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1.
研制了一台高速率溅射的ECR等离子体沉积装置。采用微波真空波导及反常模式或输入技术,利用腔内双靶构成的电场镜,使高能γ电子在电场镜中振荡,从而获得高密度的等离子体。并且,导电膜能连续高速沉积,在2.7×10^-2Pa的低气压下,铜膜的沉积速率可达120nm/min。  相似文献   

2.
利用等离子体增强化学气相沉积系统沉积了碳纳米管或纤维,并用扫描电子显微镜研究了它们的生长和结构.为避免碳纳米管或纤维在生长过程中从衬底Si表面上脱落,先在Si表面上溅射沉积了金属过渡层Ti或Ta,然后再沉积催化剂NiFe.结果发现Ti和Ta过渡层对碳纳米管或纤维的结构有很大的影响.另外,还发现衬底Si放在支架的不同位置,碳纳米管或纤维的生长方向不同,这可能是由于辉光放电产生的非均匀电场所致.对不同过渡层和电场方向对碳纳米管或纤维生长的影响进行了分析和讨论.  相似文献   

3.
研究了磁等离子体化学气相沉积的不同工艺条件对SnO2薄膜导电性的影响.实验结果表明,外加适当位形、大小的纵向磁镜场,可使等离子体化学气相沉积技术中制备SnO2薄膜所需的氧气流量降低,沉积时间缩短,且制得的薄膜电阻大大降低,轴向分布均匀性明显增强.对以上结果进行了分析和讨论.  相似文献   

4.
电子回旋共振(ECR)微波放电等离子体是当今大规模和超大规模集成电路制作中的高新技术.它具有大面积均匀,高密度,低电位的等离子体,是沉积各种薄膜和刻蚀的重要工具.本文简要评述了ECR等离子体在材料科学中进行沉积镀膜和刻蚀的情况,简介了ECR等离子体发生器的装置工作原理.  相似文献   

5.
针对射频波加热等离子体的稳态过程,考虑等离子体径向密度呈抛物线分布和高斯分布,分析讨论了径向压强和温度分布对两种密度分布的螺旋波等离子体内功率沉积以及电场和电流密度的分布影响.考虑正梯度、负梯度和零梯度三种梯度模型.通过研究表明:正温度梯度更有利于等离子体中心处的功率的吸收;正压强梯度增大了等离子体边缘处感应电场,减小了中心处电流密度,并减弱了边缘处功率沉积,波能量耦合深度加深,更有利于中心处功率的耦合吸收;等离子体径向密度为高斯分布时,等离子体边缘处电场强度较高,电流密度较小,射频波在边缘处沉积能量较少且变化不大,进而造成波能量的耦合深度大大增加;等离子体径向密度为抛物线分布时,等离子体中心处和边缘处功率沉积较大,其中边缘处附近功率沉积尤为突出且明显高于高斯分布时的.三种温度和压强分布对两种密度结构的等离子体中电场强度与电流密度分布与变化趋势影响基本相似,由此证明m=1模式的稳定性.  相似文献   

6.
探讨了用微波等离子体化学气相沉积法(MPCVD)在Si(100)衬底上加偏压电场和不加偏压电场情况下金刚石膜的成核行为.并经用原子力显微镜(AFM)分析,偏压电场对金刚石成核有促进作用.文章也分析了偏压电场所以能促进金刚石成核的机制.  相似文献   

7.
第一镜是托卡马克光学诊断系统最重要的光学元件之一,强烈的等离子体与壁相互作用导致第一镜表面出现的杂质沉积会严重影响第一镜反射率和相关光学诊断系统的准确性和有效性,因此准确判别第一镜表面杂质沉积状态对于实时获取并采取有效手段恢复第一镜反射率至关重要.文中采用非平衡磁控溅射等离子体方法制备纳米晶钼材料第一镜,在此基础上利用电子束蒸发镀膜方法在其表面沉积氧化铝非晶涂层,利用分光光度计测得有、无氧化铝沉积膜的钼第一镜全反射率,并通过数据增强方法对原始数据集进行数据扩充,结合卷积神经网络对杂质沉积第一镜的全反射率数据集进行识别、分类.结果表明,当卷积神经网络模型迭代次数为50时,模型分类准确性达到最佳状态,并在包含均值为0,方差为1高斯噪声的数据集中验证了一维卷积神经网络的抗噪能力.最终实现有、无氧化铝沉积膜的钼第一镜分类,正确率达到98.85%,这为在封闭托卡马克环境下的第一镜表面原位清洗与杂质沉积状态识别提供了一种可能的新方法.  相似文献   

8.
本文利用微波电子回旋共振(ECR)等离子体化学气相沉积(CVD)法在较低气压下进行了金刚膜的沉积工艺研究,发现CH4气体的浓度可适当提高至CH4/H2=0.8。所得的Raman谱图证实在该条件下得到的膜比在CH4/H2较小情况下得到的膜含有更多的金刚石相。  相似文献   

9.
首次报道了用微波等离子体化学气相沉积技术在TaN2电阻材料上沉积高质量金刚石薄膜的制备工艺,以及扫描电镜,X射线衍射,拉曼光谱,压痕测试的测试结果,从实验上表明了CVD金刚石薄膜作用TaN2热打印头表面保护层的可能性。  相似文献   

10.
采用射频等离子体增强磁控溅射同步沉积,在金属表面制备了Al2O3膜,实验表明,采用本方法在工艺上是可行的,膜与基材结合性能好。  相似文献   

11.
Language markedness is a common phenomenon in languages, and is reflected from hearing, vision and sense, i.e. the variation in the three aspects such as phonology, morphology and semantics. This paper focuses on the interpretation of markedness in language use following the three perspectives, i.e. pragmatic interpretation, psychological interpretation and cognitive interpretation, with an aim to define the function of markedness.  相似文献   

12.
何延凌 《科技信息》2008,(4):258-258
Language is a means of verbal communication. People use language to communicate with each other. In the society, no two speakers are exactly alike in the way of speaking. Some differences are due to age, gender, statue and personality. Above all, gender is one of the obvious reasons. The writer of this paper tries to describe the features of women's language from these perspectives: pronunciation, intonation, diction, subjects, grammar and discourse. From the discussion of the features of women's language, more attention should be paid to language use in social context. What's more, the linguistic phenomena in a speaking community can be understood more thoroughly.  相似文献   

13.
王慧 《科技信息》2008,(10):240-240
Wuthering Heights, Emily Bronte's only novel, was published in December of 1847 under the pseudonym Ellis Bell. The book did not gain immediate success, but it is now thought one of the finest novels in the English language. Catherine is the key character of this masterpiece, because everybody and everything center on her though she had a short life. We can understand this masterpiece better if we know Catherine well.  相似文献   

14.
The Williston Basin is a significant petroleum province, containing oil production zones that include the Middle Cambrian to Lower Ordovician, Upper Ordovician, Middle Devonian, Upper Devonian and Mississippian and within the Jurassic and Cretaceous. The oils of the Williston Basin exhibit a wide range of geochemical characteristics defined as "oil families", although the geochemical signature of the Cambrian Deadwood Formation and Lower Ordovician Winnipeg reservoired oils does not match any "oil family". Despite their close stratigraphic proximity, it is evident that the oils of the Lower Palaeozoic within the Williston Basin are distinct. This suggests the presence of a new "oil family" within the Williston Basin. Diagnostic geochemical signatures occur in the gasoline range chromatograms, within saturate fraction gas chromatograms and biomarker fingerprints. However, some of the established criteria and cross-plots that are currently used to segregate oils into distinct genetic families within the basin do not always meet with success, particularly when applied to the Lower Palaeozoic oils of the Deadwood and Winnipeg Formation.  相似文献   

15.
理论推导与室内实验相结合,建立了低渗透非均质砂岩油藏启动压力梯度确定方法。首先借助油藏流场与电场相似的原理,推导了非均质砂岩油藏启动压力梯度计算公式。其次基于稳定流实验方法,建立了非均质砂岩油藏启动压力梯度测试方法。结果表明:低渗透非均质砂岩油藏的启动压力梯度确定遵循两个等效原则。平面非均质油藏的启动压力梯度等于各级渗透率段的启动压力梯度关于长度的加权平均;纵向非均质油藏的启动压力梯度等于各渗透率层的启动压力梯度关于渗透率与渗流面积乘积的加权平均。研究成果可用于有效指导低渗透非均质砂岩油藏的合理井距确定,促进该类油藏的高效开发。  相似文献   

16.
As an American modern novelist who were famous in the literary world, Hemingway was not a person who always followed the trend but a sharp observer. At the same time, he was a tragedy maestro, he paid great attention on existence, fate and end-result. The dramatis personae's tragedy of his works was an extreme limit by all means tragedy on the meaning of fearless challenge that failed. The beauty of tragedy was not produced on the destruction of life, but now this kind of value was in the impact activity. They performed for the reader about the tragedy on challenging for the limit and the death.  相似文献   

17.
Location based services is promising due to its novel working style and contents.A software platform is proposed to provide application programs of typical location based services and support new applications developing efficiently. The analysis shows that this scheme is easy implemented, low cost and adapt to all kinds of mobile nework system.  相似文献   

18.
正The periodicity of the elements and the non-reactivity of the inner-shell electrons are two related principles of chemistry,rooted in the atomic shell structure.Within compounds,Group I elements,for example,invariably assume the+1 oxidation state,and their chemical properties differ completely from those of the p-block elements.These general rules govern our understanding of chemical structures and reactions.Using first principles calcula-  相似文献   

19.
We have developed an adiabatic connection to formulate the ground-state exchange-correlation energy in terms of pairing matrix linear fluctuations.This formulation of the exchange-correlation energy opens a new channel for density functional approximations based on the many-body perturbation theory.We illustrate the potential of such approaches with an approximation based on the particle-particle Random Phase Approximation(pp-RPA).This re-  相似文献   

20.
正The electronic and nuclear(structural/vibrational)response of 1D-3D nanoscale systems to electric fields gives rise to a host of optical,mechanical,spectral,etc.properties that are of high theoretical and applied interest.Due to the computational difficulty of treating such large systems it is convenient to model them as infinite and periodic(at least,in first approximation).The fundamental theoretical/computational problem in doing so is that  相似文献   

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