Synthesis of carbon nanotube array using corona discharge plasma-enhanced chemical vapor deposition |
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Authors: | Mingwei?Li Email author" target="_blank">Zheng?HuEmail author Xizhang?Wang Qiang?Wu Yinong?Lü Yi?Chen |
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Institution: | (1) Lab of Mesoscopic Materials Science, School of Chemistry and Chemical Engineering, Nanjing University, 210093 Nanjing, China;(2) School of Materials Science and Engineering, Nanjing University of Technology, 210009 Nanjing, China |
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Abstract: | A corona discharge plasma-enhanced chemical vapor deposition with the features of atmospheric pressure and low temperature
has been developed to synthesize the carbon nanotube array. The array was synthesized from methane and hydrogen mixture in
anodic aluminum oxide template channels in that cobalt was electrodeposited at the bottom. The characterization results by
the scanning electron microscopy, transmission electron microscopy, energy dispersive X-ray spectroscopy and Raman spectroscopy
indicate that the array consists of carbon nanotubes with the diameter of about 40 nm and the length of more than 4 μm, and
the carbon nanotubes are mainly restrained within the channels of templates. |
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Keywords: | carbon nanotube array corona discharge plasma chemical vapor deposition anodic aluminum oxide template |
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