| 羰基金属气相沉积工艺条件及膜结构研究 |
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| 引用本文： | 罗玲,吕弋,章娴君.羰基金属气相沉积工艺条件及膜结构研究[J].西南师范大学学报(自然科学版),1999,24(4):432-437. |
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| 作者姓名： | 罗玲 吕弋 章娴君 |
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| 作者单位： | 西南师范大学化学化工学院,重庆,400715 |
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| 摘 要： | 在Al2O3陶瓷基片上以Mo（CO）6为源采用低压冷壁式设备和金属有机气相沉积（MOCVD）方法制备Mo2C薄膜，探讨了该薄膜结构受温度、压力和沉积速率等工艺因素影响的关系．
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| 关 键 词： | 金属有机气相流积 薄膜结构 沉积速率 |
The investigations of membrane structure and process of chemical vapour deposition of carbonyl metals |
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| Zhang Xianjun,Lu Yi,Luo Ling.The investigations of membrane structure and process of chemical vapour deposition of carbonyl metals[J].Journal of Southwest China Normal University(Natural Science),1999,24(4):432-437. |
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| Authors: | Zhang Xianjun Lu Yi Luo Ling |
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| Abstract: | The Preparation of Mo2C membrane on the ceramic substrates of Al2o3 using cold-wall reactor andmetal organic chemical vapour deposition (MOCVD) of Mo(CO)6 have benn developed. The effects oftemperature, pressure and rate of deposition upon membrane structures are discussed. |
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| Keywords: | MOCVD membrane structure rate of deposition |
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