基于DSMC方法的涡轮分子泵跨流态抽气性能研究

基于直接模拟蒙特卡洛(DSMC)方法，可以计算获得涡轮分子泵叶列在不同稀薄气体流态下的抽气性能.通过改变涡轮叶列旋转速度、气体入口结构尺寸及被抽气体温度等参数，能够得到涡轮分子泵最大抽气效率和最大压缩比的变化情况.比较各参数在不同流态下对抽气性能的影响程度，并计算不同流态下涡轮叶列返流的变化.计算得出增大叶片速度在分子流态下对涡轮分子泵性能的提升最为明显，缩小气体入口面积可以提升涡轮分子泵压缩比等结论.从而为提升涡轮分子泵抽气性能提供了手段，拓展了涡轮分子泵的工作范围.

On the Cross Flow Regime Pumping Performance of Turbomolecular Pumps Based on DSMC Method

Based on the direct simulation Monte Carlo (DSMC) method， the pumping performance of TMP (turbomolecular pump) blades in different rarefied gas flow regimes can be calculated. By changing the rotating speed， air inlet structure and the temperature of the pumped gas， the change of maximum pumping efficiency and maximum compression ratio of TMP can be obtained， and the influencing degree of each parameter on the performance of TMP in different flow regimes can be compared. At the same time， the change of the return flow of the turbine blades in different flow regimes is calculated. It is concluded that increasing the blade speed in the molecular flow regime can significantly improve the performance， and reducing the gas inlet area can improve the compression ratio of TMP， so as to provide the means to improve the performance and expand the working range of TMP.