(1) Laboratory of Optical Physics, Institute of Physics & Center for Condensed Matter Physics, Chinese Academy of Sciences, 100080 Beijing, China
Abstract:
Conclusion We investigated the deposition of YSZ buffer layers on polycrystalline metallic substrate at low temperature and low oxygen
pressure. The (100) preferred orientation can be obtained in the YSZ films and was explained by the model of growth-based
orientation selection. Optimizations of oxygen partial pressure and target distance were done to offer referable values for
IBAD process.