| 锆钛酸铅铁电薄膜的制备及在红外探测器中的应用 |
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| 引用本文： | 李建康,姚熹.锆钛酸铅铁电薄膜的制备及在红外探测器中的应用[J].太原理工大学学报,2004,35(4):388-391. |
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| 作者姓名： | 李建康 姚熹 |
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| 作者单位： | 1. 西安交通大学,电子材料研究所,陕西,西安,710049;太原理工大学,材料科学与工程学院,山西,太原,030024
2. 西安交通大学,电子材料研究所,陕西,西安,710049 |
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| 基金项目： | 国家重点基础研究发展计划资助项目(2002CB613304)，上海市重点学科建设资助项目。 |
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| 摘 要： | 研究了敏感元材料锆钛酸铅(PZT)铁电薄膜的制备、结构和性能，并采用半导体光刻工艺和化学腐蚀的方法成功地对PZT铁电薄膜进行了刻蚀，同时采用剥离技术对相应的电极实现了图形化。该研究为铁电薄膜在热释电红外探测器中的应用奠定了基础。
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| 关 键 词： | 热释电探测器 敏感元 光刻 剥离 |
| 文章编号： | 1007-9432(2004)04-0388-04 |
| 修稿时间： | 2004年2月25日 |
The Preparation of PZT Ferroelectric Thin Films and its Application in Pyroelectric IR Sensor |
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| LI Jian-kang.The Preparation of PZT Ferroelectric Thin Films and its Application in Pyroelectric IR Sensor[J].Journal of Taiyuan University of Technology,2004,35(4):388-391. |
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| Authors: | LI Jian-kang |
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| Institution: | LI Jian-kang~ |
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| Abstract: | Recently, pyroelectric IR sensor has received a great deal of attention in IR imaging field, because of its broad spectrum response and uncooling properties. A critical component in the pyroelectric IR sensor is the sense organ, which consists of the ferroelectric thin film in a certain shape and its up-down electrodes. In this paper, the preparation, structure and electric properties of the sensor materials were studied. Through semiconductor lithograph arts, the ferroelectric thin films was micropattered successfully by the chemical etch and the electrodes were shaped by lift-off techniques.This study is very important for the application of ferroelectric thin films in IR sensor. |
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| Keywords: | pyroelectric IR sensor sense organ lithograph lift-off |
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