)的新型量子阱红外探测器. 该器件作为一种p型量子阱红外探测器(QWIP)和发光二极管(LED)的有效集成器件, 可以将QWIP探测的长波红外信号经光电转换过程后变成LED在近红外的发光. 通过电学直接读出方式和近红外(0.87 μm)光强度变化读出方式, 从实验上测量了器件的红外响应光谱, 设计与制备的器件实现了从长波红外(7.5 μm)向近红外(0.87 μm)的波长变化. 研究结果表明这种红外-近红外波长变换途径有可能导致红外焦平面技术体制的变化.     

中波/长波碲镉汞探测器温度响应特性分析

以Sofradir公司的红外中波320×256和长波288×4碲镉汞探测器为研究对象,建立了中波/长波红外碲镉汞焦平面探测器响应模型.对黑体温度响应特性曲线进行建模计算,并将计算曲线与常温段实测数据对比分析,结果显示两者具有较好的一致性,表明模型有效.从测试结果与模拟结果的一致性可以推测:响应模型对焦平面探测器探测低温目标具有参考价值.     

零偏压下近红外集成单波长波导光探测器

提出了一种基于InGaAsP材料的零偏压单片集成波导光探测器。该器件单片集成了光子晶体(Photonic Crystals, PC)滤波器、锥形耦合器、零偏压波导光探测器(Wave-Guide Photodetector, WGPD)以及直波导,形成了一个平面微纳光信号接收子系统。集成的波导光探测器吸收峰值波长位于1.55μm处,光谱线宽仅1.6 nm。设计的波导光探测器在无外加偏压时具有良好性能,经优化,当其面积为4μm×15μm时其3 dB带宽达78 GHz@0 V,响应度为0.78 A/W。整个器件基于组分可调的InGaAsP材料,实现多功能器件的单片集成,具有高性能、小体积、低功耗、窄线宽等特性。     

利用MOCVD在Si衬底上制备立方相Mg_(0.25)Zn_(0.75)O薄膜及日盲探测器

采用金属有机化学气相沉积(MOCVD)方法在Si衬底上实现了立方结构的Mg0.25Zn0.75O薄膜生长。在此基础上,实现了Mg0.25Zn0.75O/n-Si异质结型日盲紫外探测器。该探测器在-5 V偏压下,器件暗电流为0.02 m A。在0 V偏压下的峰值响应位于大约280 nm处,响应度为1.2 m A/W。     

平面漏斗形微腔集成的高性能长波红外探测器

为实现量子阱红外光探测器件对垂直于阱结构的入射光吸收,减小模式体积,降低暗电流,提高比探测率D^*,提高红外光探测器件性能,以10.55 μm长波红外光为例,利用等离激元微腔与量子阱材料结合,形成F-P共振,增加GaAs/AlGaAs量子阱层的吸收率和器件的响应率。设计了平面漏斗形等离激元微腔集成的量子阱红外探测器（quantum well infrared photodetector,QWIP）,使用基于有限元数值仿真方法对其进行分析。结果表明：平面漏斗形等离激元微腔集成的QWIP具有较小的光子模式体积和较高的局域场强,光吸收率维持在81%～89%的情况下,可以使探测材料体积减小38%～50%,获得的D^*比一般等离激元微腔集成的QWIP增大10%～15%。     

面向HgCdTe红外焦平面探测器应用的分子束外延材料研究进展

报道了针对第三代碲镉汞红外焦平面的应用需求进行的碲镉汞分子束外延研究进展.面向大规模HgCdTe红外焦平面探测器的应用,开展了大面积替代衬底上的分子束外延技术研究,报道了在大面积替代衬底上的碲镉汞分子束外延材料的晶体质量、表面形貌和组份均匀性的改善方法和研究结果.512×512及以上规模的中波、短波碲镉汞面阵器件制备验证表明Si基碲镉汞材料满足应用需求.围绕甚长波红外焦平面探测器及雪崩红外焦平面探测器的研制需要,开展了低缺陷的ZnCdTe基碲镉汞分子束外延研究.外延获得的HgCdTe外延材料均匀性得到明显提高.经过外延条件的优化,厚度为10μm的HgCdTe/ZnCdTe(组分x=0.22)分子束外延材料位错密度最好结果为3×104 cm-2,双晶半峰宽小于25弧秒.     

MBE growth of high absorption mid-IR type-II InAs/GaSb superlattices

Two kinds of short-period type II superlattices(SLs)InAs(6 monolayers(MLs))/GaSb(3 MLs)and InAs(8 MLs)/GaSb(8 MLs)which can serve for mid-infrared(MIR)detection have been grown by molecular beam epitaxy(MBE)on p-type GaSb(100)substrates.The cutoff wavelength for the two superlattices(SLs)was found to be around 4.8 lm at 300 K.The high resolution X-ray diffraction(HRXRD)measurements indicated that the InAs(8 MLs)/GaSb(8 MLs)SLs have better crystalline quality than that of the InAs(6 MLs)/GaSb(3 MLs)SLs.However,compared with infrared absorption in the 2.5–4.3 lm range,the optical absorption of InAs(6 MLs)/GaSb(3MLs)SLs was more excellent.This can be attributed to increase probability of the electron and hole wave function overlap in the thinner period thickness.     

InAsSb thick epilayers applied to long wavelength photoconductors

InAs_0.052Sb_0.948 epilayers with cutoff wavelengths longer than 8 μm were successfully grown on InAs substrates using melt epitaxy (ME). Scanning electron microscopy observations show that the interface between the epilayers and substrates is flat, indicating the good quality of the epilayers, and the thickness of the epilayers is 40 μm. Photoconductors were fabricated using InAs_0.052Sb_0.948 thick epilayers grown by ME. Ge optical lenses were set on the photoconductors. At room temperature, the photoresponse wavelength range was 2–10 μm. The peak detectivity D_λp* reached 5.4 × 109 cm·Hz1/2·W?1 for the immersed detectors. The detectivity D* was 9.3 × 108 and 1.3 × 108 cm·Hz1/2·W?1 at the wavelength of 8 and 9 μm, respectively. The good performance of the uncooled InAsSb detectors was experimentally validated.     

Multistage interband cascade photovoltaic devices with a bandgapof 0.23 eV operating above room temperature

Interband cascade （IC） photovoltaic （PV）device structures, consisting of multiple discrete InAs/GaSb superlattice absorbers sandwiched between electronand hole barriers, were grown by molecular beam epitaxy.Details of the molecular beam epitaxy growth and materialcharacterization of the structures are presented. The dis-crete absorber architecture enables certain advantages, suchas high open-circuit voltage, high collection efficiency,high operating temperature, and smooth integration ofcascade stages with different bandgaps. The two- andthree-stage ICPV devices presented in this article operate atroom temperature with substantial open-circuit voltages ata cutoff wavelength of 5.3 μm （corresponding to a bandgapof 0.23 eV）, the longest ever reported for room temperaturePV devices. The device characteristics indicate a high levelof current matching and demonstrate the advantages of theinterband cascade approach in thermophotovoltaic celldesign.     

Dark current mechanism of unpassivated mid wavelength type II InAs/GaSb superlattice infrared photodetector

We investigate the dark current mechanism for an unpassivated mid wavelength(MW) type II InAs/GaSb superlattice infrared photodetector by doing the variablearea diode tests. The bulk resistance-area product and the resistivity due to the surface current are determined to be17.72 X cm2 and 704.23 X cm at 77 K, respectively. It is found that for all the mesa sizes used, the dark current is dominated or predominated by the surface component, and with scaling back the mesa size, the surface current increases while the bulk component decreases. The activation energy is determined to be 145 meV for the temperature range around 140–280 K, while it is 6 meV when temperature is below 100 K. It is also found that the dark current is dominated by the generation-recombination current for the MW device when temperature is between140 and 280 K.     

一种具有平顶陡边响应的长波长光探测器

在PIN型光探测器的基础上制备了一种适用于波分复用系统的具有平顶陡边响应的长波长光探测器。利用低压金属有机化学气相沉积(LP-MOCVD)设备在GaAs衬底上二次外延生长了具有台阶结构的GaAs/AlGaAs滤波腔和InP基PIN光探测器。高质量的GaAs/InP异质外延采用了低温缓冲层生长工艺;具有台阶结构的Fabry-Pérot(F-P)滤波腔采用了纳米量级台阶的制备方法。通过理论计算优化了实现平顶陡边光谱响应特性的器件结构;并通过实验成功制备出了具有平顶陡边响应性能的光探测器,器件的工作波长位于1 549nm,峰值量子效率大于25%,0.5dB光谱响应线宽为3.9nm,3dB光谱响应线宽为4.2nm,响应速率达到17GHz。     

波长路由WDM网络中“稀疏——部分”波长转换的模型与研究

在波长路由WDM网络中,波长转换是提高阻塞性能的一项关键技术。由于当前波长转换器的价格依然非常昂贵，如何有效利用波长转换器成为一个重要的问题。分析了稀疏——部分波长转换网络的结构，论证了该结构在获得优秀的阻塞性能同时，能显著地节省波长转换器的数目。理论和仿真结果表明，一个仅具有1%～5%波长转换能力的波长路由WDM网络，其性能非常接近于具有全程——完全波长转换能力的WDM网络。     

比色测温的波长选择

介绍了辐射测温的基本原理,以比色测温的原理为基础,探讨在辐射测温中波长选择的方法原则.通过黑体能流密度的推导,对输出电压比值范围、信噪比方面做了详细的分析,得出具体的数据来判断被测物体的温度对波长的要求,并且对窄带滤镜代替单点波长计算的方法的合理性进行了证明.文中波长选择的方式方法适用于各个温度段在使用辐射测温时的波长选择.文章最后通过测温系统得到的实验数据证明了波长选择的正确性,基本做到消去一部分发射率的影响.     

All-optical wavelength converter using a microdisk resonator integrated with p-n junctions

We explore all-optical wavelength conversion in a microdisk resonator integrated with interleaved p-n junctions. Numerical simulation based on temporal coupled mode theory is performed to study the free-carrier dynamics inside the cavity. It reveals that the detuning of pump and probe frequencies and the carrier lifetime have a significant effect on the device performance. Experimental result confirms that the conversion speed can be considerably improved by applying a reverse bias on the p-n junctions. Wavelength conversion at 10 Gb/s data rate is achieved with a pump power of 5.41 dBm and a bias voltage of -6 V.     

Applications of Acrylate—based Polymer and Silicone Resin on LPFG—based Devices

Both acrylate-based polymer and silicone resin are proposed as recoating materials surrounding LPFGs for purposes of different applications.For the LPFG recoated with a thin layer of acrylate-based polymer,the range of wavelength shift as much as 60nm is expected when temperature changes from0-100℃.As for that with surrounding material of silicone resin,the temperature stability is greatly improved depicted as the maximum wavelength shift of about 0.6nm with the same temperature variation.The former is potentially a broadband tunable band rejection filter or temperature sensor with enhanced sensitivity.And the latter could be applied as temperature insensitive filter,demultiplexer or strain sensor.