基于微小电极的气中电火花加工试验研究

为了解微小尺度电极的气中电火花加工性能,为进一步的气中微细电火花加工的深入研究进行必要的基础研究,本文在自行研制的加工装置上对气中小尺度电极的电火花加工工艺性能进行了研究.首先采用单因素法考察了微小尺度电极的气中电火花加工规律,并进行了正交试验研究,对实验现象进行了分析;最后进行了三维结构的电火花铣削加工试验.实验结果 表明,在一定的试验条件下,气中微小尺度电极电火花加工速度随着脉冲能量的增加而增加.在伺服条件不变的情况下,峰值电流和脉冲宽度是影响气中小尺度电极电火花加工速度及电极损耗的主要因素.实现了微小尺度电极的三维结构的加工,并在硅片上加工出了EDM字样.试验验证了进行气中微小电极电火花的可行性.

Experimental Research on Dry EDM Technology Using Small Electrode

The processing performances of small dimension tool electrode in the dry electrical discharge machining technology (dry EDM) were studied based on the machining equipment self-designed, and the aim of the study is to find out the processing performances of the small dimension tool electrode in dry EDM and make necessary fundamental research of the dry micro EDM. The processing rules of the dry EDM with the small tool electrode were firstly studied using single-factor method. Secondly,the orthogonal experiments were carried out,and the experimental phenomena were analyzed and discussed. Finally,EDM Milling experiments were performed to process 3D structures. The experimental results indicate that the material removal rate increased with the increase of the single pulse energy on a certain experimental conditions. The peak current and pulse duration are the main influencing factors on the material removal rate and tool wear on the conditions of servo system keeping invariable in the dry EDM using small-scale tool electrode. The samples with 3D structure were processed and the shape of "EDM" was processed on the silicon slice. The experiments verified the feasibility of the dry EDM with small tool.