| 利用双束技术制备纳米锆氧化物薄膜的研究 |
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| 引用本文： | 杨斌,黄宁康,雷家荣,汪德志.利用双束技术制备纳米锆氧化物薄膜的研究[J].四川大学学报(自然科学版),2001,38(6):852-855. |
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| 作者姓名： | 杨斌 黄宁康 雷家荣 汪德志 |
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| 作者单位： | 四川大学辐射物理及技术教育部重点实验室@四川大学原子核科学技术研究所,成都,610064 |
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| 摘 要： | 作者采用离子束溅射沉积Zr的同时，进行氧离子的轰击，随着注入离子束流密度的变化，所形成的锆氧化物薄膜从非晶态向晶态转化，其形成的晶态薄膜为纳米量级范围内的微晶，实验发现，衬底不同对形成纳米锆氧化物的临界氧离子束流密度也不同，作者还对纳米晶粒的相结构及其化学组成进行了相应的分析。
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| 关 键 词： | 双离子束技术 锆氧化物 纳米晶粒 薄膜 制备 |
| 文章编号： | 0490-6756(2001)06-0852-04 |
STUDY OF PREPARATION FOR THE FILMS OF ZIRCONIUM OXIDE WITH nm PARTICLES |
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| YANG Bin,HUANG Ning-kang,LEI Jia-rong,WANG De-zhi.STUDY OF PREPARATION FOR THE FILMS OF ZIRCONIUM OXIDE WITH nm PARTICLES[J].Journal of Sichuan University (Natural Science Edition),2001,38(6):852-855. |
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| Authors: | YANG Bin HUANG Ning-kang LEI Jia-rong WANG De-zhi |
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| Abstract: | Zr is deposited on the substrates with ion beam sputtering, at the same time, with oxygen ion beam bombarding. It is found that zirconium oxides formed from amorphous to crystallites are dependent on the densities of the bombarding oxygen ion beam, where the size of the crystallite is in the range of nm particles. And the critical densities of the bombarding oxygen ion beam for the formation of the nm particles are different from different substrate materials. Also the phase structure and chemical composition of the nm particles are analyzed in this paper. |
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| Keywords: | dual ion beam zirconium oxides nm particles |
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