| 反应溅射制备MoO3薄膜及其电致变色响应时间研究 |
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| 引用本文： | 杨海刚,尤天友,宋桂林,将玉荣,常方高.反应溅射制备MoO3薄膜及其电致变色响应时间研究[J].河南师范大学学报(自然科学版),2011,39(4):39-42. |
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| 作者姓名： | 杨海刚 尤天友 宋桂林 将玉荣 常方高 |
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| 作者单位： | 河南师范大学物理与信息工程学院,河南新乡453007;河南省光伏材料重点实验室,河南新乡453007 |
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| 基金项目： | 河南省重点科技攻关计划项目(102102210184); 河南省教育厅自然科学研究项目(2010B140008); 河南师范大学青年科学基金项目(525705) |
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| 摘 要： | 在Ar和O2气氛下采用直流反应溅射沉积了MoO3薄膜,样品制备过程中改变薄膜沉积气压,保持其它参数不变,研究了沉积气压对其电致变色性能的影响.利用X射线衍射(XRD)、原子力显微镜(AFM)、傅里叶红外透射光谱(FTIR)对薄膜的结构进行了表征.采用分光光度计研究了MoO3薄膜的电致变色性能,通过电致变色动态测试对样品...
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| 关 键 词： | 电致变色 响应时间 MoO3薄膜 磁控溅射 |
Electrochromic Response Time of MoO_3 film Fabricated by Reactive Sputtering |
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| YANG Hai-gang,YOU Tian-you,SONG Gui-lin,JIANG Yu-rong,CHANG Fang-gao.Electrochromic Response Time of MoO_3 film Fabricated by Reactive Sputtering[J].Journal of Henan Normal University(Natural Science),2011,39(4):39-42. |
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| Authors: | YANG Hai-gang YOU Tian-you SONG Gui-lin JIANG Yu-rong CHANG Fang-gao |
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| Institution: | YANG Hai-gang1,2,YOU Tian-you1,SONG Gui-lin1,2JIANG Yu-rong1,CHANG Fang-gao1,2 (1.College of Physics and Information Engineering,Henan Normal University,Xinxiang 453007,China,2.Henan Key Laboratory of Photovoltaic Materials,China) |
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| Abstract: | Molybdenum oxide thin films have been prepared by dc reactive magnetron sputtering from a metallic Mo target in an Ar+O2 mixed atmosphere.The electrochromic(EC) properties of the films are studied with different deposition pressure in the deposition process.The MoO3 films are characterized with x-ray diffraction(XRD),atomic force microscopy(AFM) and Fourier transform infrared(FT-IR) spectroscopy.The electrochromic properties of the samples are measured by means of spectrophotometry.In addition,electrochromi... |
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| Keywords: | electrochromic respons time MoO3 films magnetron sputtering |
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