| 标准镜调整和面形误差对干涉测量的影响 |
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| 引用本文： | 曹晓君,郑建洲,王丽梅,曲艳玲,武松林.标准镜调整和面形误差对干涉测量的影响[J].大连民族学院学报,2017,19(3):237-239. |
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| 作者姓名： | 曹晓君 郑建洲 王丽梅 曲艳玲 武松林 |
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| 作者单位： | 大连民族大学 物理与材料工程学院,辽宁 大连 116605 |
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| 基金项目： | 大连民族大学自主科研基金培育项目(DCPY2016011)。 |
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| 摘 要： | 采用Zemax光学设计软件进行干涉模拟,建立传统菲索干涉仪结构;对标准镜调整和面形误差对测量结果的影响做出模拟分析,得出对标准镜引入倾斜将会带来像差;分析了标准镜前后表面面形误差对测量结果的影响。
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| 关 键 词： | 菲索干涉仪 标准镜 波像差 |
Influence of Standard Mirror’s Adjustment and Surface Error on Interference Measurement |
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| CAO Xiao-jun,ZHENG Jian-zhou,WANG Li-mei,QU Yan-ling,WU Song-lin.Influence of Standard Mirror’s Adjustment and Surface Error on Interference Measurement[J].Journal of Dalian Nationalities University,2017,19(3):237-239. |
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| Authors: | CAO Xiao-jun ZHENG Jian-zhou WANG Li-mei QU Yan-ling WU Song-lin |
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| Institution: | School of Physics and Materials Engineering, Dalian Minzu University, Dalian Liaoning 116605, China |
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| Abstract: | In this paper, we simulate the interference with Zemax software, build the traditional Fizeau interferometer structure, and analyze the influence of standard mirror’s adjustment and surface error on measurement. We draw the conclusion that the tilt will introduce the comatic aberration. The influence of the front and the back surface of the standard mirror on the interference measurement are also analyzed. |
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| Keywords: | Fizeau interferometer standard mirror wavefront aberration |
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