Influence of substrate metals on the crystal growth of AlN films

AlN films were deposited by reactive radio frequency (RF) sputtering on various bottom electrodes, such as Al, Ti, Mo, Au/Ti, and Pt/Ti. The effects of substrate metals on the orientation of AlN thin films were investigated. The results of X-ray diffraction, atomic force microscopy, and field emission scanning electron microscopy show that the orientation of AlN films depends on the kinds of substrate metals evidently. The differences of AlN films deposited on various metal electrodes are attributed to the differences in lattice mismatch and thermal expansion coefficient between the AlN material and substrate metals. The AlN film deposited on the Pt/Ti electrode reveals highly the c-axis orientation with well-textured columnar structure. The positive role of the Pt/Ti electrode in achieving the high-quality AlN films and high-performance film bulk acoustic resonator (FBAR) may be attributed to the smaller lattice mismatch as well as the similarity of thermal expansion coefficient between the deposited AlN material and the Pt/Ti electrode substrate.     

The impact of nanoporous SiN x interlayer growth position on high-quality GaN epitaxial films

The impact of nanoporous SiN x interlayer growth position on high-quality GaN epitaxial film was elucidated from the behavior of dislocations. The best quality GaN film was achieved when a nanoporous SiN x interlayer was grown on a rough layer, with the high-resolution X-ray diffraction rocking curve full width at half maximum for ( 1102 ) reflection decreasing to 223 arcs, and the total dislocation density reduced to less than 1.0×10 8 cm 2 . GaN films were grown on sapphire substrates by metal organic chemical vapor deposition. The quality of these films was investigated with high-resolution X-ray diffraction, atomic force microscopy, and cross-sectional transmission electron microscopy. A preference for the formation of half-loops to reduce threading dislocations was observed when an SiN x interlayer was grown on a rough layer. A growth mechanism is proposed to explain this preference.     

Fabrication and photoluminescence of GaN nanowires prepared by ammoniating GaeO3/BN films on Si substrate

GaN nanowires were successfully prepared on Si（111） substrate through ammoniating Ga203/BN films deposited by radio frequency magnetron sputtering system. The synthesized nanowires were confirmed as hexagonal wurtzite GaN by X-ray diffraction, selected-area electron diffraction and Fourier transform infrared spectra. Scanning electron microscopy and transmission electron microscopy revealed that the grown GaN nanowires have a smooth and clean surface with diameters ranging from 40 to 160 nm and lengths typically up to several tens of micrometers. The representative photoluminescence spectrum at room temperature exhibited a strong UV light emission band centered at 363 nm and a relative weak purple light emission peak at 422 nm. The growth mechanism is discussed briefly.     

Fabrication and photoluminescence of GaN nanowires prepared by ammoniating Ga_2O_3/BN films on Si substrate

GaN has been considered to be the most promising optoelectronic material for such applications as light emitting diodes (LEDs), laser diodes (LDs) as well as high power electronic devices, due to its large direct energy band gap of 3.39 eV at room tempera…     

Influence of growth conditions on the electrochemical synthesis of SnS thin films and their optical properties

Tin sulfide (SnS) thin films were prepared by electrodeposition onto fluorine-doped tin oxide (FTO) glass substrates using an aqueous solution containing SnCl₂ and Na₂S₂O₃ at various deposition potentials (E) and bath concentrations. The pH value and temperature of the solution were kept constant. The deposited films were characterized using X-ray diffraction (XRD), field-emission scanning electron microscopy (FESEM), photoluminescence (PL), and ultraviolet–visible (UV–Vis) spectroscopy. The FESEM images demonstrated that changes in the deposition potential (E) and solution concentration led to marked changes in the morphology of the deposited SnS films. Energy-dispersive X-ray analysis (EDXA) results showed that the Sn/S atomic ratio strongly depended on both the solution concentration and the deposition potential. To obtain an Sn/S atomic ratio approximately equal to 1, the optimal Sn2+/S₂O₃2- molar ratio and E parameter were 1/8 and -1.0 V, respectively. The XRD patterns showed that the synthesized SnS was obviously polycrystalline, with an orthorhombic structure. The effects of the variations of bath concentration and deposition potential on the band-gap energy (E_g) were studied using PL and UV–Vis experiments. The PL spectra of all the SnS films contained two peaks in the visible region and one peak in the infrared (IR) region. The UV–Vis spectra showed that the optical band-gap energy varies from 1.21 to 1.44 eV.     

Study of phase separation in Ga25Se75 xTex chalcogenide thin films

The effects of composition and thermal annealing in between glass transition and crystallization temperature on the optical and structural properties of Ga25Se75-xTex were investigated. The glass transition and crystallization temperature of the synthesized samples was measured by non-isothermal DSC measurements. Amorphous thin films of Ga25Se75-xTex glasses were grown onto ultra clean glass/Si wafer (100) substrates using the vacuum evaporation technique. The effect of thermal annealing on the optical gap (Eg) for Ga25Se75-xTex thin films in the temperature range 358-388K is studied. As-prepared and annealed thin films were characterized by X-ray diffraction, field emission scanning electron microscopy, energy dispersive X-ray spectroscopy and optical absorption. Thermal annealing was found to be accompanied by structural effects, which in turn, lead to changes in the optical constants. The optical absorption coefficient (a) for as-deposited and thermally annealed films was calculated from the absorbance data. From the knowledge of absorption coefficient at different wavelengths, the optical band gap (Eg) was calculated for all compositions of Ga25Se75-xTex thin films before and after thermal annealing. Results indicate that allowed indirect optical transition is predominated in as-deposited and thermally annealed thin films. The influence of Te incorporation and thermal annealing in Ga25Se75-xTex thin films results in a gradual decrease in the indirect optical gap, this behaviorcan be explained as increased tailing. The decrease in optical band gap and an increase in absorption coefficient and extinction coefficient with thermal annealing can be attributed to transformation from amorphous to crystalline phase.     

Electrodeposition and characterization of thermoelectric Bi<Subscript>2</Subscript>Se<Subscript>3</Subscript> thin films

Bi₂Se₃ thin films were electrochemically deposited on Ti and indium tin oxide-coated glass substrates, respectively, at room temperature, using Bi(NO₃)₃·5H₂O and SeO₂ as starting materials in diluted HNO₃ solution. A conventional three-electrode cell was used with a platinum sheet as a counter electrode, and a saturated calomel electrode was used as a reference electrode. The films were annealed in argon atmosphere. The influence of cold isostatic pressing before annealing on the microstructure and thermoelectric properties of the films was investigated. X-ray diffraction analysis indicates that the film grown on the indium tin oxide-coated glass substrate is pure rhombohedral Bi₂Se₃, and the film grown on the Ti substrate consists of both rhombohedral and orthorhombic Bi₂Se₃.     

Study of titanium nitride for Iow-e coating application

The paper reports our novel work on chemical vapor deposition coating of titanium nitride （TIN） thin film on glass for energy saving. TiN films were deposited on glass substrates by atmospheric pressure chemical vapor deposition （APCVD） using titanium tetrachloride （TiCl4） and ammonia （NH3） as precursors. As a result, TiN films with a thickness of 500 nm were obtained. X-ray diffraction （XRD）, scanning electron microscopy （SEM）, atomic force microscopy （AFM）, four-point probe method and optical spectroscopy were respectively employed to study the crystallization, microstructure, surface morphology, electrical and optical properties of the coated TiN films. The deposited TiN films are of NaCI structure with a preferred （200） orientation. The particles in the film are uniform. The reflectivity of the TiN coating in the near-infrared （NIR） band can reach over 40%, the visible transmittance is approximately 60%, and the visible refiectivity is lower than 10%. The sheet electrical resistance is 34.5 Ω. According to Drude theory, the lower sheet resistance of 34.5 Ω gives a high reflectivity of 71.5% around middle-far infrared band. The coated films exhibit good energy-saving performance.     

Simple method to rapidly fabricate chain-like carbon nanotube films and its field emission properties

A simple process to fabricate chain-like carbon nanotube (CNT) films by microwave plasma-enhanced chemical vapor deposition (MPCVD) was developed successfully. Prior to deposition, the Ti/Al₂O₃ substrates were ground with Fe-doped SiO₂ powder. The nano-structure of the deposited films was analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), and Raman spectroscopy. The field electron emission characteristics of the chain-like carbon nanotube films were measured under the vacuum of 10-5 Pa. The low turn-on field of 0.80 V/μm and the emission current density of 8.5 mA/cm2 at the electric field of 3.0 V/μm are obtained. Based on the above results, chain-like carbon nanotube films probably have important applications in cold cathode materials and electrode materials.     

An in vitro evaluation of novel NHA/zircon plasma coating on 316L stainless steel dental implant

The surface characteristics of an implant that influence the speed and strength of osseointegration include crystal structure and bioactivity. The aim of this study was to evaluate the bioactivity of a novel natural hydroxyapatite/zircon(NHA/zircon) nanobiocomposite coating on 316L stainless steel(SS) dental implants soaking in simulated body fluid. A novel NHA/zircon nanobiocomposite was fabricated with 0(control),5, 10, and 15 wt% of zircon in NHA using ball mill for 1 h. The composite mixture was coated on SS implants using a plasma spray method.Scanning electron microscopy(SEM) was used to evaluate surface morphology, and X-ray diffraction(XRD) was used to analyze phase composition and crystallinity(Xc). Further, calcium ion release was measured to evaluate the coated nanobiocomposite samples. The prepared NHA/zircon coating had a nanoscale morphological structure with a mean crystallite size of 30–40 nm in diameter and a bone-like composition,which is similar to that of the biological apatite of a bone. For the prepared NHA powder, high bioactivity was observed owing to the formation of apatite crystals on its surface. Both minimum crystallinity(Xc=41.1%) and maximum bioactivity occurred in the sample containing 10 wt% of zircon because of minimum Xcand maximum biodegradation of the coating sample.     

惰性盐辅助法合成氮化镓纳米棒及其场发射性能研究(英文)

以惰性盐为分散剂,通过直接氮化金属镓与氟化钙的混合物,在较低温度下(650℃)大量合成出角面截面型氮化镓纳米棒,大大低于以往文献报道的氮化温度(900℃以上)。通过X射线衍射和电子显微镜等设备表征,可知所制得的产物为六方相氮化镓纳米棒,且纳米线沿着c轴择优生长;每根氮化镓纳米棒都具有菱形或三角形截面。由于本方法的制备温度低,导致了氮化镓纳米棒与硅基片的良好接触。场发射实验表明,该复合系统具有很低的开启电压(5.4V/μm)和阈场(8.4V/μm)。     

Photore sponse and H2 gas sensing properti es of highly oriented Al and Al/Sb doped ZnO thin films

ZnO:Al and ZnO:Al/Sb thin films have been prepared and investigated.The thin films were deposited on Si substrates by the sol-gel method.The structural,optical and electrical properties of ZnO films have been investigated by spectrophotometry,ellipsometry,X-ray diffraction and current-voltage characterizations.It is found that the films exhibit wurtzite structure with a highly c-axis orientation perpendicular to the surface of the substrate,a high reflectivity in the infrared region and a response to illumination.Furthermore,it has been found that Si/（ZnO:Al/Sb）/Al photodiode is promising in photoconduction device while Si/（ZnO:Al）/Al can be used as gas sensor responding to the low H₂concentrations.     

SBS选择性催化加氢动力学研究

以双环戊二烯二氯化钛(Cp₂TiCl₂)为主催化剂,邻苯二甲酸二甲酯(DMP)为助催化剂研究了苯乙烯丁二烯嵌段共聚物选择性催化加氢动力学。在76℃、适宜的氢气压力以及主、助催化剂浓度下进行SBS加氢动力学研究得到动力学方程为-d[c(C=C) ]/dt =kc¹ (C=C )p^1.12 (H₂ )c¹ (Ti )c^-2 (DMP),相应的在70～84℃范围内加氢反应活化能为83.48kJ/mol。对加氢产物微观结构分析表明该催化体系加氢效率高,选择性高,且对SBS中PB链段1,2-结构和反式1,4-结构先加氢,并且达到完全饱和.     

氮化镓薄膜研究进展

介绍了CaN薄膜材料的主要性质，制备工艺，掺杂，衬底和缓冲层等相关问题，并概述了GaN基器件的研究现状，提出了目前CaN研究中所面临的主要问题．     

Structural and electrical properties of ZnO films on freestanding thick diamond films

In this paper, ZnO films are deposited on freestanding thick diamond films （FTDF） by plasma-assisted metal organic chemical vapour deposition （MOCVD）. Diethyl zinc （DEZn）, O2 and N2O are applied as precursors and different substrate temperatures are used to achieve high quality ZnO films. The influence of substrate temperature on the properties of ZnO films is systematically investigated by X-ray diffraction （XRD）, Hall measurements and electron probe microanalysis （EPMA）. Experimental results demonstrate that ZnO films deposited at 600℃ and 73 Pa display a fine electrical quality and Zn/O atomic ratio plays an important role in the electrical property of ZnO films.     

Effects of helium on titanium films and the helium diffusion

Using direct current-magnetron sputtering, Helium-trapped Ti films with a He/Ar mixture was studied. The relative helium content, helium depth profiles for the Ti films and crystallization capacity were analyzed by Enhanced Proton Backscattering Spectrometry （EPBS） and X-ray diffraction （XRD）. It was found that helium diffusion enhanced as more helium trapping into Ti films, and the He holding ratios were 95.9%, 94.9%, 93.9%, 82.8% when the Ti films with the He/Ti of concentrations of 9.7 at.%, 19.5 at.%, 19.7 at.%, 48.3 at.% were measured again 4 months later, respectively. The diffraction peaks became weak and wider, the peak of （002） plane was shifted to smaller diffraction angles and the relevant interplanar spacing d（hk,） increased gradually as more helium trapping into Ti films. The main peak was made trending to the （101） plane by both higher deposition temperature and more helium trapping.     

Cu掺杂对ZnO纳米薄膜的结构及其光学特性的影响

采用磁控溅射法(RF)在玻璃基底上制备了未掺杂和不同Cu掺杂浓度的ZnO薄膜.使用X射线衍射仪(XRD)、原子力显微镜(AFM)、扫描电子显微镜(SEM)分别对样品的形貌进行了表征,并对ZnO薄膜进行了应力分析.结果显示:所有样品都呈现出(002)衍射峰,有较好的c轴择优取向;所有样品出现有3个发光峰,分别对应于400 nm(3.14 eV,紫光),444 nm(2.78 eV,蓝光),484 nm(2.56 eV,蓝光).紫峰的存在与激子的存在有极大关系,而蓝光发射主要是由于电子从导带上向锌空位形成的浅受主能级上的跃迁.随着Cu掺杂量的增加,薄膜的带隙宽度Eg随之减小,样品光学带隙值由3.26 eV逐渐减小为2.99 eV.实验中还发现,随着Cu掺杂量增加,薄膜的透射率也随之减小.     

Studies on Wear and corrosion resistances of carbon nitride thin films on Ti alloy

0　IntroductionArtificialarthrosiseshavebeenwidelyusedintheoperatorsclinicalsurgeriesforthepatientswhosearthrosiseswerese riouslyseverelydamaged.Butmostofartificialarthrosisescanon lybeusedforabouttenyearslongduetotheseriousabrasion .Forthisreason ,theimprovementofthelongevityofartificialarthrosisbecomesanimportantsubjectofstudy .TheartificialarthrosisesbeingmadeupofTialloyTC4(Ti 6Al 4V)andthepolythenewithultrahighmolecularweighthavegreatpotentialitiesonim provinglongevitybecauseTC4canreac…     

γ′-Fe4N薄膜的制备及其磁性

采用直流磁控溅射方法, 以Ar/N₂为放电气体（N₂/(Ar+N₂)=10％）, 在玻璃和NaCl(100)单晶片上分别沉积获得Fe-N薄膜样品. 利用X射线衍射(XRD)、 原子力显微镜(AFM)和超导量子干涉仪(SQUID)对样品的结构、 形貌和磁性能进行分析, 研究基片和基片温度等条件对薄膜的影响. 结果表明, 以NaCl单晶为基片获得单相γ′-Fe₄N薄膜, 与玻璃基片相比可降低其生成的基片温度并可扩大形成温度的范围, 且比饱和磁化强度略有增大.      

Effect of oxygen partial pressure and transparent substrates on the structural and optical properties of ZnO thin films and their performance in energy harvesters

Zinc oxide (ZnO) thin films were deposited onto different substrates-tin-doped indium oxide (ITO)/glass, ITO/polyethylene naphthalate (PEN), ITO/polyethylene terephthalate (PET)-by the radio-frequency (RF) magnetron sputtering method. The effect of various O₂/(Ar+O₂) gas flow ratios (0, 0.1, 0.2, 0.3, 0.4, 0.5, and 0.6) was studied in detail. ZnO layers deposited onto ITO/PEN and ITO/PET substrates exhibited a stronger c-axis preferred orientation along the (0002) direction compared to ZnO deposited onto ITO/glass. The transmittance spectra of ZnO films showed that the maximum transmittances of ZnO films deposited onto ITO/glass, ITO/PEN, and ITO/PET substrates were 89.2%, 65.0%, and 77.8%, respectively. Scanning electron microscopy (SEM) images of the film surfaces indicated that the grain was uniform. The cross-sectional SEM images showed that the ZnO films were columnar structures whose c-axis was perpendicular to the film surface. The test results for a fabricated ZnO thin film based energy harvester showed that its output voltage increased with increasing acceleration of external vibration.