| 电荷共享效应的RESURF横向功率器件击穿电压模型 |
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| 引用本文： | 张 珺,郭宇锋,黄 示,姚佳飞,林 宏,肖 建.电荷共享效应的RESURF横向功率器件击穿电压模型[J].应用科学学报,2014,32(2):209-214. |
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| 作者姓名： | 张 珺 郭宇锋 黄 示 姚佳飞 林 宏 肖 建 |
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| 作者单位： | 南京邮电大学电子科学与工程学院，南京210003 |
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| 基金项目： | 国家自然科学基金（No. 61076073）；教育部博士点基金(No. 20133223110003)资助 |
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| 摘 要： | 分析降低表面场(reduced surface field, RESURF)横向功率器件耐压机理，假定共享区电荷沿对角线分配给横向和纵向耗尽区，建立了一个新的RESURF横向功率器件击穿电压模型. 该模型能准确描述漂移区全耗尽和不全耗尽情况下的耐压特性，并具有数学表达式简单以及物理概念清晰的优点. 在此基础上，导出了一个新
的RESURF判据，进而给出了一个用于指导器件设计的漂移区剂量上下限. 解析结果与实验结果吻合较好，验证了击穿电压模型和RESURF判据的正确性.
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| 关 键 词： | 降低表面场 电荷共享 击穿电压 一维模型 |
| 收稿时间： | 2013-12-09 |
| 修稿时间： | 2014-01-11 |
Breakdown Model of RESURF Lateral Power Devices Based on Charge-Sharing Effect |
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| ZHANG Jun,GUO Yu-feng,HUANG Shi,YAO Jia-fei,LIN Hong,XIAO Jian.Breakdown Model of RESURF Lateral Power Devices Based on Charge-Sharing Effect[J].Journal of Applied Sciences,2014,32(2):209-214. |
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| Authors: | ZHANG Jun GUO Yu-feng HUANG Shi YAO Jia-fei LIN Hong XIAO Jian |
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| Institution: | College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China |
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| Abstract: | A breakdown model for RESURF lateral power device is developed. Based on the analysis of the breakdown mechanism in RESURF lateral power device, charges in the drift region are allocated to lateral and vertical junctions along the diagonal of the sharing area. This model can be used to investigate breakdown characteristics of the device when the drift region is fully or partially depleted. Besides, the model provides simple expressions with clear physical concepts. A new RESURF criterion is also derived to quantitate the upper and lower limits, which is useful to the design of the structure parameters. General agreements exist between the modeling results and the reported experimental results. |
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| Keywords: | reduced surface field (RESURF) charge-sharing breakdown voltage one-dimensional model |
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