CHAI Chunlin,YANG Shaoyan,LIU Zhikai,LIAO Meiyong & CHEN Nuofu Key Laboratory of Semiconductor Material Science,Institute of Semi-conductors,Chinese Academy of Sciences,Beijing 100083,China
基金项目:
国家重点基础研究发展计划(973计划),国家自然科学基金
摘 要:
CeO2 is a rare-earth oxide which has a face centered cubic fluorite crystal structure. It has fine chemical stabil-ity and high dielectrics (e = 26). Its lattice constant has closely matched to silicon and the dismatch is about 0.35%. It is always investigated as insulator material in the silicon-on-insulator (SOI) structures, dielectric mate-rial and the buffer layer between the superconductor Yba2Cu3O7 and the Si substrate1—6]. Recently, the PL of CeO2 was studied by many groups. The…