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1.
介绍了电子束蒸发WO3膜和以该膜为敏感材料的H2S气体传感器工艺,分析了膜的灵敏度和膜的稳定性以及掺金和分步热处理对器件性能的影响  相似文献   

2.
采用非醇盐溶胶-凝胶工艺在Al2O3基片上旋转涂敷制备掺杂Sb的SnO2薄膜,再经直流溅射制得表面掺杂Pt的Sb∶SnO2薄膜,测试了薄膜对乙醇、汽油、苯、二甲苯、甲苯、丙酮和NH3气体的气敏性能,探讨了不同Pt掺杂量对乙醇气敏性能的影响.结果表明,Pt的溅射时间为90 s时,元件对50×10-6乙醇气体的灵敏度高达43,且薄膜具有较好的响应-恢复特性,其响应时间和恢复时间均为6 s.选择性研究表明,薄膜在加热温度为280℃时,具有很好的酒敏特性和选择性.  相似文献   

3.
Multiwalled carbon nanotubes(MWNTs)were synthesized through CVD method,and the gas sensitive materials MWNTs/ZnO were obtained by mixing MWNTs and ZnO.The gas sensing properties of the as-prepared materials were investigated.The results show that the gas sensing properties of ZnO sensor are significantly improved by doping MWNTs.The sensitivity,response time and recovery time to 50 ppm ethanol at 260°C are 46,4 and 20 s,respectively.We also examined the selectivity of 0.1 wt%MWNTs-doped ZnO sensors to different gases.The results show that the sensor possesses an excellent selectivity to ethanol.  相似文献   

4.
采用溶胶-凝胶法制备了ZnO及掺铝ZnO纳米粉体.利用X射线粉末衍射仪、透射电镜对材料的结构进行了表征.结果表明制备的ZnO及掺铝ZnO纳米材料均属于六方晶系,纤锌矿结构.用纯ZnO和掺铝ZnO做成气敏元件,研究了不同掺杂量对材料的气敏性能的影响.结果表明,铝掺杂均使ZnO对体积分数30×10-6的Cl2的灵敏度有很大的提高,当铝含量为Al2O3/ZnO=0.5%(mol)时,对30×10-6Cl2的灵敏度最高可达800左右.并讨论了纳米氧化物的气敏机理.  相似文献   

5.
6.
以尿素为沉淀剂,基于溶剂热法制备出具有特殊三维结构的纳米ZnO,并通过改变Ag的掺杂量制备乙醇气敏材料.利用XRD和SEM对所得产物的晶体结构及微观形貌进行表征, 采用静态配气法对制得的气敏元件进行性能检测.实验结果表明:与纯3D-ZnO相比,掺杂Ag可以有效地改善三维ZnO材料对乙醇气体的气敏性能.且当Ag掺杂质量分数为1.5 % 时,气敏元件对体积分数0.1%乙醇气体的响应值达31.61,工作温度由350℃降至200℃,同时响应/恢复时间缩短至10s/10s且乙醇选择性提高.  相似文献   

7.
Ag掺杂ZnO纳米晶的发光特性   总被引:1,自引:0,他引:1  
以Zn(NO3)3.6 H2O,AgNO3为原料,明胶为模板分散剂,采用凝胶模板燃烧法制备纯ZnO和ZnO∶Ag纳米晶,利用XRD,SEM,TEM和PL谱对样品的结构和性能进行了研究.结果表明∶掺杂前后产物粒子形状均为球形,结晶良好,属六方晶系结构且无杂相;Ag占据部分Zn格位或填隙位进入ZnO晶格,掺入量约为1%(摩尔分数);纯ZnO平均粒径约为40 nm,掺杂样品的平均粒径约为45 nm,Ag掺杂轻微地影响ZnO晶粒生长.PL谱显示Ag掺杂能够调整ZnO纳米晶的能带结构?提高表面态含量,进而使得ZnO:Ag纳米晶的可见发光能力显著增强.  相似文献   

8.
ZnO:Al and ZnO:Al/Sb thin films have been prepared and investigated.The thin films were deposited on Si substrates by the sol-gel method.The structural,optical and electrical properties of ZnO films have been investigated by spectrophotometry,ellipsometry,X-ray diffraction and current-voltage characterizations.It is found that the films exhibit wurtzite structure with a highly c-axis orientation perpendicular to the surface of the substrate,a high reflectivity in the infrared region and a response to illumination.Furthermore,it has been found that Si/(ZnO:Al/Sb)/Al photodiode is promising in photoconduction device while Si/(ZnO:Al)/Al can be used as gas sensor responding to the low H2concentrations.  相似文献   

9.
基于纳米材料SnO_2的气敏元件对大多数的挥发性气体具有敏感性,以SnO_2为基料制备了旁热式异丙醇气敏元件.对比了纯SnO_2气体元件和掺杂ZnO气体元件对异丙醇的气敏特性,通过控制变量法,选择在相同的烧结温度或工作温度下进行测试.结果表明:在烧结温度为400℃,工作温度为300℃的条件下,掺杂为1%ZnO的SnO_2气敏元件对异丙醇气体的气敏特性较好.讨论了SnO_2材料对异丙醇的敏感机理.  相似文献   

10.
Radio frequency (RF) reactive magnetron sputtering was utilized to deposit Li-doped and undoped zinc oxide (ZnO) films on silicon wafers. Various Ar/O2 gas ratios by volume and sputtering powers were selected for each deposition process. The results demonstrate that the enhanced ZnO films are obtained via Li doping. The average deposition rate for doped ZnO films is twice more than that of the undoped films. Both atomic force microscopy and scanning electron microscopy studies indicate that Li doping significantly contributes to the higher degree of crystallinity of wurtzite–ZnO. X-ray diffraction analysis demonstrates that Li doping promotes the (002) preferential orientation in Li-doped ZnO films. However, an increase in the ZnO lattice constant, broadening of the (002) peak and a decrease in the peak integral area are observed in some Li-doped samples, especially as the form of Li2O. This implies that doping with Li expands the crystal structure and thus induces the additional strain in the crystal lattice. The oriented-growth Li-doped ZnO will make significant applications in future surface acoustic wave devices.  相似文献   

11.
 按化学式Cd(Alx Fe1-x)2 O4进行化学计量配比,以化学共沉淀法制备了系列掺铝CdFe2 O4固溶体粉料。XRD测量结果表明,掺铝Cd(Alx Fe1-x)2 O4固溶体的固溶x值范围为0  相似文献   

12.
为了提高氧化锌(ZnO)压敏电阻的电学性能,采用常规烧结并在ZnO压敏电阻中掺杂预先合成的BiSbO4和Zn2SiO4,研究不同掺杂比例对ZnO压敏电阻的微观结构、电学性能、通流能力的影响.结果表明:ZnO压敏电阻在掺杂BiSbO4和Zn2SiO4后,能够有效抑制ZnO晶粒变大,晶体结构变得致密均匀,致密性有所提高,有效提高压敏特性和通流能力.BiSbO4和Zn2SiO4掺杂比例为3∶1的样品综合性能比较优异,样品的致密度为5.58 g·cm-3,压敏电位梯度达到425 V·mm-1,非线性系数为70,漏电流为1.2×10-7 A·cm-2,能量耐受能力达到334.21 J·cm-3,残压比为2.5.  相似文献   

13.
采用溶胶-凝胶法,通过改变硝酸银与醋酸锌的物质的量比分别在Si,ITO和玻璃基片上制备出不同Ag掺杂浓度的ZnO薄膜.利用X射线衍射仪、扫描电子显微镜、紫外可见光分光光度计、伏安特性曲线等测试手段,表征了薄膜的结晶状况、表面形貌及光电特性等.结果表明:随Ag元素的引入及掺杂浓度的升高,ZnO薄膜中有Ag单质生成,并在波长404 nm处出现了由Ag单质颗粒引起的共振吸收峰,同时ZnO薄膜的导电性得到了明显改善,在可见光范围内薄膜透光率均在85%以上.Ag掺杂原子数分数为7%时,薄膜导电性最好,其在可见光范围内透光率高达90%.  相似文献   

14.
本文采用基于密度泛函理论的第一性原理计算,使用CASTEP软件建立了4H-SiC重掺杂模型,对通过激光辐照固态Al膜制备的p型重掺杂4H-SiC薄膜的晶体结构和电子结构进行了计算分析,研究获得不同浓度Al掺杂4H-SiC的能带结构和态密度.结果表明,随着Al原子掺杂浓度的增大,辐照样品禁带宽度随之减小,费米能级进入价带,体现出p型半导体的特征.结合二次离子质谱测试分析,得到Al掺杂浓度随辐照层深度的变化规律,Al掺杂浓度在30 nm范围内较为均匀,约为1×10^20cm^-3.证明KrF准分子激光可以实现4H-SiC之Al原子重掺杂,随着深度的增加,激光能量密度逐渐降低,4H-SiC内Al原子掺杂浓度相应降低.验证了激光辐照Al膜掺杂所制备4H-SiC样品的p型半导体特征,得到了Al掺杂浓度随激光辐照深度的变化规律.  相似文献   

15.
采用静电纺丝法制备还原氧化石墨烯(rGO)/SnO_2复合纳米纤维,研究了Ce掺杂及掺杂量对rGO/SnO_2纳米纤维的微结构与气敏性能的影响.利用扫描电子显微镜(SEM)、透射电子显微镜(TEM,带SAED)、X射线衍射仪(XRD)及拉曼光谱仪(Raman)对复合纳米纤维的结构与形貌进行表征.结果表明:不同含量Ce掺杂对复合纳米纤维的晶体结构和形貌均无明显影响.气敏测试结果表明:不同的Ce掺杂量均能改善rGO/SnO_2纳米纤维对H_2S的灵敏度,在Ce掺杂摩尔分数为3%时复合材料对H_2S具有最佳的气敏性能,在75℃时5μL/L H_2S气体的灵敏度高达300,同时选择性和响应恢复性能也均有显著提高.  相似文献   

16.
甲醛作为室内装潢最主要的污染物之一,会对人们的健康造成危害。采用旁热式气敏元件的制备工艺,利用功能化后的碳纳米管对二氧化锡进行不同比例的掺杂,利用扫描电镜(SEM)和X射线衍射仪(XRD)对气敏材料进行表征;并在甲醛气氛中与二氧化锡气体传感器进行对比。分析了掺杂浓度,工作温度及气体浓度对传感器灵敏度和响应恢复时间的影响,对其气敏机理进行分析。结果表明碳纳米管的引入提高了二氧化锡传感器对甲醛气体的灵敏度缩短了其响应恢复时间;并且对低浓度的甲醛气体也有较好的响应。  相似文献   

17.
使用阳极氧化和氨气退火N化的方法制备了N掺杂的TiO2纳米球薄膜和纳米线薄膜.经过N掺杂TiO2纳米线薄膜与未掺杂纳米线可见光区的光吸收强度相差不大,能带宽度从未掺杂样品的3.2eV缩小为3.1eV.TiO2纳米球薄膜在可见光区的光吸收显著增强,能带宽度由未掺杂样品的3.2eV缩小为2.8eV,同时纳米球生长被抑制,其直径约为50nm,明显小于未掺杂TiO2样品的100mn.在可见光照射TiO2氮掺杂纳米线薄膜和纳米球薄膜降解4h后,溶液中亚甲基蓝的浓度分别降至45%和44%,N掺杂样品获得了优异的可见光光催化活性.研究表明N掺杂导致的O空穴浓度增加和能带宽度有效减小是其可见光区光催化活性增强的主要原因.  相似文献   

18.
纳米晶BaTiO3湿敏元件研制   总被引:2,自引:0,他引:2  
用硬酯酸法制备纳米晶钛酸钡材料,并制成湿敏元件,可用于全湿范围,灵敏度较高.纳米晶的粒径尺寸影响湿敏元件的电阻.掺入某些杂质如Na2CO3可以改善元件的湿敏特性  相似文献   

19.
Miniaturized gas ionization sensors using carbon nanotubes   总被引:2,自引:0,他引:2  
Modi A  Koratkar N  Lass E  Wei B  Ajayan PM 《Nature》2003,424(6945):171-174
Gas sensors operate by a variety of fundamentally different mechanisms. Ionization sensors work by fingerprinting the ionization characteristics of distinct gases, but they are limited by their huge, bulky architecture, high power consumption and risky high-voltage operation. Here we report the fabrication and successful testing of ionization microsensors featuring the electrical breakdown of a range of gases and gas mixtures at carbon nanotube tips. The sharp tips of nanotubes generate very high electric fields at relatively low voltages, lowering breakdown voltages several-fold in comparison to traditional electrodes, and thereby enabling compact, battery-powered and safe operation of such sensors. The sensors show good sensitivity and selectivity, and are unaffected by extraneous factors such as temperature, humidity, and gas flow. As such, the devices offer several practical advantages over previously reported nanotube sensor systems. The simple, low-cost, sensors described here could be deployed for a variety of applications, such as environmental monitoring, sensing in chemical processing plants, and gas detection for counter-terrorism.  相似文献   

20.
射频反应溅射纳米SnO2薄膜气敏特性研究   总被引:2,自引:0,他引:2  
采用射频反应溅射在瓷管上制备了SnO2气敏薄膜元件,以及用传统方法制备了SnO2厚膜元件.两种元件经测试表现出对乙醇较高的灵敏度,对两种元件进行了性能对比测试.测试表明,无论在灵敏度、响应恢复时间,还是在检测浓度范围上,SnO2气敏薄膜元件都比传统的厚膜元件性能优越.SnO2气敏薄膜元件经过表面修饰,在200×10-6体积浓度下接近30.对薄膜元件加热温度及选择性进行了研究,初步探讨了元件稳定性及其敏感机理.  相似文献   

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