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正电子深能级瞬态谱在GaAs缺陷研究中的应用
引用本文:张英杰,邓爱红,幸浩洋,龙娟娟,喻菁,于鑫翔,程祥.正电子深能级瞬态谱在GaAs缺陷研究中的应用[J].四川大学学报(自然科学版),2008,45(3):586-590.
作者姓名:张英杰  邓爱红  幸浩洋  龙娟娟  喻菁  于鑫翔  程祥
作者单位:四川大学物理学院应用物理系,成都,610065
基金项目:国家自然科学基金(10775102)
摘    要:本文介绍的正电子深能级瞬态谱(PDLTS)技术是结合了对固体缺陷有很高灵敏度的正电子湮没谱(PAS)和一些深能级瞬态谱(DLTS)技术而成新的实验方法.该技术能用来研究Ⅲ~Ⅴ,Ⅱ~Ⅵ族等半导体材料的缺陷特征,它的优点不仅能研究半导体材料中缺陷的电学特征而且还能够同时揭示这些电活性缺陷的微观结构信息.本文将介绍砷化镓中EL2缺陷能级的PDLTS研究,运用该技术并结合深能级Arrhenius分析,得到EL2能级值为0.82±0.02 eV.

关 键 词:正电子  半导体  深能级瞬态谱(DLTS)  正电子深能级瞬态谱(PDLTS)

Application of positron deep level transient spectroscopy to the study of defect in GaAs
ZHANG Ying-Jie,DENG Ai-Hong,XING Hao-Yang,LONG Juan-Juan,YU Jing,YU Xing-Xiang and GHENG Xiang.Application of positron deep level transient spectroscopy to the study of defect in GaAs[J].Journal of Sichuan University (Natural Science Edition),2008,45(3):586-590.
Authors:ZHANG Ying-Jie  DENG Ai-Hong  XING Hao-Yang  LONG Juan-Juan  YU Jing  YU Xing-Xiang and GHENG Xiang
Institution:Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University;Department of Applied Physics, School of Physical Science and Technology, Sichuan University
Abstract:
Keywords:positron  semiconductor  DLTS  PDLTS (positron deep level transient spectroscopy)
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