微悬臂梁阵列传感系统的性能分析

对微悬臂梁阵列传感系统的一致性进行了研究。以改变温度作为激励手段,在微梁阵列检测装置上分别检测了2种微梁阵列在升温与降温时的热响应。无论是升温还是降温,2种微梁阵列的尖端位移都与温度变化成线性关系。发现2种微梁阵列升、降温检测时微梁阵列传感系统都表现出良好的热响应一致性。另外,利用单梁检测装置对其中1种微梁阵列进行了热响应检测,其热响应灵敏度与微梁阵列检测装置检测结果一致,验证了2种微梁传感装置的可靠性。微梁阵列传感系统良好的热响应一致性为将来微悬臂梁阵列用于生化传感奠定了基础。

Performance analysis of micro-cantilever array sensing system

This paper studied the consistency problem of micro-cantilever array sensing system. By changing temperature, the thermal response of two kinds of micro-cantilever arrays was measured in cantilever array sensing device. Whether the temperature increases or decreases, the tip displacement of two kinds of cantilever arrays is linear to temperature variation. The micro cantilever array sensing system shows good thermal consistency, when the temperature of cantilever arrays was increased or de- creased. Moreover, thermal response of cantilever array was measured using single cantilever sensing device. The results show that the thermal response sensitivity of cantilever array measured by single cantilever sensing device is consistent with that measured by array devices, which verifies the reliability of the two kind of sensing devices in thermal response. The study lays the foundation of cantilever array for future biochemical sensing.