| 金属有机化合物化学气相淀积含钛硬质涂层的性能研究 |
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| 引用本文： | 周定为,韩杰,袁渭康.金属有机化合物化学气相淀积含钛硬质涂层的性能研究[J].华东理工大学学报(自然科学版),1990(4). |
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| 作者姓名： | 周定为 韩杰 袁渭康 |
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| 作者单位： | 华东化工学院联合反应工程研究所技术化学物理研究室
(周定为，韩杰)，华东化工学院联合反应工程研究所技术化学物理研究室(袁渭康) |
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| 摘 要： | 在用文题淀积方法制备出氮化钛、碳氮化钛和碳氮氧化钛硬质涂层的基础上,用表面分析手段分别进行了成分、结构分析、形貌观察和硬度测定。结果表明:以二乙胺基钛为原料可分别在773K和973K淀积氮化钛和碳氮化钛涂层;用钛酸异丙酯和钛酸丁酯可分别在973K和1073K获得碳氮氧化钛涂层。所得的涂层表面光洁度高、与基体附着性好、硬度满足实用要求。相比于普通化学气相淀积方法,本法在制备硬质涂层上有两大优点:(1)淀积温度降低,扩大了基体的选用范围;(2)固溶体涂层的获得扩大了涂层的适用范围。
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| 关 键 词： | 化学气相沉积 氮化钛 涂层 测定 氮碳化钛 氮碳氧化钛 金属有机化合物 |
Characteristic Study of Hard Coatings Containing Titanium Prepared by Metallo-Organic Chemical Vapour Deposition |
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| Zhou Dingwei,Han Jie Yuan Weikang.Characteristic Study of Hard Coatings Containing Titanium Prepared by Metallo-Organic Chemical Vapour Deposition[J].Journal of East China University of Science and Technology,1990(4). |
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| Authors: | Zhou Dingwei Han Jie Yuan Weikang |
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| Institution: | Technical Chemical Physics Lab. UNILAB |
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| Abstract: | By using auger electron spectroscopy (AES) to determine surface composition, X-ray diffraction (XRD) to determine crystal structure, scanning electron microscope (SEM) to observe surface morphology and microhardness instrument to determine surface microhardness, hard coatings (TIN, Ti(C,N) & Ti(C, N, O)) prepared by metallo-organic chemical vapour deposition (MOCVD) are verified to have smooth surface good adherence to substrate and high hardness. Contrast to typical CVD method. MOCVD has two advantages that deposition temper-ature has been lowered so as to enlarge the range of substrate selection and solid-solution coat-ings. with wide application are obtained. |
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| Keywords: | chemical vapour deposition titanium nitride coating determination titanium carbonitride titanium oxycarbonitride metallo-organic compound |
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