| InP-H_2-KBH_4体系中磷的热力学分析、检测及治理 |
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| 引用本文： | 闻瑞梅,陈朗星,金晓军.InP-H_2-KBH_4体系中磷的热力学分析、检测及治理[J].应用基础与工程科学学报,1994(4). |
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| 作者姓名： | 闻瑞梅 陈朗星 金晓军 |
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| 作者单位： | 中国科学院半导体研究所，中国科学院半导体研究所，中国科学院半导体研究所 北京 100083，北京 100083，北京 100083 |
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| 摘 要： | 用热力学计算了InP-H_2-KBH_4体系中磷的组分与温度的关系,从理论上探讨了用气相色谱分析固相中磷的可能性。建立了不经化学预处理,用气相色谱直接测定固、液、气相样品中的磷及其磷化物的方法,测定结果与分光光度法基本一致。用逆向喷淋的方法对半导体工艺尾气中的磷进行了有效的治理。
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| 关 键 词： | 热力学计算 磷 气相色谱 治理 |
THERMODYNAMIC ANALYSIS,DETERMINATION AND ABATEMENT OF PHOSPHORUS IN THE InP-H_2-KBH_4 SYSTEM |
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| Ruimei WEN Langxing CHEN Xiaojun JINInstitute of Semiconductors,Chinese Academy of Sciences,Beijing.THERMODYNAMIC ANALYSIS,DETERMINATION AND ABATEMENT OF PHOSPHORUS IN THE InP-H_2-KBH_4 SYSTEM[J].Journal of Basic Science and Engineering,1994(4). |
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| Authors: | Ruimei WEN Langxing CHEN Xiaojun JINInstitute of Semiconductors Chinese Academy of Sciences Beijing |
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| Institution: | Ruimei WEN Langxing CHEN Xiaojun JINInstitute of Semiconductors,Chinese Academy of Sciences,Beijing 100083 |
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| Abstract: | It is based on thermodynamic theories to calculate relationship between the concentration of phosphoric species and temperature. It is demonstrated possibility to analyse phosphorus in solid state by using gas chromatography. The method of determinating the concentration of phosphorus and phosphide in solid, liquid and gas state without pre-treat samples has been built and determination result is practically the same as spectrophotometer. There are very effective abatement results to tail gases is the fabricating of semiconductor process with counter-current spray system. |
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| Keywords: | thermodynamic calculation phosphorus gas chromatography abatement |
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