Institution: | [1]Laboratory of Nano-fabrication and Novel Device Integration, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; [2]Institute of Microelectronics, Tsinghua University,Beijing 100083, China; [3]Institute of Microelectronics, Peking University, Beijing 100871,China; [4]Semiconductor Manufacturing International Corporation,Shanghai 201203, China |