| 退火气氛对SrTiO3薄膜电学性能的影响 |
| |
| 引用本文： | 王晓飞,胡秋波.退火气氛对SrTiO3薄膜电学性能的影响[J].河南科技大学学报(自然科学版),2011,32(4):5-7,107. |
| |
| 作者姓名： | 王晓飞 胡秋波 |
| |
| 作者单位： | 1. 河南科技大学物理与工程学院,河南洛阳,471003
2. 洛阳理工学院数理部,河南洛阳,471023 |
| |
| 基金项目： | 国家自然科学基金项目(50972056); 河南科技大学博士科研启动基金项目 |
| |
| 摘 要： | 在不同的退火气氛下,采用金属有机物分解法在(111)Pt/Ti/SiO2/Si衬底上制备了SrTiO3薄膜材料,并对其结构和电学性能进行了研究。X射线衍射结果显示SrTiO3薄膜都呈现多晶立方钙钛矿结构。对比不同气氛下制备出的SrTiO3样品电学测量结果,发现在氧气氛中退火后,样品具有较低的漏电流和较好的介电性能,这可能是由于氧气氛中退火减少了SrTiO3薄膜内氧空位的浓度引起的。
|
| 关 键 词： | SrTiO3 漏电流 介电常数 介电损耗 |
Effect of Annealing Atmosphere on Electric Properties of SrTiO_3 Thin Film |
| |
| WANG Xiao-Fei,HU Qiu-Bo.Effect of Annealing Atmosphere on Electric Properties of SrTiO_3 Thin Film[J].Journal of Henan University of Science & Technology:Natural Science,2011,32(4):5-7,107. |
| |
| Authors: | WANG Xiao-Fei HU Qiu-Bo |
| |
| Institution: | WANG Xiao-Fei1,HU Qiu-Bo2(1.Physics & Engineering School,Henan University of Science & Technology,Luoyang 471003,China,2.Department of Mathematics & Science,Luoyang Institute of Science & Technology,Luoyang 471023,China) |
| |
| Abstract: | SrTiO3 film was prepared by metal organic deposition method on(111) Pt/Ti/SiO2/Si substrates in different annealing atmosphere.The structures and electric properties were studied.The samples show polycrystalline structure of pure cubic perovskite phase.By comparing these results of different annealing atmosphere,the samples annealed in oxygen atmosphere indicate lower leakage currents and better dielectric properties,and the possible cause is that the annealing in oxygen atmosphere effectively decreases the... |
| |
| Keywords: | Strontium titanate Leakage current Dielectric constant Dielectric loss |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
|
