| Nd掺杂对ZnO薄膜结构及室温光致发光特性的影响 |
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| 引用本文： | 文军,陈长乐.Nd掺杂对ZnO薄膜结构及室温光致发光特性的影响[J].四川大学学报(自然科学版),2008,45(6):1436-1440. |
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| 作者姓名： | 文军 陈长乐 |
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| 作者单位： | 1. 西北工业大学应用物理系,西安,710072;渭南师范学院物理系,渭南,714000
2. 西北工业大学应用物理系,西安,710072 |
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| 基金项目： | 国家自然科学基金重点资助项目(50331040) |
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| 摘 要： | 通过射频磁控溅射技术在Si（111）衬底上制备了不同含量的Nd掺杂ZnO薄膜.XRD和AFM分析表明，Nd掺杂没有改变ZnO薄膜的结构，薄膜为纳米多晶结构，未掺杂ZnO沿c择优生长.Nd掺杂使ZnO薄膜表面粗糙，起伏较大，薄膜中随Nd掺杂量的增加颗粒减小.室温光致发光谱显示，薄膜出现了395nm的强紫光峰和495nm的弱绿光峰，同时，Nd掺杂不改变PL谱的峰位置，Nd含量对PL谱的峰强度产生了一定影响.
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| 关 键 词： | Nd掺杂 ZnO薄膜 射频磁控溅射 光致发光 |
Effect of neodymium content on structure and RT photoluminescence properties of doped ZnO thin films |
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| WEN Jun and CHEN Chang-Le.Effect of neodymium content on structure and RT photoluminescence properties of doped ZnO thin films[J].Journal of Sichuan University (Natural Science Edition),2008,45(6):1436-1440. |
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| Authors: | WEN Jun and CHEN Chang-Le |
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| Institution: | Department of Applied Physics, School of Science, Northwestern Polytechnical University;Department of Physics, Weinan Teachers University;Department of Applied Physics, School of Science, Northwestern Polytechnical University |
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| Abstract: | The no-doped ZnO thin film and Nd-doped ZnO thin films were deposited on Si(111) substrate by RF magnetron sputtering.As analyzed by XRD and AFM,the structure of the thin films was not disturbed by Nd-doping and the thin films were nano-multi-crystal thin films.The no-doped ZnO thin films had high c-axis orientation.The surface morphology of Nd-doped ZnO thin films were roughness and the grain diameter of the thin films were decrease with the increase of the neodymium contents.The room temperature Photolumi... |
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| Keywords: | Nd-doped ZnO thin film RF magnetron sputtering photoluminescence |
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