功能绝缘材料加工工艺对电润湿显示器性能的影响

以通过蒸汽溶解法(Vapor redissolve method)代替高温回流法来恢复氟树脂层的疏水性能,使用氟碳溶剂(HFE7100)蒸汽溶解氟树脂层粗糙表面使其形成溶胶状态,加热蒸发溶剂后使表面恢复疏水性质.对溶解法溶解时间、干燥温度和干燥时间等条件进行了探究,对比了高温回流法和蒸汽溶解法对电润湿显示器产生的物理和光电的影响.蒸汽溶解法在不影响电润湿显示器其他功能的前提下,可以替代高温回流方法恢复氟树脂层的疏水功能并且工艺更简单.

Process Influence on Electro-Wetting Display Insulator Material Property

Electrowetting display is a kind of device that use fluororesin layer (e.g. AF1600) as the hydrophobic insulating layer. It works with changing applied voltages to change the surface wettability of liquid. In order to get better adhesive properties for photoresist layer and the fluororesin layer, ion itching should be done to increase the wettability.　Electro-wetting properties need to be restored by recovering fluororesin hydrophobic wetting properties after photolithography. A usual method is high temperature reflow. This method would melt leveling thefluorine resin surface, but high temperature would also cause　defects like yellowing photoresist material, pixel grid deformation etc. In this paper , instead of high temperature reflow method, vapor redissolve method was suggested to recover hydrophobicity, using a fluorocarbon solvent(HFE7100) steam to dissolve fluororesin layer surface roughened sol state. After heating, the solvent was evaporated to restore the hydrophobic nature of its surface. Focus on the dissolving time, drying temperature and drying time, deep research was done in this paper. Comparion on physical effects and photoelectric effects to electrowetting display devices are made between these two methods.