| 类金刚石薄膜的喇曼光谱高斯分解研究 |
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| 引用本文： | 朱纪军,陆祖宏,仲昕,左敦稳,王珉.类金刚石薄膜的喇曼光谱高斯分解研究[J].应用科学学报,2000,18(1):47-50. |
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| 作者姓名： | 朱纪军 陆祖宏 仲昕 左敦稳 王珉 |
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| 作者单位： | 1. 东南大学生物医学工程系, 江苏南京 210096;2. 南京航空航天大学机电工程学院, 江苏南京 210016 |
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| 摘 要： | 采用过滤式阴极电弧沉积的方法获得类金刚石薄膜.喇曼光谱的分析表明,这种薄膜是典型的无氢类金刚石薄膜.喇曼光谱的高斯分解研究表明:随着偏压的增加,D线和G线的位置_d、_g向低频移动,半高宽Fg减小、Fd增加,在偏压为-100V时,D线和G线强度比Id/Ig有最大值.
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| 关 键 词： | 喇曼光谱 类金刚石薄膜 过滤式阴极电弧沉积 |
| 收稿时间： | 1998-10-13 |
| 修稿时间： | 1999-01-12 |
Research on Gauss Devolution of Raman Spectrum of Diamond Like Carbon Thin Film |
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| ZHU Ji-jun,LU Zu-hong,ZHONG Xin,ZUO Dun-wen,WANG Min.Research on Gauss Devolution of Raman Spectrum of Diamond Like Carbon Thin Film[J].Journal of Applied Sciences,2000,18(1):47-50. |
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| Authors: | ZHU Ji-jun LU Zu-hong ZHONG Xin ZUO Dun-wen WANG Min |
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| Institution: | 1. Department of Biomedical Engineering, Southeast University, Nanjing 210096, China;2. Institute of Mechanical Engineering, NUAA, Nanjing 210016, China |
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| Abstract: | The diamond like carbonfilm is achieved by filtered cathode arc deposition. The results of Raman spectrum tests show that this kind of diamond like carbon film is a typical nonhydrogen diamond like carbon film. The Gauss devolution algorithm is studied in this paper and the results show: the position of D line and G line increase with the increasing of applied voltage. The intensity ratio of I d / I g has the highest value on the bias voltage of 100V. |
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| Keywords: | diamond like carbon film filtered cathode arc deposition Raman spectrum |
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