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1.
基于微机电系统(MEMS)微加工工艺,开发了一种能够测量微管道内壁面剪应力的热式传感器,以多晶硅为热敏元件,在低阻硅衬底上形成多孔硅膜隔离硅衬底损耗. 利用水浴加热方法测量得到电阻温度系数为0.21%/℃. 采用数值模拟的方法对剪应力传感器进行了热分析,探讨了提高剪应力传感器灵敏度和线性度的方法,为优化其设计和使用提供了理论基础. 数值模拟结果表明:随着微管道深度的增加,传感器灵敏度提高,但线性度下降.  相似文献   

2.
借助计算流体动力学软件Fluent,采用有限体积法、非定常N-S方程、Realizablek-ε湍流模型及无滑移壁面边界条件对微电子机械系统(MEMS)微型热敏传感器进行三维数值模拟.全面地分析了传感器绝缘层材料、空腔内介质材料以及结构尺寸参数对其灵敏度的影响情况,探讨了提高传感器灵敏度的方法.同时,设计了一款高灵敏度的MEMS微型热敏传感器.数值模拟结果发现,采用具有较低热导率的结构材料及工作气体,隔热效果最佳;合理优化传感器尺寸参数有助于获得较高的灵敏度.该结果对微型热敏传感器的优化设计和实际加工、制造提供了依据.  相似文献   

3.
微型剪应力传感器的热特性分析   总被引:2,自引:2,他引:0  
研究不同结构、不同热敏元件温度和不同工作介质等情况下剪应力传感器的性能差异.通过实验和数值模拟相结合的方法对剪应力传感器进行了热特性分析.数值模拟结果发现:采用热敏元件下部埋置真空空腔的结构,隔热效果最佳;选择相对较高的热敏元件温度和较高热物性系数的工作气体有助于获得较高的灵敏度.该结果对优化设计微型剪应力传感器具有通用的指导意义.  相似文献   

4.
MEMS热式微流量传感器具有灵敏度高、量程宽、响应时间短等优点,在生化医疗等领域具有重要的实用价值和意义。本综述首先介绍了MEMS热式流量传感器的工作原理和基本结构,随后阐述了此类传感器的分类、发展历史与技术特性,最后展望了其今后的发展趋势和应用前景。  相似文献   

5.
研制了一种严酷环境下使用的无线网络测风传感器,传感器由微型风速芯片、电子罗盘和主控及旋转部件构成。微型风速芯片基于拖动力及热式原理设计、采用Micro Electro Mechanical System(MEMS)技术制作而成,由微型风速芯片和电子罗盘通过感应数据配合获得所测风的瞬时风速和风向信息,气象监测环境风传感器具体工作过程,其无线主控部件接收到测试命令后,采用旋转部件将微型风速芯片旋转一周,通过对比各时刻输出信息获得max值,由风速芯片与电子罗盘解析该时刻的数据即为所测的风速和风向信息,最后由负责传输的部件传输出去。经初步测试,本设计特别适合用在高山、森林等环境恶劣的无线网络气象检测站。  相似文献   

6.
为获得用于表面应力测量的压阻悬臂梁传感器的参数的优化方法,建立了有限元分析模型。通过将模拟结果与压阻理论结合,分析了表面应力作用下的压阻式微型悬臂梁传感器。建立了两层硅悬臂梁结构模型,在顶层硅内施加初始应力模拟表面应力。对仿真结果应力数据进行提取与计算,结合压阻系数,分析了n型硅压阻与p型硅压阻长度、宽度和位置等对微型悬臂梁传感器灵敏度的影响。结果表明:为获得较高灵敏度,n型硅压阻应做长,p型硅压阻应做短并安排在固定端。该文研究结果为悬臂梁生化传感器提供了设计参考。  相似文献   

7.
获得均匀、平整的硅基薄膜是制备出高灵敏度的微型电容式压力传感器的关键步骤.首先在理论分析的基础上,确定了微型电容式压力传感器的基本参数,而后在制备中,发展了一种新型的硅基薄膜制作方法,即利用硅-玻璃键合工艺,结合浓KOH溶液超声腐蚀与化学机械抛光的方法,得到了厚度为10μm的均匀、平整的硅基薄膜,为制备微型压力传感器奠定了工艺基础,也可用于其他微机电系统(MEMS)压力传感器.  相似文献   

8.
张为 《科技资讯》2007,(34):49-49
微型电子机械系统(MEMS)是当代电子技术的又一重大突破,是近年来发展起来的一种新型多学科交叉的技术,其发展正受到社会的普遍关注.MEMS问世以来,已开发、研制了名种产品,其中尤以传感器类的产品为多.该技术将对未来人类生活产生革命性的影响这些产品已广泛应用于汽车工业、生物医学技术、仪器仪表制造业.本文将扼要介绍具有多种流量传感功能的MEMS.  相似文献   

9.
探讨微型生物传感器和药液贮囊容器单元植入体内,用一无线集成系统能控制药物的释放.接收传感器接收并反馈信号,可同时进行治疗药剂注射及组织采样等作业.本文主要介绍了MEMS(NEMS)技术在施药系统中的应用,并且对其发展给予了展望.  相似文献   

10.
采用弹性力学有限单元分析和光弹实验方法以解决高精度传感器结构设计问题是当前研究传感器结构的一个新尝试。本文介绍了用有限元及光弹对剪幅武传感器变形状态、应力状态进行了分析,由计算和试验的结果,提出此类传感器结构设计中关于:a)轮幅上的剪应力分布;b)轮幅上等剪应力区和等倾线分布;c)影响剪应力分布的结构因素等的分析和试验结果。 分析和实验结果表明: 1.沿轮幅轴线最大剪应力分布是不均匀的; 2.在轮幅上存在一最大剪应力的等剪应力区; 3.最大剪应力所在部位其主应力倾角不一定是45°。 为了满足传感器精度的要求,通过实验可以指示合理的结构形式,电阻应变片应粘贴的部位与尺寸范围,以及对于一个给定的传感器应变片的最大允许尺寸等。  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

14.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

15.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

16.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

17.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

18.
<正>"The Journal of Shanghai Normal University:Mathematics"is published by Shanghai Normal University as regular issues of The Journal of Shanghai Normal University each year from 2014 in English.The editors-in-chief of the issues are professors Yuhao Cong and Maoan Han.The Journal of Shanghai Normal University was started in 1958 with  相似文献   

19.
20.
<正>"Journal of Jilin University(Science Edition)"is a comprehensive academic journal in the fields of science sponsored by Jilin University and administrated by the Ministry of Education of the Peoples Republic of China.The journal started publication in 1955.The original name at starting publication was"Journal of Natural Science of Northeast People University",which was changed into"Acta Scientiarum Naturalium Universitatis Jilinensis"in 1958 owing to the name change of the university.The present journal name has  相似文献   

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