氧化锆陶瓷微尺度磨削表面质量试验研究

为提高氧化锆陶瓷零件微细加工过程中的加工表面质量，改善氧化锆陶瓷零件的使用寿命，采用0.9mm磨头直径、500#磨粒的微磨棒对氧化锆陶瓷进行微尺度磨削三因素五水平正交试验.首先通过极差和方差分析，研究了磨削参数影响氧化锆陶瓷表面质量主次因素;其次优化出获得较低表面粗糙度值的工艺参数组合;最后通过单因素试验研究氧化锆陶瓷磨削表面粗糙度随磨削参数的变化规律.结果表明，磨削参数对表面粗糙度影响顺序依次为:磨削深度、进给速度、主轴转速;当主轴转速v_○s=40000r/min，进给速度v_○w=20μm/s，磨削深度a_○p=3μm时，表面粗糙度最小;表面粗糙度随主轴转速增大呈先下降后上升的趋势，随进给速度和磨削深度的增大而增大.

Experimental Study on Surface Quality in Micro-scale Grinding of Zirconia Ceramics

To improve the surface quality of zirconia ceramic parts in the process of micro machining and improve the service life of zirconia ceramic parts， orthogonal experiments of three factors and five levels on zirconia ceramics were performed using a micro-grinding tool with 500# grains and 0.9mm diameter. Firstly， through range analysis and variance analysis， the main influencing factors for the micro-grinding surface roughness of zirconia ceramics were studied. Then， the micro-grinding process was optimized to obtain the minimum surface roughness. Finally， the effect of process parameters on the surface roughness of micro-grinding zirconia ceramics was analyzed through the single-factor experiment. The results showed that the major and minor order of the effect of various process parameters on the surface roughness is the grinding depth， the feed speed and the spindle speed. The optimized parameter combination was as follows: the spindle speed v_○s=40000r/min， the feed rate v_○w=20μm/s and the grinding depth a_○p=3μm， the surface roughness being minimum. The surface roughness decreases first and then increases with the increase of spindle speed， and increases with the increase of feed speed and grinding depth.