基于无线传感器网络的半导体设备数据采集设计

为了监测半导体前段制造厂的机台在生产过程中的关键参数，提出了一种基于无线传感器网络和以太网的半导体机台数据采集方案，研制了传感器节点和簇头节点，给出了传感器节点的硬件设计过程和部分源程序。测试结果表明：该系统可以对半导体机台关键生产参数进行远程采集、历史数据查询和故障实时报警，提高了半导体产品的良率以及工程师的工作效率。

Semiconductor Equipment Data Acquisition Design Based on Wireless Sensor Network

In order to monitor the key parameters during production process in the semiconductor front manufacturer, a semiconductor machine data collection proposal was presented based on the wireless sensor network and the Ethernet. The sensor nodes and the cluster head nodes have been developed. And the hardware design process of the sensor nodes as well as part of the source code was described. The results show that the remote data collection, historical data query and the real time fault alarm on critical production parameters of the machine can be a- chieved with the presented proposal, which improves the yield of semiconductor products and the efficiency of the engineers.