| 金刚石膜的内应力研究 |
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| 引用本文： | 毕冬梅,赵利军,王丽丽.金刚石膜的内应力研究[J].松辽学刊,2006,27(4):10-12. |
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| 作者姓名： | 毕冬梅 赵利军 王丽丽 |
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| 作者单位： | [1]长春大学理学院,吉林长春130022 [2]长春大学特殊教育学院,吉林长春130022 |
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| 摘 要： | 采用微波PCVD方法在单晶硅片上制备出了金刚石膜．利用拉曼光谱和X射线射三行射（XRD）研究了不同甲烷浓度对在硅基底上沉积金刚石膜的内应力的影响，同时用XRD研究，抛光对于自支撑金刚石膜的宏观应变和微观应变的影响．
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| 关 键 词： | 金刚石膜 甲烷浓度 内应力 |
| 文章编号： | 1000-1840-（2006）04-0010-03 |
| 收稿时间： | 2006-06-28 |
| 修稿时间： | 2006年6月28日 |
The Investagation in Stress of Diamond Film |
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| BI Dong-mei,ZHAO Li-jun,WANG Li-li.The Investagation in Stress of Diamond Film[J].Songliao Journal (Natural Science Edition),2006,27(4):10-12. |
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| Authors: | BI Dong-mei ZHAO Li-jun WANG Li-li |
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| Institution: | 1. College of Science, Changchun University, Changchun 130022, China ;2. College of Special Education, Changchun University, Changchun 130022, China |
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| Abstract: | Diamond film was synthesized on signal crystal Si substrate with different methane concentration by microwave PCVD method.The effect of stress was characterized using Laman spectrum and X-ray diffraction (XRD).The macroscopical and microcosmic strain of diamond film from surface polishing was studied. |
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| Keywords: | diamond film methane concentration stress |
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