| In-plane load measuring technique for the strength test of MEMS micro-cantilever |
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| 作者姓名： | HUAN Yong ZHANG Taihua YANG Yemin |
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| 作者单位： | State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics,Chinese Academy of Sciences, Beijing 100080, China |
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| 基金项目： | Acknowledgements The authors would like to thank Mr. Zhang Dacheng and Ruan Yong from Peking University for their assistance in sample preparation. This work was supported by the National Natural Science Foundation of China （Grant Nos.10432050, 10572142）. |
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| 摘 要： | An in-plane load measuring technique is developed to perform the strength test of the micro-cantilever. Based on electromagnetism theorem, Micro UTM (Universal Testing Machine) was in-house made with the load range ±1 N and the displacement range ±300 μm. It applies an in-plane load on the free-end of the micro-cantilever. The load acts as a bending moment for the root of the cantilever, but as a torque for the anchor. The results show that for samples with different sizes the ultimate loads range from 1.3 to 69.8 mN and the calculated torque is ap-proximately proportional to the square of the bonding length. Two failure modes, fracture at the root of the cantilever and fracture at the anchor, are observed by micro examination to the debris, which indicates that there is a critical design to achieve the strength bal-ance between the cantilever and the anchor. The work demonstrates that Micro UTM is a powerful in-strument for the strength test of the micro-cantilever and similar micro-structures.
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| 关 键 词： | 测试 强度 微旋臂 机械学 |
| 收稿时间： | 2006-08-16 |
| 修稿时间： | 2006-08-162006-10-13 |
In-plane load measuring technique for the strength test of MEMS micro-cantilever |
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| HUAN Yong ZHANG Taihua YANG Yemin.In-plane load measuring technique for the strength test of MEMS micro-cantilever[J].Chinese Science Bulletin,2006,51(23):2819-2823. |
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| Authors: | Yong Huan Taihua Zhang Yemin Yang |
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| Institution: | (1) State Key Laboratory of Nonlinear Mechanics, Institute of Mechanics, Chinese Academy of Sciences, Beijing, 100080, China |
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| Abstract: | An in-plane load measuring technique is developed to perform the strength test of the micro-cantilever. Based on electromagnetism
theorem, Micro UTM (Universal Testing Machine) was in-house made with the load range ±1 N and the displacement range ±300
μm. It applies an in-plane load on the free-end of the micro-cantilever. The load acts as a bending moment for the root of
the cantilever, but as a torque for the anchor. The results show that for samples with different sizes the ultimate loads
range from 1.3 to 69.8 mN and the calculated torque is approximately proportional to the square of the bonding length. Two
failure modes, fracture at the root of the cantilever and fracture at the anchor, are observed by micro examination to the
debris, which indicates that there is a critical design to achieve the strength balance between the cantilever and the anchor.
The work demonstrates that Micro UTM is a powerful instrument for the strength test of the micro-cantilever and similar micro-structures. |
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| Keywords: | test in-plane strength micro-cantilever |
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