| 用原子力显微镜观察金刚石膜核化过程 |
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| 引用本文： | 廖克俊,王万录,蔡从中,王必本,孙永伟.用原子力显微镜观察金刚石膜核化过程[J].甘肃科学学报,1999,11(3):5-8. |
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| 作者姓名： | 廖克俊 王万录 蔡从中 王必本 孙永伟 |
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| 作者单位： | 重庆大学应用物理系,重庆,400044 |
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| 摘 要： | 对衬底负偏压热灯丝ＣＶＤ金刚石膜核化过程进行了研究。利用原子力显微和扫描电子显微镜观察和分析结果表明，在衬底负偏压下正离子对Ｓｉ衬底表面轰击导致产生了大量的小坑几尖劈端，以此作为核化点，从而促进了核化过程。
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| 关 键 词： | 金刚石核化 热灯丝CVD 原子力显微镜 |
| 修稿时间： | 1999-01-14 |
OBSERVATION OF DIAMOND FILM NUCLEATION BY ATOMIC FORCE MICROSCOPY |
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| LIAO Ke-jun,WANG Wan-lu,CAI Cong-zhong,WANG Bi-ben,SUN Yong-wei.OBSERVATION OF DIAMOND FILM NUCLEATION BY ATOMIC FORCE MICROSCOPY[J].Journal of Gansu Sciences,1999,11(3):5-8. |
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| Authors: | LIAO Ke-jun WANG Wan-lu CAI Cong-zhong WANG Bi-ben SUN Yong-wei |
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| Abstract: | The diamond film nucleation process by negative biased h ot filament chemical vapor deposition has been investigated.The observation and analysis by atomic force microscopy and scanning electron microscopy have shown that the ion bombardment to silicon substrate leading to the production of lots of pits and tips which act as nucleation sets,can greatly promote the nucleation process. |
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| Keywords: | diamond nucleation hot filament CVD atomic force micro scopy |
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