| 铁氧体构成磁控管的磁场分析及它对PET表面改性的影响 |
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| 引用本文： | 王玉,赵国俭.铁氧体构成磁控管的磁场分析及它对PET表面改性的影响[J].辽宁师范大学学报(自然科学版),2006,29(4):430-432. |
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| 作者姓名： | 王玉 赵国俭 |
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| 作者单位： | 1. 上海第二工业大学,理学院,上海,201209
2. 东北大学,理学院,辽宁,沈阳,110004 |
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| 摘 要： | 在铁氧体磁场存在的情况下，通过研究涤纶膜（PET）表面的碳氟等离子体的改性效果受磁场的影响，讨论了带电粒子的行为及磁场对改性的影响．结果发现：磁场的存在使得PET表面的聚合区域向刻蚀区域位移，且主要依赖于磁场的强度．
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| 关 键 词： | 铁氧体 磁场 聚合 刻蚀 |
| 文章编号： | 1000-1735(2006)04-0430-03 |
| 收稿时间： | 09 25 2006 12:00AM |
| 修稿时间： | 2006年9月25日 |
Analysis of Ferrite Magnetic Field and Its Effect on Surface Modification of PET by Fluorocarbon Plasmas |
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| WANG Yu,ZHAO Guo-jian.Analysis of Ferrite Magnetic Field and Its Effect on Surface Modification of PET by Fluorocarbon Plasmas[J].Journal of Liaoning Normal University(Natural Science Edition),2006,29(4):430-432. |
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| Authors: | WANG Yu ZHAO Guo-jian |
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| Institution: | 1. School of Science, Shanghai Second Polytechnic University, Shanghai 201209,China; 2. School of Science, Northeastern University, Shenyang 110004 ,China |
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| Abstract: | Poly ethyl terephthalate(PET) surfaces were modified by CF_4 and CF_4/CH_4 plasmas in the presence of ferrite magnetic field.Behavior of charged particles and effects of the magnetic field on the modification of PET by fluorocarbon plasmas were discussed.It is found that a shift occurred from polymerization zone to etching zone on the PET surface in the presence of ferrite magnetic field.The shift mainly depends on the magnetic field strength. |
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| Keywords: | ferrite magnetic field polymerization etching |
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