散射光强轮廓的波矢量空间变换研究

利用反射式随机表面的光散射实验测量系统,采用接收屏接收散射图样,用透镜对呈现在接收屏上的散射图样进行成像,并用CCD采集图样,测量了各向异性粗糙硅片在入射角40°-80°之间不同值时的光散射轮廓.根据散射理论可知,各向异性随机表面光散射的各种特征需在波矢量空间来研究,而在实验中只能测得实际空间的光散射轮廓,这需要将光散射轮廓由时间空间向波矢空间变换.笔者在理论上推导了它们之间的变换关系,并对所测得光散射轮廓的实际空间向波矢量空间进行具体变换,研究了各向异性随机表面在二维波矢空间的光散射轮廓分布.

STUDIES OF WAVE VECTOR SPACE TRANSFORMATION OF SCATTERING INTENSITY DISTRIBUTIONS

The experimental measurement system is set up to measure light intensities scattered from the reflection-mode random surface.Using the receiver screen to receive the scattering pattern,the lens to image the scattering pattern on the receiver screen,the scattering pattern is collected with the CCD.The light scattering intensity profiles are calculated at different incident angles（40°-80°） on Si wafer.Basing on the scattering theory,we usually study the various characteristics of anisotropic random surface of the light scattering from the wave vector space,and the scattering profiles can only be measured in the experiment.So it is necessary to transform the light scattering profiles of the actual space into wave vector space.In this paper,the transformation relation between them is deduced in theory.We transform the actual spatial distribution of the light scattering profiles into the wave vector space concretely and study the distribution of light scattering profiles of two-dimensional anisotropic random surface.