| 基于等厚干涉原理的圆度误差测量方法 |
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| 引用本文： | 吴君君,宋伟.基于等厚干涉原理的圆度误差测量方法[J].燕山大学学报,2008,32(1):91-94. |
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| 作者姓名： | 吴君君 宋伟 |
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| 作者单位： | 燕山大学,理学院,河北,秦皇岛,066004 |
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| 摘 要： | 提出了一种基于等厚干涉和CCD自动测量圆度误差的新方法.阐述了利用等厚干涉,通过线阵CCD图像处理系统自动测量圆度误差的测量原理.采用最小二乘圆法对测量到的数据进行圆度误差评定,测量结果表明,新方法测量迅速、精确度高.该测量方法可以实现圆度误差的实时在线准确测量,适用与高精度加工工件的进一步精确测量,具有较广阔的应用前景.
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| 关 键 词： | 圆度误差 等厚干涉 CCD 干涉原理 圆度误差评定 测量方法 interference thickness based roundness error measuring 前景 应用 精确测量 加工工件 精度 准确测量 实时在线 精确度 测量结果 数据 圆法 最小 |
| 文章编号： | 1007-791X（2008）01-0091-04 |
| 收稿时间： | 2007-10-11 |
| 修稿时间： | 2007年10月11 |
Method of measuring roundness error based on equal thickness interference |
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| WU Jun-jun,SONG Wei.Method of measuring roundness error based on equal thickness interference[J].Journal of Yanshan University,2008,32(1):91-94. |
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| Authors: | WU Jun-jun SONG Wei |
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| Abstract: | A new method of auto-measuring the roundness error based on equal thickness interference and CCD is proposed. The principle of the measuring roundness error system used the equal thickness interference and CCD image-processing system is expatiated. The measuring roundness error is assessed by least square method using the measuring data. The measuring results show that the measure system can realized the real-time and online accurate measuring of the roundness error, it is fit for exactitude measure, so this method has high practicality. |
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| Keywords: | measuring roundness error equal thickness interference CCD |
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