晶片去蜡技术综述

随着晶片直径向大尺寸发展,有蜡抛光方式成为晶片抛光的一项主流技术,从而需要引入晶片去蜡技术。对晶片去蜡工艺中一些常用的技术,如有机溶液浸泡法、有机溶剂超声清洗法以及专用试剂超声清洗法进行了介绍,结合一些设备生产厂家的设备实例,对晶片去蜡技术的发展趋势作了简要论述。     

声致发光法测量超声空化场的实验研究

依据鲁米诺增强声致发光原理,采用微光测量系统,对超声清洗槽内空化声场进行了测量,分析了声致发光强度与功率密度及驱动频率的关系.结果表明,当输入功率密度超过声致发光阈值时,液体中才出现声致发光现象;同一功率密度条件下,不同超声频率发光强度不同.     

半导体硅材料的清洗方法

半导体行业中的很重要的一道工序就是对半导体材料的清洗,这直接影响着半导体材料的质量及下游产品的性能。介绍了硅片表面污染的种类来源以及形成机理。对目前硅片主要清洗方法——RCA清洗法、超声清洗法、气相清洗法和其他清洗法的工作原理、清洗效果、适用范围等特点进行研究,分析了各种清洗方法的优缺点。最后,重点对半导体硅片传统的RCA清洗方法中各种清洗液的清洗原理、清洗特点、清洗局限进行了详细介绍。生产企业可根据实际生产情况和产品要求选择合适的清洗方法。     

影响超声波换能器回波频率的因素及控制方法

在超声波换能器制造标准中规定超声波换能器的标称频率与其实际回波中心频率的误差不能超过±10%。在超声波换能器设计生产中,这是一个比较难以控制的指标。本文提出了用驻波理论设计出一个物理模型,将粘接后的保护膜与晶片看作一个整体,晶片中激发的超声波在这个整体中形成驻波。对给定频率的晶片可以用保护膜的厚度来控制探头的回波频率,减小保护膜的厚度,将提高探头回波中心频率,增加保护膜的厚度,将降低探头的回波中心频率。     

天津赛法:精湛技艺绽放蓝宝石光辉

天津赛法晶片技术有限公司处在半导体照明产业链的起始环节——衬底材料的生产(晶片加工),是目前国内唯一的蓝宝石晶片生产厂家。说起蓝宝石,我们首先想到的是首饰上熠熠放光的晶体,而蓝宝石材料,是氮化物半导体衬底、集成电路衬底的首选材料。α-Al2O3单晶,即蓝宝石晶体,是目前最常用的GaN的外延衬底材料。众所周知,GaN是直接带隙材料,     

浅析M103/M106几何参数测试系统原理及方法

几何参数是半导体材料的重要参数之一,几何参数测量是半导体晶片生产中不可或缺的一部分。从一个半成品晶片到一个打磨好的、投入使用的晶片,几何参数为加工工程师提供了使生产过程始终处于控制之中并且保证线切割及研磨符合客户所需规格的必要信息。因此,在半导体工业中,必须快速稳定精确地对半导体材料的几何参数进行测量。目前,无接触测量是经常采用的一种方法,该方法原理简单,数据处理简便,为科研及生产单位广泛应用。     

超声清洗技术原理及其应用

本文分析了空化的形成及其影响因素,阐述超声波引起空化的机理,以及利用超声空化作用对物体进行清洗的过程和原理,并介绍了超声空化清洗的特点,对超声空化清洗的前景作了展望。     

超稠油超声裂解降粘实验研究

利用功率超声开展了超稠油超声裂解降黏实验研究。优选了超声处理参数。研究了超声波功率、频率及处理时间对超稠油降黏效果的影响。并分析了超声处理前后超稠油的族组成及平均分子量变化。实验结果表明:滨南超稠油超声降黏最佳参数为超声波功率1 000 W、频率18 kHz、处理时间30 min。超声波功率对降黏效果影响最大,其次为超声波频率及处理时间;超声波功率越大降黏效果越好;频率增加降黏效果有所降低;超声波处理时间增加,超稠油降黏率先增加后趋于平稳。超声波能破坏超稠油分子结构,使重质大分子裂解成轻烃物质,实现稠油的不可逆降黏,有效改善稠油品质。     

硅,锗衬底上的软硬碳氢膜

我们使用射频-直流辉光放电系统制备了非晶碳氢膜(a-C:H),所用的衬底为半导体级抛光后的硅、锗单晶片,锗片纯度在9个9以上,硅片为N型,电阻率10～20Ω·cm为研究淀积源对膜层结构的影响,我们除使用气态源乙炔(C_2H_2)外,还使用了液态源戌烷(C_5H_(12))。所用淀积参数为:高频频率10MHz,高频功率密度1.4～2.8W/cm~2(未能精确测量),直流偏压0～600V,气体流量0.3～0.61/min,反应室内压强0.01～1托,衬底温度:室温～300℃。     

微米磁性复合材料超声波吸收检测研究

目的研究磁性SiO2-Fe3O4-P(NIPAM-co-AA)有机-无机复合微球及复合材料的制备、吸收超声波的能力和吸波机理。方法分别对不同系列样品的超声衰减系数及声速进行测量、比对分析。结果磁性复合材料声衰减系数随SiO2的包覆厚度增大而增大,磁含量大小对声衰减系数有一定的影响,同时超声衰减系数对频率有很强的依赖性。结论复合材料中SiO2的包覆厚度、磁性大小对声衰减系数、超声速度有不同影响,此复合材料应用于超声波吸波材料时在较高频率对超声波的吸收效果好。     

Markedness and its Interpretation in Language Use

Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.     

Features of Women's language

Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women＇s language from these perspectives： pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women＇s language, more attention should be paid to language use in social context. What＇s more, the linguistic phenomena in a speaking community can be understood more thoroughly.     

低渗透非均质砂岩油藏启动压力梯度研究

理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。     

On Tragic Consciousness In The Works By Ernest Hemingway

As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.     

Achieving Unusual States of Matter Under High Pressure

正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-     

Exchange-Correlation and Electronic Excitation Energies from Pairing Matrix Fluctuations

We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-     

Density Functional Theory for the Response of Periodic Systems to Electric Fields Based on the Vector Potential Approach

正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that     

Call for Papers

<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with     

Journal of Donghua University ( English Edition) Contents of Volume 31

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Brief Introduction to “Journal of Jilin University( Science Edition) ”

<正>"Journal of Jilin University(Science Edition)"is a comprehensive academic journal in the fields of science sponsored by Jilin University and administrated by the Ministry of Education of the Peoples Republic of China.The journal started publication in 1955.The original name at starting publication was"Journal of Natural Science of Northeast People University",which was changed into"Acta Scientiarum Naturalium Universitatis Jilinensis"in 1958 owing to the name change of the university.The present journal name has