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Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance |
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| Authors: | Qingya Zhang Jianshe Liu Wenhui Dong Tianshun Wang Genfang He Tiefu Li Xingxiang Zhou Wei Chen |
| Institution: | 1. Tsinghua National Laboratory for Information Science and Technology, Tsinghua University, Beijing, 100084, China 2. Institute of Microelectronics, Department of Micro/Nanoelectronics, Tsinghua University, Beijing, 100084, China 3. Department of Optics and Optical Engineering, University of Science and Technology of China, Hefei, 230026, China 4. CAS Key Laboratory of Quantum Information, University of Science and Technology of China, Hefei, 230026, China |
| Abstract: | We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers.To reduce the intrinsic noise level and tune the saturation power of a bolometer,the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries.The measurement results show that the detectors have background limited noise performance,with a low noise equivalent power(NEP)on the order of10-17W/Hz1/2and have a saturation power of several tens pW at a bath temperature of 320 mK.These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths. |
| Keywords: | Bolometer Superconducting transitionedge sensor Background limited noise performance |
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