| 微电子工艺可靠性研究 |
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| 引用本文： | 杨虹.微电子工艺可靠性研究[J].重庆邮电学院学报(自然科学版),2003,15(1):85-88. |
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| 作者姓名： | 杨虹 |
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| 作者单位： | 重庆邮电学院 重庆400065 |
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| 摘 要： | 可靠性是产品质量的重要组成部分，微电子工艺可靠性是保证IC产品可靠性的关键一环，从IC生产环节考虑，详细讨论了微电子工艺可靠性及其保证措施，重点讨论了原材料控制，设备与工艺控制与洁净环境控制的重要性，这些因素是生产高可靠性IC产品的有力保证。
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| 关 键 词： | 可靠性 微电子 集成电路 工艺控制 洁净环境控制 原材料控制 |
Reliability Study of Microelectronics Process |
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| YANG Hong.Reliability Study of Microelectronics Process[J].Journal of Chongqing University of Posts and Telecommunications(Natural Sciences Edition),2003,15(1):85-88. |
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| Authors: | YANG Hong |
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| Abstract: | Reliability is very important to product quality and the reliability of microelectronics process is one of the most important factors to high quality IC products. According to the production of IC, this paper discusses in detail the conception of microelectronics process reliability and measures taken to keep the quality. Especially, the study also deals with how to control the raw materials and processed materials, equipment, and technics control and clean environment. All these factors are necessary guarantee of manufacturing IC production with high reliability. |
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| Keywords: | reliability microelectronics IC |
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