| 导电原子力显微镜在介质薄膜电流图像检测中产生的假像 |
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| 引用本文： | 刘东平.导电原子力显微镜在介质薄膜电流图像检测中产生的假像[J].大连民族学院学报,2008,10(1):43-46. |
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| 作者姓名： | 刘东平 |
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| 作者单位： | 大连民族学院,光电子技术研究所,辽宁,大连,116605 |
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| 摘 要： | 对导电原子力显微镜在介质层电流图像检测中存在的假像进行了研究。发现这种假像归因于导电探针针尖较大的直径，其大小与被检测样品表面的缺陷点、漏洞、沟穴大小相关。研究表明，为提高图像分辨率，避免检测过程中存在的假像，需要使用具有纳米直径针尖的超尖导电探针。
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| 关 键 词： | 导电原子力显微镜 导电探针尖 纳米压痕 介质薄膜 |
| 文章编号： | 1009-315X（2008）01-0043-04 |
| 收稿时间： | 2007-10-17 |
| 修稿时间： | 2007年10月17 |
Tip Artifacts in Conductive Atomic Force Microscopy Imaging of Thin Dielectric Films |
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| LIU Dong-ping.Tip Artifacts in Conductive Atomic Force Microscopy Imaging of Thin Dielectric Films[J].Journal of Dalian Nationalities University,2008,10(1):43-46. |
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| Authors: | LIU Dong-ping |
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| Institution: | LIU Dong - ping (Institute of Optoelectronic Technology, Dalian Nationalities University, Dalian Liaoning 116605, China) |
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| Abstract: | We report a study of tip artifacts in conductive atomic force microscopy images of thin dielectric films.The tip artifacts in current imaging of dielectric layers are due to the wide radius of the conductive tips comparable to the sizes of defect spots,holes,and trenches at the sample surface.This study indicates that high-aspect-ratio sharp tips with sufficient conductivity are required to improve the resolution and avoid the artifacts in current imaging of thin dielectric films. |
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| Keywords: | conductive atomic force microscopy conductive tips nanoindentation dielectric films |
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